Suwon
South Korea
9
2012-02-16
9
2012-07-17
These are the the leading inventors for applications assigned to DMS CO. LTD.:
DMS CO. LTD. based in Suwon, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method
#2 | 2011-04-07 ✅ Patent 8,652,296 granted on 2014-02-18Side gas injector for plasma reaction chamber
#3 | 2011-03-10 ✅ Patent 8,398,783 granted on 2013-03-19Workpiece de-chucking device of plasma reactor for dry-cleaning inside of reaction chamber and electrostatic chuck during workpiece de-chucking, and workpiece de-chucking method using the same
#4 | 2010-10-07 ✅ Patent 8,319,363 granted on 2012-11-27Wind power generator
#5 | 2009-11-12 ✅ Patent 8,158,068 granted on 2012-04-17Plasma reactor
#6 | 2009-07-30 ✅ Patent 7,632,028 granted on 2009-12-15Substrate transfer apparatus
#7 | 2009-01-29 ✅ Patent 8,049,872 granted on 2011-11-01Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method
#8 | 2008-09-04 ✅ Patent 8,123,903 granted on 2012-02-28Plasma reactor having multiple antenna structure
#9 | 2005-02-17 ✅ Patent 7,669,788 granted on 2010-03-02Fluid injector for treating surface of flat display panel
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