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Assignee profile:

ASM NUTOOL, INC.

City:

Phoenix, Arizona

Country:

United States

Published Applications:

14

Last publication date:

2009-03-12

Patent Grants:

11

Last grant date:

2009-12-01

Top Inventors for applications by ASM NUTOOL, INC.

These are the the leading inventors for applications assigned to ASM NUTOOL, INC.:

Recent patent applications by ASM NUTOOL, INC.

ASM NUTOOL, INC. based in Phoenix, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2009-03-12
US20090065365A1
Chemistry; metallurgy

METHOD AND APPARATUS FOR COPPER ELECTROPLATING

 #2 | 2008-10-02
US20080242078A1
Electricity

PROCESS OF FILLING DEEP VIAS FOR 3-D INTEGRATION OF SUBSTRATES

 #3 | 2007-12-20 ✅ Patent 7,625,814 granted on 2009-12-01
US20070293040A1
Electricity

Filling deep features with conductors in semiconductor manufacturing

 #4 | 2007-10-11 ✅ Patent 7,485,561 granted on 2009-02-03
US20070238293A1
Electricity

Filling deep features with conductors in semiconductor manufacturing

 #5 | 2007-06-14
US20070131563A1
Performing operations; transporting

MEANS TO IMPROVE CENTER TO EDGE UNIFORMITY OF ELECTROCHEMICAL MECHANICAL PROCESSING OF WORKPIECE SURFACE

 #6 | 2007-03-13 ✅ Patent 7,189,146 granted on 2007-03-13
US10425782
-

Method for reduction of defects in wet processed layers

 #7 | 2007-02-06 ✅ Patent 7,172,497 granted on 2007-02-06
US10264726
-

Fabrication of semiconductor interconnect structures

 #8 | 2006-11-28 ✅ Patent 7,141,146 granted on 2006-11-28
US10816340
-

Means to improve center to edge uniformity of electrochemical mechanical processing of workpiece surface

 #9 | 2006-10-31 ✅ Patent 7,129,165 granted on 2006-10-31
US10858766
-

Method and structure to improve reliability of copper interconnects

 #10 | 2006-09-05 ✅ Patent 7,101,471 granted on 2006-09-05
US10383466
-

Method for planar material removal technique using multi-phase process environment

 #11 | 2006-08-29 ✅ Patent 7,097,755 granted on 2006-08-29
US10288558
-

Electrochemical mechanical processing with advancible sweeper

 #12 | 2005-10-13 ✅ Patent 7,115,510 granted on 2006-10-03
US20050227483A1
Performing operations; transporting

Method for electrochemically processing a workpiece

 #13 | 2005-05-26 ✅ Patent 7,064,057 granted on 2006-06-20
US20050112868A1
Electricity

Method and apparatus for localized material removal by electrochemical polishing

 #14 | 2005-04-14 ✅ Patent 7,122,473 granted on 2006-10-17
US20050079713A1
Electricity

Edge and bevel cleaning process and system
AssigneeID:

243898 ⎘