Fine carbon fiber, fine short carbon fiber, and manufacturing method for said fibers

Fluorination of Multi-Layered Carbon Nanomaterials

MODIFIED CARBON NANOTUBE ARRAYS

Imprint lithography apparatus

Method for preparing single walled carbon nanotubes from a metal layer

ENHANCEMENT OF QUALITY AND QUANTITY OF CARBON NANOTUBES DURING GROWTH BY ADDITION OF MISCIBLE OXYGENATES

System and method for using a two part cover and a box for protecting a reticle

Chucking system with recessed support feature

Electromagnetic wave detection methods and apparatus

Imprint Lithography Apparatus and Method

Method of patterning of nanostructures

Optical release of hydrogen from functionalized fullerenes as storage materials

FILTER AND PROCESS OF USE TO PRODUCE CARBON NANOTUBES FROM AUTOMOTIVE EXHAUSTS

SEMICONDUCTOR APPARATUS MANUFACTURING METHOD AND IMPRINT TEMPLATE

Reflective mask blank for EUV lithography and reflective mask for EUV lithography

Interconnected hollow nanostructures containing high capacity active materials for use in rechargeable batteries

ELECTROPOLYMERIZABLE SURFACTANT FOR DISPERSING CARBON NANOTUBES

Carbon nanotube dispersion and utilization of same

Methods utilizing scanning probe microscope tips and products thereof or produced thereby

IMPRINT STAMPER AND IMPRINT DEVICE

Surface independent, surface-modifying, multifunctional coatings and applications thereof

Redispersible agglomerate of fine carbon fibers and method for producing thereof

Gas isolation valve

Integrated circuits having interconnects and heat dissipators based on nanostructures

Article including thermal interface element and method of preparation

Method for providing a magnetic recording transducer

Graphene device and method of fabricating a graphene device

Sheet structure, semiconductor device and method of growing carbon structure

Method for producing core-shell nanowires, nanowires produced by the method and nanowire device comprising the nanowires

SEPARATION OF CARBON NANOTUBE BUNDLES VIA INTERFACIAL TRAPPING

Microwave induced functionalization of single wall carbon nanotubes and composites prepared therefrom

Poly(citric acid) functionalized carbon nanotube drug delivery system

TiO-containing silica glass and optical member for EUV lithography using the same

Method of fabricating a microfabricated structure

Mask for EUV lithography and method for exposure using the same

Growth of carbon nanotubes on carbon or metal substrates

Dual zone template chuck

METHOD OF PROCESSING SUBSTRATE AND IMPRINT DEVICE

Complexes of carbon nanotubes and fullerenes with molecular-clips and use thereof

Gas-phase functionalization of surfaces including carbon-based surfaces

Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus

Production of single-walled carbon nanotube grids

Low resistance tunneling magnetoresistive sensor with natural oxidized double MgO barrier

SURFACE-STRUCTURED POLYURETHANE SUBSTRATES AND METHODS FOR PRODUCING THE SAME

Polyol functionalized water soluble carbon nanostructures

Graphene composite nanofiber and preparation method thereof

Fullerene film and fullerene polymer both produced from fullerene derivative and processes for producing these

Horizontal coffee-stain method using control structure to pattern self-organized line structures

Vertical coffee-stain method for forming self-organized line structures

Methods for manufacturing a contact grid on a photovoltaic cell

Patterning nano-scale patterns on a film comprising unzipping polymer chains

Method to produce nanometer-sized features with directed assembly of block copolymers

Continuous extraction technique for the purification of carbon nanomaterials

Multistage reactors for continuous production of carbon nanotubes

Spin torque transfer MRAM design with low switching current

Magnetic tunnel junction device and fabrication

Chucking System for Nano-Manufacturing

Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction

Imprint apparatus and method of manufacturing article

Processing method and manufacturing method for optical component

VANADIUM DIOXIDE NANOWIRE, FABRICATION PROCESS THEREOF, AND NANOWIRE DEVICE USING VANADIUM DIOXIDE NANOWIRE

Quantum dot optical devices with enhanced gain and sensitivity and methods of making same

Method of making a 3-D structure

METHOD FOR SYNTHESIS OF TITANIUM DIOXIDE NANOTUBES USING IONIC LIQUIDS

Patterned nanosubstrates made by directed self assembly of amphiphilic molecules

Method for manufacturing structure

Self-assembling surface coating

DURABLE COATING COMPOSITION

Etching mask, base material having etching mask, finely processed article, and method for production of finely processed article

Protective device for protecting carbon nanotube film

Fine metal structure, process for producing the same, fine metal mold and device

Carbon and Electrospun Nanostructures

TEMPLATE AND PATTERN FORMING METHOD

Nanoimprint resist, nanoimprint mold and nanoimprint lithography

TOOL FOR MAKING MICROSTRUCTURED ARTICLES

METHOD OF MANUFACTURING STAMPER

METHOD FOR MAKING CARBON NANOTUBE WIRE STRUCTURE

PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD

Method for making an electrically conducting mechanical interconnection member

Apparatus and method to fabricate an electronic device

Quantum well device

Nanoimprint resist, nanoimprint mold and nanoimprint lithography

Nanoimprint resist, nanoimprint mold and nanoimprint lithography

Method and apparatus for controlling heating and cooling of transfer unit in precision hot press apparatus

Write error verification method of writing apparatus and creation apparatus of write error verification data for writing apparatus

Flexible micro/nanofluidic devices

Reflective mask blank for EUV lithography

METHOD OF FORMING A TEMPLATE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE TEMPLATE

Photomask for extreme ultraviolet lithography and method for fabricating the same

Low resistance tunneling magnetoresistive sensor with natural oxidized double MgO barrier

Controlled vapor deposition of multilayered coatings adhered by an oxide layer

Transparent conductive film and electronic device including same

Mold, Fine Pattern Product, and Method of Manufacturing Those

Carbon film and carbon film structure

Methods and apparatuses for depositing nanometric filamentary structures

Process for the preparation of graphene

Apparatus for high-efficiency synthesis of carbon nanostructure

Device and method for making carbon nanotube film

Method for forming an imprint pattern

Method for press molding lens array

METHODS AND APPARATUS FOR FORMING LINE AND PILLAR STRUCTURES FOR THREE DIMENSIONAL MEMORY ARRAYS USING A DOUBLE SUBTRACTIVE PROCESS AND IMPRINT LITHOGRAPHY

Stable dispersions of single and multiple graphene layers in solution

Carbon nanotube assembly and process for producing the same

SUBSTRATE-FREE GAS-PHASE SYNTHESIS OF GRAPHENE SHEETS

Metal mold, process for manufacturing the same, and molded article produced using the mold

FABRICATION OF METALLIC STAMPS FOR REPLICATION TECHNOLOGY

Nanostructured Carbon Supported Catalysts, Methods Of Making, And Methods Of Use

Apparatus for producing single-wall carbon nanotubes

METHOD OF PATTERNING MOLECULES ON A SUBSTRATE USING A MICRO-CONTACT PRINTING PROCESS

FLUID CATALYTIC CRACKING CATALYST WITH LOW COKE YIELD AND METHOD FOR MAKING THE SAME

Complexes of carbon nanotubes and fullerenes with molecular-clips and use thereof

Nanowire mesh device and method of fabricating same

TRANSPARENT CONDUCTIVE FILM, TRANSPARENT ELECTRODE SUBSTRATE AND METHOD FOR PRODUCING LIQUID CRYSTAL ALIGNMENT FILM BY USING THE SAME, AND CARBON NANOTUBE AND METHOD FOR PRODUCING THE SAME

Nanowires

NANOTUBES AND RELATED MANUFACTURING PROCESSES

Imprint lithography apparatus

Method of manufacturing carbon nanotubes

Carbon nanotube synthesis process apparatus

FLUORESCENT FIBER CONTAINING SEMICONDUCTOR NANOPARTICLES

Method and system of monitoring E-beam overlay and providing advanced process control

Method for the recombinant production of magnetic nanoparticles

Complexes of carbon nanotubes and fullerenes with molecular-clips and use thereof

Method of manufacturing carbon nanotube device array

Spin valve element and method of manufacturing same

Composites Comprising Nanoparticles

Process for producing a carbon nanostructure

Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template

Carbon nanotubes production process

Method for detecting substrate position of charged particle beam photolithography apparatus and charged particle beam photolithography apparatus

Processing apparatus and method

Die Imprint By Double Side Force-Balanced Press For Step-And-Repeat Imprint Lithography

PROTECTION OF CARBON NANOTUBES

Multiferroic nanoscale thin film materials, method of its facile syntheses and magnetoelectric coupling at room temperature

Method of determining main deflection settling time for charged particle beam writing, method of writing with charged particle beam, and apparatus for writing with charged particle beam

Multi-beam deflector array means with bonded electrodes

CONDUCTING LINES, NANOPARTICLES, INKS, AND PATTERNING

Large-Diameter 3D Carbon Nano-Onion Structures

Residual layer thickness measurement and correction

Metal-mediated reversible self-assembly of carbon nanotubes

Three-dimensional pattern forming material

Devices and methods for biochip multiplexing

Formation of metal-containing nano-particles for use as catalysts for carbon nanotube synthesis

ASSEMBLY OF NANOTUBE ENCAPSULATED NANOFIBERS NANOSTRUCTURE MATERIALS

CARBON NANOTUBE ASSEMBLY

Templates for use in imprint lithography and related intermediate template structures

New Class of Tunable Gas Storage and Sensor Materials

Bulk cutting of carbon nanotubes using electron beam irradiation

Apparatus and method for synthesizing carbon nanotube

Increasing the specific strength of spun carbon nanotube fibers

Molecules suitable for binding to a metal layer for covalently immobilizing biomolecules

Optical element, roller type nanoimprinting apparatus, and process for producing die roll

Carbon Nanotube Compositions and Methods for Production Thereof

FUSED NANOSTRUCTURE MATERIAL

Apparatus and method for making carbon nanotube film

Method for precipitating mono and multiple layers of organophosphoric and organophosphonic acids and the salts thereof in addition to use thereof

CNT-INFUSED GLASS FIBER MATERIALS AND PROCESS THEREFOR

Systems and methods for nanowire growth and manufacturing

ORGANO-METALLIC HYBRID MATERIALS FOR MICRO- AND NANOFABRICATION

Method for coating nanometer particles

METHOD AND SYSTEM FOR CLOSE PROXIMITY CATALYSIS FOR CARBON NANOTUBE SYNTHESIS

PROCESS FOR THE CONTINUOUS PRODUCTION OF ALIGNED CARBON NANOTUBES

Method of Concurrently Patterning a Substrate Having a Plurality of Fields and a Plurality of Alignment Marks

Method and apparatus for manufacturing carbon nanotube

Systems, Devices, and/or Methods Regarding Specific Precursors or Tube Control Agent for the Synthesis of Carbon Nanofiber and Nanotube

Method for simply separatng carbon nanotube

Apparatus and system for manufacturing a carbon nanotube

Apparatus for manufacturing carbon nanotubes

Multiple device shaping uniform distribution of current density in electro-static focusing systems

Device for granulating plastic strands

Magnetoresistance device including layered ferromagnetic structure, and method of manufacturing the same

METHOD FOR PRODUCING NITROGEN-DOPED CARBON NANOTUBES

Functionalized matrices for dispersion of nanostructures

ENHANCEMENT OF THE STRUCTURE AND PROPERTIES OF CARBON NANOTUBE FIBRES AND FILMS

Charged particle optical system comprising an electrostatic deflector

PATTERNING METHOD, PATTERNING APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

CNT-infused fiber and method therefor

MICROCAPSULE, METHOD FOR MAKING THE SAME, AND COMPOSITE USING THE SAME

Method for producing an organometallic layer

High-throughput solution processing of large scale graphene and device applications

Method of forming self-assembly and uniform fullerene array on surface of substrate

Transparent and electrically conductive single wall carbon nanotube films

TWIN-FREE SINGLE CRYSTAL NOBLE-METAL NANO WIRE AND FABRICATION METHOD OF TWIN-FREE SINGLE CRYSTAL NOBLE-METAL NANO WIRE

Positive and negative poisson ratio material

APPARATUS AND METHOD FOR THE PRODUCTION OF CARBON NANOTUBES ON A CONTINUOUSLY MOVING SUBSTRATE

Actuator

Roller nanoimprint apparatus, mold roller for use in roller nanoimprint apparatus, fixing roller for use in roller nanoimprint apparatus, and production method of nanoimprint sheet

Carbon nanotube film, carbon nanotube film precursor, method for manufacturing the same and a light source

Micropattern transfer method and micropattern transfer device

Pattern transfer method

Imprinting method and process for producing a member in which a mold contacts a pattern forming layer

Semiconductor device and manufacturing method thereof

Drift measuring method, charged particle beam writing method, and charged particle beam writing apparatus

Particle-optical system

SUBSTRATE STAGE, SPUTTERING APPARATUS PROVIDED WITH SAME, AND FILM FORMING METHOD

Method and arrangement for realizing a vacuum in a vacuum chamber

Electron beam simulation corner correction for optical lithography

Etch-enhanced technique for lift-off patterning

Graphene oxide deoxygenation

Pattern forming method

Reflective mask blank, method of manufacturing a reflective mask blank and method of manufacturing a reflective mask

Magnetic stack structure and manufacturing method thereof

Metal Nano Catalyst, Method for Preparing the Same and Method for Controlling the Growth Types of Carbon Nanotubes Using the Same

Apparatus for fixing plastic sheet and method of fabricating nano pattern on plastic sheet using the same

IMPRINT LITHOGRAPHY APPARATUS AND METHOD

PATTERN WRITING ON A ROTATING SUBSTRATE

Gas sensing device

TEMPLATE, METHOD OF MANUFACTURING THE SAME, AND METHOD OF FORMING PATTERN

Methods of manufacturing directional conductivity nanocomposite materials

Method and device for fabricating carbon nanotube film

Dispersible carbon nanotube, carbon nanotube-polymer composite and method of manufacturing the carbon nanotube-polymer composite

Charge perturbation detection system for DNA and other molecules

Manufacture method for semiconductor device with bristled conductive nanotubes

High performance MTJ element for STT-RAM and method for making the same

Microfluidic devices and methods of preparing and using the same

FIBER SIZING COMPRISING NANOPARTICLES

APPARATUS AND METHOD FOR THE PRODUCTION OF CARBON NANOTUBES ON A CONTINUOUSLY MOVING SUBSTRATE

METHOD AND APPARATUS FOR USING A VERTICAL FURNACE TO INFUSE CARBON NANOTUBES TO FIBER

Gas-phase functionalization of carbon nanotubes

IMPRINTING APPARATUS

Apparatus for carbon nanotube synthesis

SENSORS WITH FIBER BRAGG GRATINGS AND CARBON NANOTUBES

METHOD FOR OBTAINING FORCE COMBINATIONS FOR TEMPLATE DEFORMATION USING NULLSPACE AND METHODS OPTIMIZATION TECHNIQUES

Epoxy group-containing organosiloxane compound, curable composition for transfer materials and method for forming micropattern using the composition

Roller nanoimprint apparatus, mold roller for use in roller nanoimprint apparatus, fixing roller for use in roller nanoimprint apparatus, and production method of nanoimprint sheet

Masking techniques and contact imprint reticles for dense semiconductor fabrication

High performance MTJ elements for STT-RAM and method for making the same

High performance MTJ element for STT-RAM and method for making the same

Superlattice nanopatterning of wires and complex patterns

Flare evaluation methods

Device for deflecting or guiding in a particle beam

Tip-sharpened carbon nanotubes and electron source using thereof

Polyaniline/c-MWNT nanocomposite and method for fabricating the same

Multiblock polymer dispersions of carbon nanotubes

ISOLATION OF CARBON NANOTUBES BY CHEMICAL FUNCTIONALIZATION

Monolayer and/or Few-Layer Graphene On Metal or Metal-Coated Substrates

Fabrication method of brightness enhancement film

Mask blank and method of manufacturing an imprint mold

Carbon nanotubes, supported catalyst including the same, and fuel cell using the supported catalyst

Carbon nanotube metal nanoparticle composite and method for making the same

Method for forming microscopic 3D structures

METHOD FOR THE PRODUCTION OF A CONDUCTIVE POLYCARBONATE COMPOSITES

MICROPATTERN TRANSFER STAMPER AND MICROPATTERN TRANSFER DEVICE

Carbon nano tube processing method, processing apparatus, and carbon nano tube dispersion liquid, carbon nano tube powder

Carbon nanotube particulates, compositions and use thereof

Carbon nanotubes grown on bulk materials and methods for fabrication

Production of conductive nanodiamond by dynamic synthesis approaches

Carbon nanotube or carbon nanofiber production apparatus and recovery apparatus

Imprint lithography apparatus and method

Methods of Patterning Substrates Using Microcontact Printed Polymer Resists and Articles Prepared Therefrom

Carbon nano-tube (CNT) light emitting device and method of manufacturing the same

Method for maskless particle-beam exposure

ELECTRODE AND SENSOR HAVING CARBON NANOSTRUCTURES

Template and method of manufacturing a semiconductor device

Method for producing carbon nanotube-containing conductor

Imprint lithography

Large area, homogeneous array fabrication including leveling with use of bright spots

PURIFICATION OF FULLERENE DERIVATIVES FROM VARIOUS IMPURITIES

IMMOBILIZING MOLECULES ON A SOLID SUPPORT

Reversible biogel for manipulation and separation of single-walled carbon nanotubes

Method of manufacturing semiconductor device, template, and method of creating pattern inspection data

Deflector array, exposure apparatus, and device manufacturing method

PATTERN FORMATION METHOD

Method for making alignment mark on substrate

High-volume manufacturing massive e-beam maskless lithography system

Actinic ray-sensitive or radiation-sensitive resin composition, resist film, and pattern-forming method using the same

Method of production of graphene

IMPRINTING MOLD WITH GROOVE FOR EXCESS MATERIAL

Methods and apparatus for rapid imprint lithography

Method for production of carbon nanotube

Pretreatment method for the synthesis of carbon nanotubes and carbon nanostructures from coal and carbon chars

SOLID PHASE SYNTHESIZED CARBON NANO FIBER AND TUBE

PROCESSES AND APPLICATIONS OF CARBON NANOTUBE DISPERSIONS

Methods utilizing reversibly adhesive layers for forming patterned microstructures

CURABLE COMPOSITION FOR PHOTOIMPRINT, AND METHOD FOR PRODUCING CURED PRODUCT USING SAME

Imprint pattern forming method

Methods and apparatus for rapid imprint lithography

Method and apparatus for growing nanotube forests, and generating nanotube structures therefrom

DEPOSITION METHOD AND A DEPOSITION APPARATUS OF FINE PARTICLES, A FORMING METHOD AND A FORMING APPARATUS OF CARBON NANOTUBES, AND A SEMICONDUCTOR DEVICE AND A MANUFACTURING METHOD OF THE SAME

METHOD FOR DECOMPOSING CARBON-CONTAINING COMPOUND, METHOD FOR PRODUCING CARBON NANO/MICROSTRUCTURE, AND METHOD FOR PRODUCING CARBON THIN FILM

METHODS AND APPARATUS FOR INK DELIVERY TO NANOLITHOGRAPHIC PROBE SYSTEMS

Sidewall-functionalized carbon nanotubes, and methods for making the same

DISPERSIBLE CARBON NANOSPHERES AND METHODS FOR MAKING SAME

MATERIALS CONTAINING POLYACTIC ACID AND CELLULOSE FIBERS

Single-walled carbon nanotube-ceramic composites and methods of use

Scalable light-induced metallic to semiconducting conversion of carbon nanotubes and applications to field-effect transistor devices

EXPOSURE MASK, EXPOSURE METHOD, AND METHOD OF MANUFACTURING OPTICAL ELEMENT

Process of making fibers by electric-field-driven spinning using low-conductivity fluid formulations

Method for making composite material

Composite material

Elastomeric mask and use in fabrication of devices

Surface enhanced infrared absorption sensor and method for producing the same

APPLICATIONS FOR SCANNING TUNNELLING MICROSCOPY

Method of producing carbon nanotubes

Controlled placement and orientation of nanostructures

Preparation unit for lithography machine

Lithography apparatus and lithography method

Electron source and electron beam apparatus

PHOTOMASK, SEMICONDUCTOR DEVICE, AND CHARGED BEAM WRITING APPARATUS

Reduction of graphene oxide to graphene in high boiling point solvents

ELECTRON BEAM WRITING METHOD AND APPARATUS