Charged particle beam writing method, method for detecting position of reference mark for charged particle beam writing, and charged particle beam writing apparatus

Charged particle beam drawing method and apparatus

Pattern forming method

Fluidic and Microdevice Apparatus and Methods For Bonding Components Thereof

Stage device and stage cleaning method

Substrate support structure, clamp preparation unit, and lithography system

Pad microprinting device and methods, and pad for this device

POLYMER COMPOSITES MECHANICALLY REINFORCED WITH ALKYL AND UREA FUNCTIONALIZED NANOTUBES

Catalyst and Process for Syngas Conversion

TiO2-containing quartz glass substrate

Tubular nanostructure targeted to cell membrane

Reflective photomask and method of fabricating the same

RESIN STAMPER FOR PATTERN TRANSFER AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD USING THE SAME

BIOMOLECULAR ELEMENT, MULTILAYER MOLECULAR THIN FILM OF FATTY ACID AND LIPID TO BE SUPPORT FOR BIOSENSOR MOLECULE AND METHOD FOR PRODUCING THE SAME

Patterning of ionic polymers

IMPRINT METHOD AND PROCESSING METHOD OF SUBSTRATE

NOBLE METAL SINGLE CRYSTALLINE NANOWIRE AND THE FABRICATION METHOD THEREOF

IMPRINT APPARATUS AND METHOD

APPARATUS AND METHOD OF PRODUCING VAPOR-GROWN CARBON STRUCTURE

Method of fabricating one-dimensional nanostructure of organo-optoelectronic material

RELEASE SURFACES, PARTICULARLY FOR USE IN NANOIMPRINT LITHOGRAPHY

METHOD OF PRODUCING CUP-SHAPED NANOCARBON AND CUP-SHAPED NANOCARBON

Method of coating catalyst metal layer by using nucleic acid and method of forming nanocarbon by using the method of coating the catalyst metal layer

Device and method for production of carbon nanotubes, fullerene and their derivatives

Nanoimprint Lithography Template and Method of Fabricating Semiconductor Device Using the Same

IMPRINT MOLD AND IMPRINT MOLDING METHOD

Magnetoresistive element, magnetic random access memory and method of manufacturing the same

Catalyst for preparing carbon nanotube comprising multi-component support materials containing amorphous silicon particles and the bulk scale preparation of carbon nanotube using the same

Method and system for tone inverting of residual layer tolerant imprint lithography

Ultraviolet-curing resin material for pattern transfer and magnetic recording medium manufacturing method using the same

Method and system for tone inverting of residual layer tolerant imprint lithography

Large area dissolvable template lithography

TRANSFER METHOD AND TRANSFER APPARATUS

Large area, homogeneous array fabrication including controlled tip loading vapor deposition

METHOD AND SYSTEM FOR STENCIL DESIGN FOR PARTICLE BEAM WRITING

Fluoroalkyl carbinol generating silane surface treatment agents

METHOD FOR THE PREVENTION OF NANOPARTICLE AGGLOMERATION AT HIGH TEMPERATURES

Method to fabricate a mould for lithography by nano-imprinting

Large area, homogeneous array fabrication including substrate temperature control

Method for fabricating carbon nanotube array

Metal mold for use in imprinting processes

Method to fabricate a mould for lithography by nano-imprinting

Catalyst for Carbon Nanostructure Growth, Process for Producing Carbon Nanostructure, Raw-Material Gas and Carrier Gas for Producing the Same, and Apparatus for Producing the Same

Method for direct, chirality-selective synthesis of semiconducting or metallic single-walled carbon nanotubes

Global point spreading function in multi-beam patterning

Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam

SYSTEM AND METHOD FOR SURFACE TREATMENT AND BARRIER COATING OF FIBERS FOR IN SITU CNT GROWTH

Method for functionalizating carbon naontubes utilizing peroxides

Mass production of nano-scaled platelets and products

Synthetic Carbon Nanotubes

Compositions of nanoparticles on solid surfaces

METHOD FOR MANUFACTURING NANOWIRES BY USING A STRESS-INDUCED GROWTH

Embedded magnetic random access memory (MRAM)

METAL-COATED CARBON MATERIAL AND CARBON-METAL COMPOSITE MATERIAL USING THE SAME

Methods of flash reduction and patterning of graphite oxide and its polymer composites

Large area, homogeneous array fabrication including homogeneous substrates

Low temperature CNT growth using gas-preheat method

Method for preparing single walled carbon nanotubes from a metal layer

Process for improving the oxidation resistance of carbon nanotubes

Fine-structure transfer apparatus and method

Method of forming a magnetic tunnel junction device

LOW SWITCHING FIELD LOW SHAPE SENSITIVITY MRAM CELL

Magnetic tunnel junction device and fabrication

Three-dimensional stacked-fin-MOS device with multiple gate regions

Method of depositing organic layers onto a substrate

Boron-Doped Single-Walled Nanotubes(SWCNT)

System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission

Graphene and Hexagonal Boron Nitride Planes and Associated Methods

Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal

Method to assemble nano-structure on a substrate and nano-molecule device comprising nano-structure formed thereby

Reflective photomask and method of fabricating, reflective illumination system and method of process using the same

Process for producing hydrogen gas and carbon nanotubes from catalytic decomposition of ethanol

Machine head for production of a surface relief

Magnetic memory device

Carbon nanotube arrays

Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal

MASTER PLATE AND METHOD OF MANUFACTURING THE SAME

APPARATUS AND METHODS FOR CONTINUOUSLY GROWING CARBON NANOTUBES AND GRAPHENE SHEETS

Method of producing catalytic materials for fabricating nanostructures

Charged particle beam writing method and charged particle beam writing apparatus

Method for correcting a position error of lithography apparatus

Carbon nanotube growing process, and carbon nanotube bundle formed substrate

Anchored nanostructure materials and method of fabrication

ULTRA SMOOTH NANOSTRUCTURED DIAMOND FILMS AND COMPOSITIONS AND METHODS FOR PRODUCING SAME

Method of forming a metal pattern

Graphite Layers

Method of inspecting mask pattern and mask pattern inspection apparatus

Sensor network incorporating stretchable silicon

Nanowire mesh device and method of fabricating same

Catalyst composition for the synthesis of thin multi-walled carbon nanotube and its manufacturing method

METHOD FOR PRODUCING MAGNETIC PARTICLE

Charged particle beam writing method and charged particle beam writing apparatus

METHOD OF PRODUCING INORGANIC NANOPARTICLES

Polar polydimethysiloxane molds, methods of making the molds, and methods of using the molds for pattern transfer

Graphene sheet comprising an intercalation compound and process of preparing the same

Methods for E-beam direct write lithography

METHOD FOR BACTERIAL LYSIS

Exposure mask and method for manufacturing same and method for manufacturing semiconductor device

NANO-POROUS NANO-COMPOSITE, METHOD OF PREPARING THE SAME, AND SOLID OXIDE FUEL CELL INCLUDING THE NANO-POROUS NANO-COMPOSITE

MESOPOROUS CARBON MATERIAL FOR ENERGY STORAGE

Apparatus for producing silicon nanocrystals using inductively coupled plasma

Embedded nanoparticle films and method for their formation in selective areas on a surface

Substance-encapsulating carbon nanohorn aggregate and process for producing the same

POROUS FILAMENTOUS NANOCARBON AND METHOD OF FORMING THE SAME

Nanowire synthesis from vapor and solid sources

Step and repeat imprint lithography processes

Magnetoresistive element including upper electrode having hexagonal cross-section shape and method of manufacturing the same

Spin transistor and method of manufacturing the same

Apparatus and method for charged-particle beam writing

Methods for attaching carbon nanotubes to a carbon substrate

Low thermal distortion silicone composite molds

Radiation Protection Using Single Wall Carbon Nanotube Derivatives

Mixed-scale electronic interfaces

Method for producing metal-supported carbon, method for producing crystals consisting of fullerene molecules and fullerene nanowhisker/nanofiber nanotubes, and apparatus for producing the same

ELECTRODE FOR ELECTROCHEMICAL ENERGY STORAGE DEVICE

Fine particles and method for producing the same

Controlled-orientation films and nanocomposites including nanotubes or other nanostructures

METHOD FOR PATTERNING NANO-SCALE PATTERNS OF MOLECULES ON A SURFACE OF A MATERIAL

PRODUCTION OF A SURFACE RELIEF ON A SUBSTRATE

Apparatus and method for producing aligned carbon-nanotube aggregates

Drug delivery and substance transfer facilitated by nano-enhanced device having aligned carbon nanotubes protruding from device surface

Aligned carbon nanotube bulk aggregate, process for producing the same and uses thereof

Method for manufacturing carbon nanotubes

Method for manufacturing carbon nanotubes

METHODS FOR MITIGATING AGGLOMERATION OF CARBON NANOSPHERES USING A CRYSTALLIZING DISPERSANT

Imprint lithography method and apparatus

METHOD OF MAKING A SECONDARY IMPRINT ON AN IMPRINTED POLYMER

Maskless process for suspending and thinning nanowires

PROCESS OF PREPARING CARBON NANOTUBE FILM, THE CARBON NANOTUBE FILM PREPARED THEREBY AND CARBON NANOTUBE ELEMENTS COMPRISING THE SAME

Field emission type electron gun comprising single fibrous carbon electron emitter and operating method for the same

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

Method for sorting nanoobjects and an apparatus fabricated thereby

Method for making carbon nanotube-base device

CNT-INFUSED GLASS FIBER MATERIALS AND PROCESS THEREFOR

Methods for making field emission electron source having carbon nanotube

Methods of forming fine patterns using a nanoimprint lithography

Rolling contact layer-by-layer assembly

CONTINUOUS PROCESS FOR PREPARING AND COLLECTING NANOTUBE FILMS THAT ARE SUPPORTED BY A SUBSTRATE

Imprint mold

System and method for depositing thin layers on non-planar substrates by stamping

Micropattern transfer device

High efficient carbon nanotube separation method

GRANULATED PRODUCT OF CARBON NANOTUBE, AND METHOD FOR PRODUCTION THEREOF

PATTERN GENERATION METHOD, RECORDING MEDIUM, AND PATTERN FORMATION METHOD

Single-walled carbon nanotube dispersion liquid and method for producing single-walled carbon nanotube dispersion liquid

Mechanically robust, electrically conductive ultralow-density carbon nanotube-based aerogels

Continuous methods for treating liquids and manufacturing certain constituents (e.g., nanoparticles) in liquids, apparatuses and nanoparticles and nanoparticle/liquid solution(s) therefrom

FOREIGN MATTER REMOVING METHOD FOR LITHOGRAPHIC PLATE AND METHOD FOR MANUFACTURING LITHOGRAPHIC PLATE

Superhydrophobic nano-fabrics and coatings

Microbial-mediated method for metal oxide nanoparticle formation

Method for design and manufacture of a reticle using a two-dimensional dosage map and charged particle beam lithography

SYSTEM AND METHOD FOR AMMONIA SYNTHESIS

Method for preparing functional nanomaterials utilizing endothermic reaction

Localized synthesis and self-assembly of nanostructures

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

Forming a layer on a substrate

Transition metal/carbon nanotube composite and method of preparing the same

High charge density structures, including carbon-based nanostructures and applications thereof

CNT-infused carbon fiber materials and process therefor

Method for reducing tip-to-tip spacing between lines

Lithography method of electron beam

Charged particle beam writing apparatus and device production method

Extreme ultraviolet photolithography mask, with absorbent cavities

Process for producing carbon nanostructure on a flexible substrate, and energy storage devices comprising flexible carbon nanostructure electrodes

High efficiency energy conversion and storage systems using carbon nanostructured materials

TUNNEL MAGNETORESISTIVE THIN FILM AND MAGNETIC MULTILAYER FILM FORMATION APPARATUS

Method for chemical modification of a graphene edge, graphene with a chemically modified edge and devices including the graphene

EQUIPMENT AND METHOD FOR OBTAINING PROFILE SECTIONS MADE FROM COMPOSITE MATERIAL AND PROFILE SECTION OBTAINED BY MEANS OF SAID METHOD

Process for remediation of plastic waste

Memory cell having nonmagnetic filament contact and methods of operating and fabricating the same

Platinum-based electrocatalysts synthesized by depositing contiguous adlayers on carbon nanostructures

MIXTURES COMPRISING GRAPHITE AND GRAPHENE MATERIALS AND PRODUCTS AND USES THEREOF

REDOX FRACTIONATION OF SINGLE-WALLED CARBON NANOTUBES

Welding of carbon single-walled nanotubes by microwave treatment

Thermoelectric nanowire and method of manufacturing the same

Three-dimensional imaging and manipulation

Printing method and display apparatus manufacturing method

Functionalization of carbon nanotubes with metallic moieties

Method and apparatus for writing

Nanocomposite material apparatus, nanocomposite material and method for fabricating thereof, nano material apparatus and nano material

BEAM-LIKE MATERIAL COMPRISING CARBON NANOTUBE AND MANUFACTURING METHOD THEREOF

Method for producing patterned materials

METHOD AND APPARATUS FOR CARBON FIBER FIXED ON A SUBSTRATE

Conforming template for patterning liquids disposed on substrates

Device for holding a template for use in imprint lithography

Imprint apparatus having attitude control

PREPARATION OF CARBON NANOTUBES WITH LANTHANOID CATALYSTS

Method of preparing carbon nanotube complexes

Method and apparatus for preparing a collection area for use in producing carbon nanostructures

DRAWING METHOD, DRAWING DEVICE, AND INFORMATION RECORDING MEDIUM

THERMAL INTERFACE MATERIAL AND METHOD FOR MANUFACTURING THE SAME

Carbon nanotubes, substrate and electron emission device with such carbon nanotubes and carbon nanotube synthesizing substrate as well as methods of and apparatus for making them

Controlled growth of a nanostructure on a substrate, and electron emission devices based on the same

METHOD FOR CONTROLLING OPTIC INTERBAND TRANSITION OF CARBON NANOTUBES, THE CARBON NANOTUBES RESULTING THEREFROM AND DEVICES THAT COMPRISE THE CARBON NANOTUBES

Lithography system and projection method

COMPOSITE MATERIAL AND METHOD OF MANUFACTURING THE SAME

Cleaning Member, Carrying Member with Cleaning Function, and Method of Cleaning Substrate Processing Equipment

Complexes of carbon nanotubes and fullerenes with molecular-clips and use thereof

Method of forming fine pattern using block copolymer

Reflective-type mask blank for EUV lithography

Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomask

Photomask for Extreme Ultraviolet Lithography and Method for Fabricating the Same

Catalyst composition for preparing carbon nanotube

Etching resist

Method of manufacturing core-shell nanostructure

Type separation of single-walled carbon nanotubes via two-phase liquid extraction

Methods for selectively separating carbon nanotubes

IMPRINTING MOLD AND PATTERN FORMATION METHOD

Fabrication method of electronic devices based on aligned high aspect ratio nanoparticle networks

Nitride nanowires and method of producing such

Mold core and method for fabricating mold core

Patterning Processes Comprising Amplified Patterns

Methods and processes for modifying polymer material surface interactions

Carbon Nanotubes with Nano-Sized Particles Adhered thereto and Method of Preparing Same

METHOD OF MANUFACTURING STRUCTURE AND METHOD OF MANUFACTURING INK JET HEAD

REMOVAL OF BULGE EFFECTS IN NANOPATTERNING

Aligned carbon nanotube bulk structure having portions different in density

Negative pattern of carbon nanotubes and carbon nanotube composite comprising surface-modified carbon nanotubes

High-molecular thin film, pattern medium and manufacturing method thereof

Method for making a conductive film of carbon nanotubes

Method for preparing anisotropic particles and devices thereof

Supported catalyst with solid sphere structure, method for preparing the same and carbon nanotubes prepared using the same

STAMPER FOR TRANSFERRING FINE PATTERN AND METHOD FOR MANUFACTURING THEREOF

Process and method for modifying polymer film surface interaction

Method and apparatus for manufacturing magnetoresistive devices

SEPARATION METHODS FOR IMPRINT LITHOGRAPHY

METHOD FOR GROWING A CARBON NANOTUBE ON A NANOMETRIC TIP

METHOD AND APPARATUS FOR HIGH DENSITY STORAGE OF ANALOG DATA IN A DURABLE MEDIUM

Fabrication of light emitting film coated fullerenes and their application for in-vivo light emission

Method and apparatus for the continuous production of carbon nanotubes

SPECTRAL PURITY FILTER FOR MULTI-LAYER MIRROR, LITHOGRAPHIC APPARATUS INCLUDING SUCH MULTI-LAYER MIRROR, METHOD FOR ENLARGING THE RATIO OF DESIRED RADIATION AND UNDESIRED RADIATION, AND DEVICE MANUFACTURING METHOD

Imprint Mold, Imprint Apparatus and Method of Forming Pattern

Imprinting machine and device manufacturing method

Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns

Method for fabrication of aligned nanowire structures in semiconductor materials for electronic, optoelectronic, photonic and plasmonic devices

HIGH FIDELITY NANO-STRUCTURES AND ARRAYS FOR PHOTOVOLTAICS AND METHODS OF MAKING THE SAME

Selective placement of carbon nanotubes through functionalization

Graphene and graphene oxide aerogels

Methods for forming nanodots and/or a patterned material during the formation of a semiconductor device

Method for transferring a nanolayer

High heat conduction composite material

Patterned fine particle film structures

METHODS OF PREPARING AND PURIFYING CARBON NANOTUBES, CARBON NANOTUBES, AND AN ELEMENT USING THE SAME

Sample support structure and methods

Capillary imprinting technique

GRAPHITE NANOPLATELETS FOR THERMAL AND ELECTRICAL APPLICATIONS

Method and system for providing magnetic elements having enhanced magnetic anisotropy and memories using such magnetic elements

CATALYST SUPPORT SUBSTRATE, METHOD FOR GROWING CARBON NANOTUBES USING THE SAME, AND TRANSISTOR USING CARBON NANOTUBES

Nano-carbon hybrid structures

Carbon nanotube N-doping material, carbon nanotube N-doping method and device using the same

Multicomponent nanoparticle materials and process and apparatus therefor

Nano-imprint lithography methods

Electrostatic force assisted deposition of graphene

Positive tone bi-layer method

APPARATUS FOR MANUFACTURING CARBON NANO TUBES AND METHOD OF SORTING CARBON NANO TUBES

Instantaneous electrodeposition of metal nanostructures on carbon nanotubes

SELF-ASSEMBLED NANOPARTICLES-NANOTUBE STRUCTURES BASED ON ANTENNA CHEMISTRY OF CONDUCTIVE NANORODS

Imprint lithography

Controlled vapor deposition of biocompatible coatings for medical devices

End-to-end joining of nanotubes

Method for Functionalizing Nanotubes and Improved Polymer-Nanotube Composites Formed Using Same

Compositions of carbon nanotubes

Reflective mask blank and method of producing the same, and method of producing a reflective mask

Methods of forming carbon nanotubes

Stamper and method for making soft mold

Carbon nanorings manufactured from templating nanoparticles

Spin-valve or tunnel-junction radio-frequency oscillator

Light emitting polymer devices using self-assembled monolayer structures

CURABLE COMPOSITION FOR PHOTOIMPRINT, AND METHOD FOR PRODUCING CURED PRODUCT USING SAME

METHOD OF FORMING RELIEF STRUCTURES

Light emitting diode

Nanoparticle/nanotube-based nanoelectronic devices and chemically-directed assembly thereof

CARBON NANOTUBE SOLUBILIZER

DISPERSANT CONTAINING METAL COMPLEX FOR CARBON NANOTUBE

Quantum dot optical devices with enhanced gain and sensitivity and methods of making same

METHOD FOR ELECTROCHEMICAL DEPOSITION OF MONOLAYERS ON METALLIC SURFACES AND OBJECTS COATED WITH AN ORGANIC MONOLAYER

Synthesis of pure nanotubes from nanotubes

3D Carbon Nanotubes Membrane as a Solar Energy Absorbing Layer

Active ingredient combinations having insecticide and acaricide properties

PRODUCTION OF STAMPS, MASKS OR TEMPLATES FOR SEMICONDUCTOR DEVICE MANUFACTURING

Material for growth of carbon nanotubes

Method of coating tubes using a self-assembly process

Method and system for double-sided patterning of substrates

Apparatus for synthesizing carbon nanotubes

Apparatus for synthesizing carbon nanotubes

Magnetic Data Storage

Manufacturing apparatus and manufacturing method for solid particle

Blends of fullerene derivatives, and uses thereof in electronic devices

Electrical circuit device having carbon nanotube fabrication from crystallography oriented catalyst

Method for maskless particle-beam exposure

Method of making graphene sheets and applicatios thereor

Constant current multi-beam patterning

MICROCONTACT PRINTING STAMP

METHOD FOR FABRICATING CARBON NANOTUBE, WAFER FOR GROWING CARBON NANOTUBE, AND CARBON NANOTUBE DEVICE

Method for making nanowire structure

Fabrication process for magnetoresistive devices of the CPP type

PATTERN FORMATION METHOD AND COMPUTER PROGRAM PRODUCT

Membrane separation of feed and growth environments in carbon nanostructure growth

Method of manufacturing carbon cylindrical structures and biopolymer detection device

Method of and apparatus for synthesizing highly oriented, aligned carbon nanotubes from an organic liquid