SAM oxidative removal for controlled nanofabrication

Method and apparatus for detecting non-uniform fracturing of a photomask shape

Pattern writing system and parameters monitoring method for pattern writing apparatus

Method for preparing multilayer of nanocrystals, and organic-inorganic hybrid electroluminescence device comprising multilayer of nanocrystals prepared by the method

Adjustable solubility in sacrificial layers for microfabrication

Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal

Metal nanowires with an oxide sheath and production method for same

Method for fabricating self-aligned nanostructure using self-assembly block copolymers, and structures fabricated therefrom

Reflective mask blank, reflective mask, method of inspecting reflective mask, and method for manufacturing the same

Extreme ultraviolet mask and method for fabricating the same

Deposition and selective removal of conducting helplayer for nanostructure processing

Crystalline ion-conducting nanomaterial and method for the production thereof

Controlled deposition and alignment of carbon nanotubes

Method and apparatus for producing aligned carbon nanotube aggregate

Method of Manufacturing Stamper, and Stamper

METHOD OF SEPARATING METALLIC AND SEMICONDUCTING CARBON NANOTUBES FROM A MIXTURE OF SAME

Magnetoresistive tunnel junction magnetic device and its application to MRAM

COMPONENT MOUNTING IN MOVEMENT-SENSITIVE EQUIPMENT

FULLERENE OR NANOTUBE, AND METHOD FOR PRODUCING FULLERENE OR NANOTUBE

Ferromagnetic semiconductor, method for the production thereof, components incorporating the same, and corresponding uses of said semiconductor

IMPRINT METHOD AND MOLD

Methods for formation of substrate elements

Fiber aggregate and fabricating method of the same

Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium

Method of suppressing beam position drift, method of suppressing beam dimension drift, and charged particle beam lithography system

Method for fabricating EUVL mask

CARBON NANOTUBES FUNCTIONALIZED WITH FULLERENES

CVD-GROWN GRAPHITE NANORIBBONS

Method of removing carbonaceous impurities in carbon nanotubes

Magnetic artificial superlattice and method for producing the same

Tunnel barrier sensor with multilayer structure

Imprint method and template for imprinting

Method for making carbon nanotubes with embedded nanoparticles

Method of producing a diffraction grating element

Method of forming a magnetic tunnel junction device

Dispersion and Method for the Production Thereof

Apparatus and method for processing a wafer

Asymmetrically-functionalized nanoparticles organized on one-dimensional chains

N-TYPE SEMICONDUCTOR CARBON NANOMATERIAL, METHOD FOR PRODUCING N-TYPE SEMICONDUCTOR CARBON NANOMATERIAL, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Reflection-type mask and method of making the reflection-type mask

TAGGANTS AND METHODS AND SYSTEMS FOR FABRICATING SAME

Nanocarbon-activated carbon composite

METHOD OF CUTTING CARBON NANOTUBES AND CARBON NANOTUBES PREPARED BY THE SAME

PREPARATION AND FUNCTIONALIZATION OF CARBON NANO-ONIONS

INTEGRATED PROCESSES FOR GENERATING CARBON MONOXIDE FOR CARBON NANOMATERIAL PRODUCTION

Dielectrophoretic tweezers apparatus and methods

SUBSTRATE CONVEYOR APPARATUS, SUBSTRATE CONVEYANCE METHOD AND EXPOSURE APPARATUS

Stage apparatus and exposure apparatus

Beam positioning for beam processing

Methods of patterning a conductor on a substrate

Apparatus and method for inspecting overlapping figure, and charged particle beam writing apparatus

Short, functionalized, soluble carbon nanotubes, methods of making same, and polymer composites made therefrom

Carbon nanotube arrays

Composition including material, methods of depositing material, articles including same and systems for depositing material

CARBON NANOTUBE FREESTANDING MEMBRANE, PROCESS FOR PRODUCTION OF THE SAME, COMPOSITES HAVING CARBON NANOTUBE MEMBRANES AND PROCESS FOR PRODUCTION THEREOF

Method of applying a pattern of metal, metal oxide and/or semiconductor material on a substrate

Aligned Carbon Nanotube Bulk Structure Having Portions Different in Density, Process for Producing The Same and Uses thereof

APPARATUS FOR AND METHOD OF FORMING CARBON NANOTUBE

Method and apparatus for the continuous production and functionalization of single-walled carbon nanotubes using a high frequency plasma torch

Real time imprint process diagnostics for defects

Imprint Lithography Templates Having Alignment Marks

Formation of Conductive Templates Employing Indium Tin Oxide

Method of selectively eliminating metallic carbon nanotubes, semiconducting carbon nanotubes and preparation method thereof using the same

Metallic nanostructures adapted for electromagnetic field enhancement

Imprint lithography

High-Z structure and method for co-alignment of mixed optical and electron beam lithographic fabrication levels

Charged particle beam exposure system

Projection lens arrangement

CRITICAL DIMENSION CONTROL DURING TEMPLATE FORMATION

METHODS FOR PREPARING CNT FILM, CNT FILM WITH A SANDWICH STRUCTURE, AN ANODE INCLUDING THE CNT FILM AND AN ORGANIC LIGHT-EMITTING DIODES INCLUDING THE ANODE AND CNT DEVICE

Stamp for patterning, method for manufacturing such stamp and method for manufacturing an object using the stamp

Methods and articles including nanomaterial

High-reliability optical fiber having a nanocomposite coating

CARBON-NANOTUBE ARRAYS, YARNS, FILMS AND COMPOSITES, AND THE METHODS FOR PREPARING THE SAME

Substance-containing carbon nanohorn composite having polyamine plug and process for producing the same

Novel catalyst to manufacture carbon nanotubes and hydrogen gas

Processes for the recovery of catalytic metal and carbon nanotubes

INTEGRATED PROCESSES FOR GENERATING CARBON MONOXIDE FOR CARBON NANOMATERIAL PRODUCTION

Recording apparatus, recording control signal generating apparatus, method of manufacturing imprint mold, imprint mold, and magnetic disc

Photosensitive composition, microfabrication method using the same, and microfabricated structure thereof

Method for manufacturing semiconductor device or photomask

CHARGED-BEAM EXPOSURE APPARATUS HAVING AN IMPROVED ALIGNMENT PRECISION AND EXPOSURE METHOD

Variable-ratio double-deflection beam blanker

FOCUSSING MASK

Master disk exposing apparatus and the adjusting method therefor

PROCESS FOR DISPERSING FUNCTIONAL MOLECULES ON THE SURFACE OF A SUPPORT AND SUPPORT MADE BY THIS PROCESS

METHODS FOR THE SYNTHESIS OF MODULAR POLY(PHENYLENEETHYNYLENES) AND FINE TUNING THE ELECTRONIC PROPERTIES THEREOF FOR THE FUNCTIONALIZATION OF NANOMATERIALS

Semiconductor device, and semiconductor device obtained by such a method

Method of nanopatterning, a cured resist film use therein, and an article including the resist film

Method for manufacturing a nanostructure in-situ, and in-situ manufactured nanostructure devices

Treatment of items

Functional nanoparticle filled carbon nanotubes and methods of their production

METHOD FOR TREATING CARBON NANOTUBES, CARBON NANOTUBES AND CARBON NANOTUBE DEVICE

Utilities supply member connection apparatus, stage apparatus, projection optical system support apparatus and exposure apparatus

MTJ sensor based method to measure an electric current

Methods for Growing Carbon Nanotubes on Single Crystal Substrates

Extrusion reduction in imprint lithography

Full-wafer or large area imprinting with multiple separated sub-fields for high throughput lithography

METHOD OF FABRICATING GRAPHENE STRUCTURES ON SUBSTRATES

Hollow carbon nanosphere based secondary cell electrodes

Particle-beam exposure apparatus with overall-modulation of a patterned beam

Charged particle beam writing apparatus, and apparatus and method for correcting dimension error of pattern

Method for focusing electron beam in electron column

Template Pillar Formation

Substituted Fullerene Formulations and Their Use in Ameliorating Oxidative Stress Diseases or Inhibiting Cell Death

Fullerene-based amino acids

Method for depositing a nanometric thin film on a substrate

Controlling template surface composition in nano-imprint lithography

Carbon nanotube film structure and method for making the same

Carbon nanotube composite structure and method of manufacturing the same

Carbon Nanohorn Carried Material And Process For Producing Carbon Nanotube

Method for making carbon nanotube composite structure

Density multiplication and improved lithography by directed block copolymer assembly

Patterned MR device with controlled shape anisotropy

Method of micro/nano imprinting

TMR device with Hf based seed layer

Field-effect microelectronic device, capable of forming one or several transistor channels

Nanosized nickel-doped carbon nanotubes for hydrogen storage and production method thereof

Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium

Writing apparatus, writing data conversion method, and computer-readable recording medium storing program using Huffman tree for converting writing data in lithographic process

Amorphous nitride release layers for imprint lithography, and method of use

CONTACT METALLIZATION OF CARBON NANOTUBES

Method of in situ bioproduction and composition of bacterial cellulose nanocomposites

METHOD OF FORMING FINE PATTERN USING BLOCK COPOLYMER

Reflection photolithography mask, and process for fabricating this mask

Combustion-Assisted Substrate Deposition Method For Producing Carbon Nanosubstances

POROUS FILAMENTOUS NANOCARBON AND METHOD OF FORMING THE SAME

Burners and combustion apparatus for carbon nanomaterial production

Method of forming resist pattern by nanoimprint lithography

Manufacturing method of structure by imprint

Electron beam writing method, fine pattern writing system, and manufacturing method of uneven pattern carrying substrate

Method of calibrating beam position in charged-particle beam system

Data generation method for semiconductor device, and electron beam exposure system

Single-Walled Carbon Nanotubes, Carbon Fiber Aggregate Containing the Single-Walled Carbon Nanotubes, and Method for Producing Those

METHOD OF GROWING CARBON NANOMATERIALS ON VARIOUS SUBSTRATES

FILM-FORMING COMPOSITION FOR IMPRINTING, METHOD OF MANUFACTURING STRUCTURE, AND STRUCTURE

Beverage Packaging Coating Matrix

Method of fabricating metal oxide film on carbon nanotube and method of fabricating carbon nanotube transistor using the same

MTJ sensor including domain stable free layer

ELECTRON BEAM WRITING METHOD, FINE PATTERN WRITING SYSTEM, AND MANUFACTURING METHOD OF UNEVEN PATTERN CARRYING SUBSTRATE

Method of applying a material on a substrate

Method of controlling orientation of domains in block copolymer films

PROCESS FOR PREPARING CATALYST FOR SYNTHESIS OF CARBON NANOTUBES USING SPRAY PYROLYSIS

Methods of depositing nanomaterial and methods of making a device

LITHOGRAPHY OF NANOPARTICLE BASED INKS

Method of controlling orientation of domains in block copolymer films

Ion sources, systems and methods

Soft mold and fabrication method thereof

Method of forming polymer features by directed self-assembly of block copolymers

Soluble carbon nanotubes

Soluble fullerene derivatives

Organic photovoltaic devices comprising fullerenes and derivatives thereof and improved methods of making fullerene derivatives

Ink composition and method of forming a pattern using the same

PULVERULENT COMPOSITION BASED ON CARBON NANOTUBES, METHODS OF OBTAINING THEM AND ITS USES, ESPECIALLY IN POLYMERIC MATERIALS

Catalyst support using cellulose fibers, preparation method thereof, supported catalyst comprising nano-metal catalyst supported on carbon nanotubes directly grown on surface of the catalyst support, and method of preparing the supported catalyst

Method for attachment of silicon-containing compounds to a surface and for synthesis of hypervalent silicon-compounds

Exposure data preparation method and exposure method

VAPOR-GROWN CARBON FIBER AND PRODUCTION PROCESS THEREOF

Process for Producing 3-Dimensional Mold, Process for Producing Microfabrication Product, Process for Producing Micropattern Molding, 3-Dimensional Mold, Microfabrication Product, Micropattern Molding and Optical Device

Spheroidal aggregates comprising single-wall carbon nanotubes and method for making the same

Surfaces resistant to non-specific protein adsorption and methods of producing the same

Recording system, recording apparatus, and record control signal generating apparatus using an exposure beam

Imprint lithography

Method for manufacturing mold used in impression process

Methods of Making, Positioning and Orienting Nanostructures, Nanostructure Arrays and Nanostructure Devices

Separation of carbon nanotubes in density gradients

Fluorescent photopolymerizable resins and uses thereof

PREPARATION OF ION DISSOCIATION FUNCTIONAL MOLECULE AND PREPARATION OF RAW MATERIAL MOLECULE THEREOF

Hybrid materials and related methods and devices

Methods of producing carbon nanotubes using peptide or nucleic acid micropatterning

Method of manufacturing a semiconductor device

Mask and method of fabricating the same

Reflective photomasks and methods of determining layer thicknesses of the same

High-resolution, patterned-media master mask

Biocompatible coatings for medical devices

Amorphous oxide release layers for imprint lithography, and method of use

Enhanced multi channel alignment

Production of ultra-thin nano-scaled graphene platelets from meso-carbon micro-beads

Methods of producing carbon nanotubes using peptide or nucleic acid micropatterning

Fluidizing bed apparatus for producing carbon nanotubes and carbon nanotube production facility and method using the same

Method for producing carbon nanocoils

DUAL-LAYER FREE LAYER IN A TUNNELING MAGNETORESISTANCE (TMR) ELEMENT HAVING DIFFERENT MAGNETIC THICKNESSES

Lithography apparatus and lithography method

Exposing method using variable shaped beam, and pattern forming method using the same

Template pattern density doubling

Imprint apparatus and method for fine structure lithography

Methods and apparatus for forming memory lines and vias in three dimensional memory arrays using dual damascene process and imprint lithography

MEMORY CELL WITH PLANARIZED CARBON NANOTUBE LAYER AND METHODS OF FORMING THE SAME

Liquid mixture, structure, and method of forming structure

Thin film production

Sensing of biological molecules using carbon nanotubes as optical labels

ELECTRON BEAM DRAWING METHOD

E-beam exposure apparatus

METHOD OF PROCESSING SUBSTRATE BY IMPRINTING

Use of microfluidic systems in the electrochemical detection of target analytes

METHOD FOR MANUFACTURING TUNNELING MAGNETORESISTIVE FILM

Methods of fabricating exchange-coupling film, magnetoresistive element, and thin-film magnetic head

Photocurable perfluoropolyethers for use as novel materials in microfluidic devices

Method of forming a high performance tunneling magnetoresistive (TMR) element

Method for transferring a predetermined pattern reducing proximity effects

Semiconductor device, method for manufacturing semiconductor device, and computer readable medium

Magnetoresistive effect element and manufacturing method thereof

ENCAPSULATION OF CARBON MATERIAL WITHIN ALUMINUM

Method for producing film of vanadium pentoxide nanowires having improved alignment and vanadium pentoxide nanowire film produced thereby

TMR device with surfactant layer on top of CoFeB/CoFeinner pinned layer

Diamond electron radiation cathode, electron source, electron microscope, and electron beam exposer

Centrifugal solution spun nanofiber process

POLYMER SOLUTION FOR NANOIMPRINT LITHOGRAPHY TO REDUCE IMPRINT TEMPERATURE AND PRESSURE

Stamp Comprising a Nanostamping Structure, Device and Method for the Production Thereof

METHOD FOR MANUFACTURING STORAGE MEDIUM AND APPARATUS FOR MANUFACTURING INFORMATION STORAGE MASTER DISC

Ultra-thin polymeric adhesion layer

Nano-scaled graphene platelets with a high length-to-width aspect ratio

SCAFFOLD-ORGANIZED METAL, ALLOY, SEMICONDUCTOR AND/OR MAGNETIC CLUSTERS AND ELECTRONIC DEVICES MADE USING SUCH CLUSTERS

SINGLE CRYSTALLINE GRAPHENE SHEET AND PROCESS OF PREPARING THE SAME

FILM-FORMING COMPOSITION, METHOD FOR PATTERN FORMATION, AND THREE-DIMENSIONAL MOLD

Method of Forming Nanopattern and Substrate Having Pattern Formed Using the Method

Method of preparing graphene shell and graphene shell prepared using the method

Method and apparatus for producing carbon nanostructures

Mold, imprint method, and process for producing a chip

SEMICONDUCTOR DEVICE AND PROCESS FOR PRODUCING SAME

BEAM MODULATING APPARATUS FOR MOLD FABRICATION BY ULTRA-FAST LASER TECHNIQUE

Process for producing a chip using a mold

System for uniform structuring of substrates

Reflective-type mask

Micelle-controlled nanoparticle synthesis for SERS

Controlling Thickness of Residual Layer

Method for forming a catalyst pattern using nano imprint lithography

METHODS OF GENERATING ENERGETIC PARTICLES USING NANOTUBES AND ARTICLES THEREOF

MAGNETORESISTIVE ELEMENT, MAGNETIC SENSOR, AND METHOD OF PRODUCING THE MAGNETORESISTIVE ELEMENT

EXPOSURE MIRROR AND EXPOSURE APPARATUS HAVING SAME

Spatial Phase Feature Location

Imprint lithography

Magnetoresistive device

Reduced graphene oxide doped with dopant, thin layer and transparent electrode

Pattern lock system for particle-beam exposure apparatus

Writing apparatus and writing data conversion method

ENERGY TRANSFER THROUGH SURFACE PLASMON RESONANCE EXCITATION ON MULTISEGMENTED NANOWIRES

Exposure data generator and method thereof

Method of manufacturing image forming element, image forming element, and image forming apparatus having the same

Modified carbon nanotubes and methods of forming carbon nanotubes

Thin film device with minimized spatial variation of local mean height

Mono-layer and multi-layer nanowire networks

Method for treating nanofiber material and composition of nanofiber material

Method for treating carbon nanotubes, carbon nanotubes and carbon nanotube devices

Magnetoresistance effect element, magnetic head, magnetic reproducing apparatus, and magnetic memory

OPTICAL ELEMENT AND OPTICAL APPARATUS

Porous template and imprinting stack for nano-imprint lithography

High throughput imprint based on contact line motion tracking control

PROCESS FOR OBTAINING A THIN, INSULATING, SOFT MAGNETIC FILM OF HIGH MAGNETIZATION, CORRESPONDING FILM AND CORRESPONDING INTEGRATED CIRCUIT

Catalyst for producing carbon nanotubes by means of the decomposition of gaseous carbon compounds on a heterogeneous catalyst

Method of making an applicator liquid for electronics fabrication process

Method and system for fabricating a data storage medium

Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium

Charged particle beam exposure system and beam manipulating arrangement

Method of fabricating an apparatus of fabricating an flat panel display device and method for fabricating flat panel display device

MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF MAGNETORESISTANCE ELEMENTS

Preparation of arrays of long carbon nanotubes using catalyst structure

Methods and systems for forming flexible multilayer structures

Imprint lithography method

Method for enhanced synthesis of carbon nanostructures

Method of manufacturing carbon nanotube

CARBON NANOTUBE, METHOD FOR POSITIONING THE SAME, FIELD-EFFECT TRANSISTOR MADE USING THE CARBON NANOTUBE, METHOD FOR MAKING THE FIELD-EFFECT TRANSISTOR, AND SEMICONDUCTOR DEVICE

Method for synthesis of carbon nanotubes

Aqueous solution dispersement of carbon nanotubes

Tracking control method and electron beam writing system

Independently-addressable, self-correcting inking for cantilever arrays

CONTROLLED AND SELECTIVE FORMATION OF CATALYST NANAOPARTICLES

BINDING PROTEIN MOLECULE

Customizable and renewable nanostructured interface for bioelectronic applications

Roll-to-roll patterning of transparent and metallic layers

Method of creating a template employing a lift-off process

Sputtering target used for production of reflective mask blank for EUV lithography

Adjustable mask blank structure for an EUV phase-shift mask

Carbon nanotube device fabrication

Electrospray painted article containing thermally exfoliated graphite oxide and method for their manufacture

Electron beam irradiation device

Nano particle generator

Condensation polymers having covalently bound carbon nanotubes

Carbon nanotube powder, carbon nanotubes, and processes for their production

Method of fabrication of cold cathodes on thin diamondlike carbon films irradiated with multicharged ions and field emissive corresponding surfaces

METHOD FOR FORMING AN OPENING OF NANO-METER SCALE

METHOD OF AND SYSTEM FOR ELECTON BEAM LITHOGRAPHY OF MICRO-PATTERN AND DISC SUBSTRATE HAVING MICRO-PATTERN TO BE TRANSFERRED

Supercapacitor and battery electrode containing thermally exfoliated graphite oxide

Separation medium containing thermally exfoliated graphite oxide

Method for modifying carbon nanotube

Nanoimprint resin stamper

DRUG DELIVERY FROM IMPLANTS USING SELF-ASSEMBLED MONOLAYERS-THERAPEUTIC SAMS

Imaging device components comprised of hydrophobic carbon nanotubes

Method for producing carbon nanotube assembly, carbon nanotube assembly, catalyst particle dispersed film, electron emitting element, and field emission display

Method of manufacturing tubular carbon molecule and tubular carbon molecule, method of manufacturing recording apparatus and recording apparatus, method of manufacturing field electron emission device and field electron emission device, and method of manufacturing display unit and display unit

Fibrillar Microstructure and Processes for the Production Thereof

Carbon nanotube structures for enhancement of thermal dissipation from semiconductor modules

Method for producing a thin film transistor

METHODS AND STRUCTURES FOR EXCHANGE-COUPLED MAGNETIC MULTI-LAYER STRUCTURE WITH IMPROVED OPERATING TEMPERATURE BEHAVIOR

Carbon nanotubes, method of growing the same, hybrid structure and method of growing the hybrid structure, and light emitting device

FORMATION OF SELF-ASSEMBLED MONOLAYERS ON SILICON SUBSTRATES

CARBON NANOTUBE FOAM AND METHOD OF MAKING AND USING THEREOF

Method and device for manufacturing structure having pattern, and method for manufacturing mold

Sputter targets with expansion grooves for reduced separation

Methods of manufacturing mask blank and transfer mask