Selective placement of carbon nanotubes on oxide surfaces

Method for manufacturing carbon nano-tube

Injector apparatus and methods for production of nanostructures

Nano-electronic memory array

Drop pattern generation for imprint lithography

METHODS FOR MAKING CONTINUOUS NANOCHANNELS

Dynamic pattern generator with cup-shaped structure

METHOD OF MAKING HIERARCHICAL ARTICLES

Reversible biogel for manipulation and separation of single-walled carbon nanotubes

EUVL mask, method of fabricating the EUVL mask, and wafer exposure method using the EUVL mask

Atomically sharp iridium tip

Graphene sheet and method of preparing the same

Apparatus, system, and method for guided growth of patterned media using monodisperse nanospheres

Imprint lithography

Alignment method, imprint method, alignment apparatus, and position measurement method

Controlled growth of a nanostructure on a substrate

Fullerene-based material and process for producing fullerene-based material

Nanoscale electric lithography

Pellicle and method for manufacturing the same

Magneto-resistance effect element

Method for manufacturing a magnetoresistive-effect device

COOLING APPARATUS FOR OPTICAL MEMBER, BARREL, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Epoxy Formulations for Use in Lithography Techniques

Semiconductor device and method for manufacturing the same

Harvesting of processed carbon nanotubes

GAP MEASURING METHOD, IMPRINT METHOD, AND IMPRINT APPARATUS

Scanning probe-based lithography method

Functionalized carbon nanotube-polymer composites and interactions with radiation

Production of carbon nanotubes

Continuous production of carbon nanomaterials using a high temperature inductively coupled plasma

Imprint method, chip production process, and imprint apparatus

Nanotube assembly including protective layer and method for making the same

Nanocrater catalyst in metal nanoparticles and method for preparing the same

Tailor-made functionalized silicon and/or germanium surfaces

METHOD FOR NON-DESTRUCTIVE PATTERNING OF PHOTONIC CRYSTALS EMPLOYED FOR SOLID-STATE LIGHT EXTRACTION

Fluorine storage material

Carbon-Encased Metal Nanoparticles and Sponges, Methods of Synthesis, and Methods of Use

Lithography Apparatus, Masks for Non-Telecentric Exposure and Methods of Manufacturing Integrated Circuits

Installation and method of nanofabrication

MICROFABRICATION APPARATUS AND DEVICE MANUFACTURING METHOD

Nanotube network and method of fabricating the same

UNIFORM AEROSOL DELIVERY FOR FLOW-BASED PYROLYSIS FOR INORGANIC MATERIAL SYNTHESIS

Functionalization of carbon nanoshperes by severe oxidative treatment

Mold, mold production process, processing apparatus, and processing method

SYNTHETIC FIBRILLAR STRUCTURE AND METHOD OF MAKING THEREOF

CPP device with a plurality of metal oxide templates in a confining current path (CCP) spacer

Measuring apparatus, exposure apparatus, and device fabrication method

Process for producing carbon anode compositions for lithium ion batteries

Thermophoretic fractionalization of small particles

Crosslinked carbon nanotube

Formation of carbon and semiconductor nanomaterials using molecular assemblies

Directed assembly of carbon nanotubes and nanoparticles using nanotemplates

Method for providing AFM exchange pinning fields in multiple directions on same substrate

Substrate with micrometallic masses aligned on the surface

Templated growth of graphenic materials

Belt-shaped mold and nanoimprint system using the belt-shaped mold

PROCESS FOR THE PREPARATION OF A CATALYST FOR THE PRODUCTION OF CARBON NANOTUBES

Apparatus for manufacturing carbon nanotubes and method of manufacturing carbon nanotubes with the same

SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD FOR MANUFACTURING THE SAME

Carbon nanotube MEMS assembly

Photo nanoimprint lithography

Double-gate transistor structure equipped with a multi-branch channel

Charged-particle beam writing apparatus and charged-particle beam writing method

MICROSCALE PATTERNING AND ARTICLES FORMED THEREBY

Highly dispersible carbon nanospheres in a polar solvent and methods for making same

Preparation of sensors on oligo- or poly (ethylene glycol) films on silicon surfaces

Metallic nanostructures self-assembly, and testing methods

Acid-doped polyelectrolyte modified carbon nanotubes and their use in high temperature PEM fuel cell electrodes

Carbon Nanoparticles, Production and Use Thereof

Controlled alignment of catalytically grown nanostructures in a large-scale synthesis process

METHOD AND APPARATUS FOR GENERATING A CARBON NANOTUBE

Device and Method for Obtaining a Substrate Structured on Micrometric or Nanometric Scale

Methods and devices for electrophoretic deposition of a uniform carbon nanotube composite film

Method and apparatus for detecting and adjusting substrate height

Method of forming a pattern

Mask blank for EUV exposure and mask for EUV exposure

EXTREME ULTRAVIOLET (EUV) MASK PROTECTION AGAINST INSPECTION LASER DAMAGE

IMPRINT MOLD STRUCTURE, IMPRINTING METHOD USING THE SAME, AND MAGNETIC RECORDING MEDIUM

Film having alternating monolayers of a metal-metal bonded complex monolayer and an organic monolayer by layer-by-layer growth

Ultra-fine fibrous carbon and preparation method thereof

PREPARING NANOPARTICLES AND CARBON NANOTUBES

OPTICAL RECORDING METHOD AND REPRODUCING METHOD

Block copolymer nanostructure formed on surface pattern with shape different from nanostructure of the block copolymer and method for preparation thereof

SYSTEM AND METHOD FOR CREATING A SURFACE PATTERN

METHODS FOR PATTERNING ELECTRONIC ELEMENTS AND FABRICATING MOLDS

THREE-DIMENSIONAL MICROFABRICATION METHOD USING PHOTOSENSITIVE NANOCRYSTALS AND DISPLAY DEVICE

Method for forming catalyst nanoparticles for growing elongated nanostructures

In-situ synthesis of carbon nanotubes filled with metallic nanoparticles using arc discharge in solution

Stoichiometric or cyclical re-hydrogenation of silicon, nanodiamond, or nanocarbon surfaces using hydrocarbons as sources of hydrogen

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

Method of manufacturing cellulose electrode for fuel cells, cellulose electrode manufactured thereby, and use of cellulose fibers as fuel cell electrodes

Graphene sheet and process of preparing the same

Process of preparing graphene shell

Method for fabricating carbon nanotubes and carbon nano particles

Apparatus and method for producing carbon nanotubes

DUAL-BEAM LASER BEAM RECORDER, AND METHOD FOR CONTROLLING A DUAL-BEAM LASER RECORDER

Carbon nanotube grown on catalyst and manufacture method

Charged particle beam exposure system

Microcontact printing stamp

Grease composition

Method for precipitating mono and multiple layers of organophosphoric and organophosphonic acids and the salts thereof in addition to use thereof

Removal of ionic residues or oxides and prevention of photo-induced defects, ionic crystal or oxide growth on photolithographic surfaces

Synthesis of Titanium Dioxide Nanoparticles

Nanostructure production methods and apparatus

Carbon nanotube composite preform and method for making the same

Methods for fabricating isolated micro- and nano-structures using soft or imprint lithography

Thermally and electrically conductive structure, method of applying a carbon coating to same, and method of reducing a contact resistance of same

Silicone mold and use thereof

Dual-side imprinting lithography system

Nanoparticles having reactive ester groups covalently coupled thereto and related methods

Method for growing carbon nanotubes having a predetermined chirality

Silylated carbon nanotubes and methods of making same

HIGH-FREQUENCY MAGNETIC MATERIAL AND ANTENNA DEVICE USING THEREOF

RESIN MOLD AND PROCESS FOR PRODUCING A MOLDED ARTICLE USING THE MOLD

DNA-based functionalization of single walled carbon nanotubes for directed assembly

Optics for generation of high current density patterned charged particle beams

Charged particle beam writing method

Charged particle beam lithography apparatus and charged particle beam lithography method

Charged-particle beam lithography apparatus and device manufacturing method

Writing data creation method and charged particle beam writing apparatus

Imprint lithography

Devices and methods for biochip multiplexing

Practical method and means for mechanosynthesis and assembly of precise nanostructures and materials including diamond, programmable systems for performing same; devices and systems produced thereby, and applications thereof

Pattern transfer apparatus

Tire containing thermally exfoliated graphite oxide

Automotive body panel containing thermally exfoliated graphite oxide

Emulsifier containing thermally exfoliated graphite oxide

Method of Manufacturing Magnetic Multi-layered Film

Process to form a mold of nanoimprint technique for making diffraction grating for DFB-LD

Reduced Residual Formation in Etched Multi-Layer Stacks

Micro and nano structures in an elastomeric material

Gas storage cylinder formed from a composition containing thermally exfoliated graphite

Packaging material and flexible medical tubing containing thermally exfoliated graphite oxide

Method of forming organic molecular film structure and organic molecular film structure

Embedded nanoparticle films and method for their formation in selective areas on a surface

METHOD FOR MASS PRODUCTION OF NANOSTRUCTURES USING MESOPOROUS TEMPLATES AND NANOSTRUCTURES PRODUCED BY THE SAME

Catalyst-spreading device that uniformly spreads catalyst on a substrate in a device for producing carbon nanotubes

SYSTEM FOR REMOVING IMPURITIES FROM SOLIDS

Continuous production of aligned carbon nanotubes

WIRE-GRID POLARIZER AND PROCESS FOR PRODUCING THE SAME

METHOD FOR TREATMENT OF CARBON NANOTUBES

Lithography meandering order

Graphene-diamond hybrid material and method for preparing same using chemical vapor deposition

Hierarchical nanopatterns by nanoimprint lithography

Methods of making carbon nanopipes and ductwork with nanometric walls

CATALYST PARTICLE FOR PRODUCTION OF CARBON NANOCOIL, PROCESS FOR PRODUCING THE SAME, AND PROCESS FOR PRODUCING CARBON NANOCOIL

METHODS AND APPARATUS FOR A SYNTHETIC ANTI-FERROMAGNET STRUCTURE WITH IMPROVED THERMAL STABILITY

Roll to roll nanoimprint lithography

PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS

System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure

Devices having horizontally-disposed nanofabric articles and methods of making the same

METHOD FOR OBTAINING A TRANSPARENT CONDUCTIVE FILM

Nanotube Devices and Vertical Field Effect Transistors

Method for translating a structured beam of energetic particles across a substrate in template mask lithography

Reflection type photomask blank, manufacturing method thereof, reflection type photomask, and manufacturing method of semiconductor device

Nanocomposites, synthesis method thereof and capacitor comprising the same

Method for separating carbon nanotubes, method for dispersing carbon nanotubes and compositions used for the methods

TUNNELING MAGNETIC SENSING ELEMENT AND METHOD FOR MAKING THE SAME

METHOD OF FORMING FINE PATTERN

Imprint method and imprint apparatus

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Method for making an aligned carbon nanotube

Cleaning method

AREA BASED OPTICAL PROXIMITY CORRECTION IN RASTER SCAN PRINTING

Method and System to Control Movement of a Body for Nano-Scale Manufacturing

SUBSTANCE-ENCAPSULATED CARBON NANOHORN COMPLEX AND PRODUCING METHOD THEREOF

Carbon nanofibers and procedure for obtaining said nanofibers

TETHERED NANORODS

Method of manufacturing carbon nanotube

Nanoporous Catalyst Particles, the Production Thereof and Their Use

Molding apparatus and molding method

Resin pattern formation method

Methods of forming a lens master plate for wafer level lens replication

Nanorice particles: hybrid plasmonic nanostructures

CARBON NANOTUBE DISPERSION LIQUID AND TRANSPARENT CONDUCTIVE FILM USING SAME

Systems and methods for controlling chirality of nanotubes

Method and System for Charged-Particle Beam Lithography

CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD THEREOF

Methods for fabricating isolated micro-and nano-structures using soft or imprint lithography

Environmentally benign graphite intercalation compound composition for exfoliated graphite, flexible graphite, and nano-scaled graphene platelets

Environmentally benign chemical oxidation method of producing graphite intercalation compound, exfoliated graphite, and nano-scaled graphene platelets

Substrate processing apparatus and method

High performance MTJ element for STT-RAM and method for making the same

Functionalized carbon nanotube-polymer composites and interactions with radiation

INTENSITY MODULATED ELECTRON BEAM AND APPLICATION TO ELECTRON BEAM BLANKER

Imprinting device and imprinting method

Alignment system and method for a substrate in a nano-imprint process

Method of producing 3-D mold, method of producing finely processed product, method of producing fine-pattern molded product, 3-D mold, finely processed product, fine-pattern molded product and optical component

Multi-beam source

Electrochemical method of producing nano-scaled graphene platelets

Contact Printing Method Using an Elastomeric Stamp Having a Variable Surface Area and Variable Shape

Imprint apparatus and imprint method using the same

Remote Center Compliant Flexure Device

COMPACT NANOFABRICATION APPARATUS

Electron source manufacturing method

Method of manufacturing nanoelectrode lines using nanoimprint lithography process

Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning

Method for Producing a Structured Elastomer and Elastomer

Process for producing carbon nanotube and catalyst for carbon nanotube production

Process and Apparatus for Producing Carbon Nanotube

CARBON NANO-TUBE HAVING ELECTRONS INJECTED USING REDUCING AGENT, METHOD FOR MANUFACTURING THE SAME AND ELECTRICAL DEVICE USING THE SAME

Method for producing ultra-thin nano-scaled graphene platelets

Induction fullerene producing device and producing method and induction fullerene

METHOD OF SELECTIVELY SEPARATING CARBON NANOTUBES, ELECTRODE COMPRISING METALLIC CARBON NANOTUBES SEPARATED BY THE METHOD AND OLIGOMER DISPERSANT FOR SELECTIVELY SEPARATING CARBON NANOTUBES

Laser pyrolysis with in-flight particle manipulation for powder engineering

Reflective mask blank for exposure, reflective mask for exposure, method of producing a semiconductor device, and substrate provided with multilayer reflective film

Fine pattern forming method and stamper

Method of producing a graphene film as transparent and electrically conducting material

Drop Pattern Generation for Imprint Lithography

Dispersions, films, coatings and compositions

Charged-particle beam writing method

Method for producing graphite nanocatalysts having improved catalytic properties

Reflective mask blank for EUV lithography

Carbon Nanoflake Compositions and Methods of Production

Aligned carbon nanotubes for dry adhesives and methods for producing same

Carbon nanostructures and methods of making and using the same

Article with PHEMA lift-off layer and method therefor

Method for Concurrently Employing Differing Materials to Form a Layer on a Substrate

Method for manufacturing carbon nano tube

Apparatus for the production of carbon nanotubes

Film and method for producing nano-particles for magnetoresistive device

MAGNETO-RESISTANCE ELEMENT, MANUFACTURING METHOD THEREFOR, AND MAGNETIC HEAD

Process for producing carbon nanotubes from renewable raw materials

ELECTRON BEAM LITHOGRAPHY APPARATUS AND DESIGN METHOD OF PATTERNED BEAM-DEFINING APERTURE

Charged particle beam writing apparatus and method thereof

Electron beam apparatus with aberration corrector

Carrier applied coating layers

Molding apparatus and molding method

Imprinting stamper and method of manufacturing the same

Template Having a Silicon Nitride, Silicon Carbide or Silicon Oxynitride Film

Porous Filamentous Nanocarbon And Method Of Forming The Same

Carbonnitride nanotubes with nano-sized pores on their stems, their preparation method and control method of size and quantity of pore thereof

Apparatus for mass production of carbon nanotubes using high-frequency heating furnace

Separation and purification of fullerenes

Fine resist pattern forming method and nanoimprint mold structure

Aggregate of carbon nanotubes, dispersion thereof and conductive film using the same

Charged particle beam writing method

Methods of etching articles via microcontact printing

Method for producing a support for the growth of localised elongated nanostructures

Method of making an optical disc

Reflective mask blank for EUV lithography and substrate with functional film for the same

Mask Blank, Photomask and Method of Manufacturing a Photomask

EUV mask and method for repairing an EUV mask

Single-walled carbon nanotube and aligned single-walled carbon nanotube bulk structure, and their production process, production apparatus and application use

METHOD OF MODIFYING CARBON NANOMATERIALS, COMPOSITES INCORPORATING MODIFIED CARBON NANOMATERIALS AND METHOD OF PRODUCING THE COMPOSITES

Nanotube Structures, Materials, and Methods

Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method

ALIGNMENT, TRANSPORTATION AND INTEGRATION OF NANOWIRES USING OPTICAL TRAPPING

Charged particle beam deflection method with separate stage tracking and stage positional error signals

Methods of forming semiconductor devices formed by processes including the use of specific etchant solutions

Wire coating containing thermally exfoliated graphite oxide

Method of growing carbon nanotubes and method of manufacturing field emission device using the same

Photosensitive metal nanoparticle and method of forming conductive pattern using the same

Glass substrate for mask blank and method of polishing for producing the same

Photomask manufacturing method and semiconductor device manufacturing method

CARBON NANO-TUBE (CNT) THIN FILM COMPRISING AN AMINE COMPOUND, AND A MANUFACTURING METHOD THEREOF

Orientation-controlled self-assembled nanolithography using a block copolymer

Nanotube growth and device formation

Composition and Use Thereof

Replication tools and related fabrication methods and apparatus

Method of making patterning device, patterning device for making patterned structure, and method of making patterned structure

Solvent-assisted layer formation for imprint lithography

Multi-function module for an electron beam column

Thin film production method and apparatus

Polymerization method for formation of thermally exfoliated graphite oxide containing polymer

SURFACE TREATMENT SOLUTION WITH POLYMER MATERIAL, METHOD FOR PRODUCING SURFACE TREATMENT SOLUTION, LIQUID-CONTACTING SURFACE STRUCTURE, AND SURFACE TREATMENT METHOD USING LIQUID-PHASE POLYMER

Titania-doped quartz glass for nanoimprint molds

Titania-doped quartz glass for nanoimprint molds

Iminecalixarene derivatives and aminocalixarene derivatives, method of preparation thereof, and self-assembled monolayer prepared by the method, fixing method of oligo-DNA by using the self-assembled monolayer, and oligo-DNA chip prepared by the method

APPARATUS FOR FABRICATING NANOSCALE PATTERNS IN LIGHT CURABLE COMPOSITIONS USING AN ELECTRIC FIELD

Imprinting device, method of fabricating the same, and method of patterning thin film using the same

In-situ functionalization of carbon nanotubes

Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning

System and method for producing carbon nanotubes

Integrated processes for generating carbon monoxide for carbon nanomaterial production

Integrated processes for generating carbon monoxide for carbon nanomaterial production

Integrated processes for generating carbon monoxide for carbon nanomaterial production

Imprint Fluid Control

Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning

End functionalization of carbon nanotubes

Conductive ink containing thermally exfoliated graphite oxide and method a conductive circuit using the same

Low resistance tunneling magnetoresistive sensor with composite inner pinned layer

WRITING METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS

Mask mold, manufacturing method thereof, and method for forming large-sized micro pattern using mask mold

Femtosecond Laser Pulse Surface Structuring Methods and Materials Resulting Therefrom

TRANSPARENT ELECTRODE COMPRISING CARBON NANOTUBE AND METHOD OF PREPARING THE SAME

Method for making branched carbon nanotubes

Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles

Methods of Manufacturing Carbon Nanotube (Cnt) Paste and Emitter with High Reliability

Method for making a carbon nanotube film

Gas-Phase Process for Growing Carbon Nanotubes Utilizing Sequential Multiple Catalyst Injection

Method of Synthesizing Y-Junction Single-Walled Carbon Nanotubes and Products Formed Thereby

Method of modifying carbon nanotube using radical initiator, and dispersion liquid and electrode comprising the carbon nanotube modified by using the method

Carbon nanotube and method of visualizing carbon nanotube

Gas-phase functionalization of carbon nanotubes

Charged particle beam writing apparatus and method

Ion Implantation System and Ion Implantation System

Methods and apparatus for manufacturing carbon nanotubes

Nanoparticle synthesis and associated methods

Carbon nanocapsule-layered silicate hybrid and preparation method thereof