Ion sources, systems and methods

Polymer-based composites comprising carbon nanotubes as a filler, method for producing said composites, and associated uses

Macromolecules auto-assembled and photopolymerised around carbon nanotubes, a method for production and application thereof

Method for producing carbon nanowalls, carbon nanowall, and apparatus for producing carbon nanowalls

Carbon nanostructures and process for the production of carbon-based nanotubes, nanofibres and nanostructures

Synthetic anti-ferromagnetic structure with non-magnetic spacer for MRAM applications

Exposure device

Magnetic sensor formed of magnetoresistance effect elements

System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission

Method for providing a thin film having a chemical composition that is spatially structured on a micrometric or nanometric scale on a substrate

Complementary metal-oxide-semiconductor transistor structure for high density and high performance integrated circuits

Electron-beam exposure system

E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the same

Deflector for equipment of electron beam lithography and equipment of electron beam lithography

Methods of making carbide and oxycarbide containing catalysts

Reflective photomask and method of fabricating the same

Method for patterning coatings

Magnetoresistive effect element, magnetic head and magnetic reproducing apparatus

Reticle for use in rapid determination of average intrafield scanning distortion having transmissivity of a complementary alignment attribute being different than the transmissivity of at least one alignment attribute

Mold for imprint, process for producing minute structure using the mold, and process for producing the mold

Apparatus for manufacturing display device and method of manufacturing the same

Magnetic memory device and method of fabricating the same

Automated nanoassembly

Pattern forming method and pattern forming system

Aperture design for improving critical dimension accuracy and electron beam lithography throughput

Molecular bonding method and molecular bonding device

Method of removing residual solvent from fullerene

Method of producing carbon nanostructure

Catalyst structure and method of manufacturing carbon nanotube using the same

TUNNEL TYPE MAGNETIC DETECTION ELEMENT IN WHICH FE COMPOSITION OF TOP/BOTTOM SURFACE OF INSULATING BARRIER LAYER IS ADJUSTED AND MANUFACTURING METHOD THEREOF

Side reading reduced GMR for high track density

Side reading reduced GMR for high track density

MTJ device with partially milled anti-parallel coupled bottom free layer

Patterning substrates employing multiple chucks

Broad-emission nanocrystals and methods of making and using same

Pattern area value calculating method, proximity effect correcting method, and charged particle beam writing method and apparatus

Method of electrolytically depositing materials in a pattern directed by surfactant distribution

Method and apparatus for depositing a magnetoresistive multilayer film

METHOD FOR FABRICATING MAGNETORESISTANCE MULTI-LAYER

Methods for forming pattern using electron beam and cell masks used in electron beam lithography

Modified metal mold for use in imprinting processes

Deposition of thin films

Nanocarbon fulerenes (ncf), method for producing ncf and use of ncf in the form of nanocarbons

Method for imprint lithography at constant temperature

CONTACT LITHOGRAPHY APPARATUS AND METHOD EMPLOYING SUBSTRATE DEFORMATION

Pattern forming method and its mold

Systems and methods of manufacturing nanotube structures

Nanoscopic wired-based devices and arrays

Photocurable resin composition and a method for forming a pattern

Electron beam lithography apparatus

Reflective-type mask blank for EUV lithography

Protected pattern mask for reflection lithography in the extreme UV or soft X-ray range

Reflective mask blank for EUV lithography and substrate with a conductive film for the mask blank

Method of preparing carbon nanotube from liquid phased-carbon source

Spin transfer magnetic element having low saturation magnetization free layers

Stamp for micro/nano imprint lithography using diamond-like carbon and method of fabricating the same

Press-molding apparatus, mold, and press-molding method

System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure

Detecting and characterizing mask blank defects using angular distribution of scattered light

Method of cutting carbon nanotubes

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Method of calculating deflection aberration correcting voltage and charged particle beam writing method

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Method of forming nitrogen-doped single-walled carbon nanotubes

Carbon nanotube functionalized with osmium clusters and process for preparing same

Nanowire structures and devices for use in large-area electronics and methods of making the same

Nanotube assembly

Method for fabricating magnetic tunnel junction device

Method for manufacturing single-walled carbon nanotube on glass

Move mechanism for moving target object and charged particle beam writing apparatus

Charged particle beam apparatus

Assembling system

Method for realizing a multispacer structure, use of said structure as a mold and circuital architectures obtained from said mold

Single, multi-walled, functionalized and doped carbon nanotubes and composites thereof

MgO/NiFe MTJ for high performance MRAM application

Fine metal structure, process for producing the same, fine metal mold and device

Exposure equipment having auxiliary photo mask and exposure method using the same

Apparatus and substrate structure for growing carbon nanotubes

Process for preparing a film having alternating monolayers of a metal-metal bonded complex monolayer and an organic monolayer by layer-by layer growth

Lower pressure synthesis of diamond material

Inspection apparatus, lithographic system provided with the inspection apparatus and a method for inspecting a sample

Lithographic apparatus and method

Alignment for imprint lithography

Imprint method, imprint apparatus, and process for producing chip

Elastomeric stamp, patterning method using such a stamp and method for producing such a stamp

Composite and method of manufacturing the same

Electron anti-fogging baffle used as a detector

Apparatus for manufacturing carbon nanotubes

Method for controlling magnetostriction in a free layer of a magnetoresistive sensor

Apparatus and method for reducing and removing airborne oxidized particulates

FORMING ELECTRICAL CONTACTS TO A MOLECULAR LAYER

Composites of poly (tert-butylacrylate) and process for the preparation thereof

Silane Coating Compositions, Coating Systems, and Methods

Transparent and electrically conductive single wall carbon nanotube films

Method for controlling distribution of fluid components on a body

Imprint lithography

Continuous production of carbon nanotubes

Shape manipulation of nanostructures

Imprint lithography

Charged particle beam writing method and apparatus

Ion sources, systems and methods

METHODS AND APPARATUSES FOR IMPRINTING SUBSTRATES

Method of forming a patterned layer on a substrate

Nanotube elongation

Fibrillar, nanotextured coating and method for its manufacture

In-situ functionalization of carbon nanotubes

Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate

Methods for modifying surfaces

Method of fullerene separation and complex containing fullerene

Positioning apparatus and charged-particle-beam exposure apparatus

Processing method

Method and system for double-sided patterning of substrates

Methods and systems for pattern generation based on multiple forms of design data

Method for manufacturing semiconductor device by using dual damascene process and method for manufacturing article having communicating hole

Method of fabricating nanoimprint mold

Mask blank and photomask having antireflective properties

METHOD OF FORMING A HETEROJUNCTION OF A CARBON NANOTUBE AND A DIFFERENT MATERIAL, METHOD OF WORKING A FILAMENT OF A NANOTUBE

Technique for separating a mold from solidified imprinting material

Bifurcated contact printing technique

System and method of electron beam writing

Particle-optical projection system

Carbon nanotubes and method for purifying carbon nanotubes

Method for patterning a substrate surface

High capacity materials for capture of metal vapors from gas streams

Conforming template for patterning liquids disposed on substrates

Method of nanopatterning, a resist film for use therein, and an article including the resist film

System and method for forming nanodisks used in imprint lithography and nanodisk and memory disk formed thereby

Magneto-resistance effect element having Heusler alloy compounds adjacent to spacer layer

Magnetic elements with spin engineered insertion layers and MRAM devices using the magnetic elements

Method and apparatus for evaluating pattern shape of a semiconductor device

Masking material for dry etching

Electric discharge apparatus for controlling the length of a carbon nanotube

Electrochemical cell structure and method of fabrication

Copolymerization and copolymers of aromatic polymers with carbon nanotubes and products made therefrom

Sensitive and selective method and device for the detection of trace amounts of a substance

Pattern formation method using nanoimprinting and device for carrying out same

Semiconductor thin film using self-assembled monolayers and methods of production thereof

Biosensor

Method and apparatus for detecting an analyte

Method for determining an exposure dose and exposure apparatus

Spherical carbon nanostructure and method for producing spherical carbon nanostructures

Arrays of long carbon nanotubes for fiber spinning

Method of making carbon nanotubes

Methods for synthesis of high quality carbon single-walled nanotubes

Carbon nanotube compositions and devices and methods of making thereof

Photoresponsive polyimide based fiber

Information recording apparatus and method for recording information and information recording medium

MAGNETIC DETECTING ELEMENT HAVING PINNED MAGNETIC LAYER WITH PINNED MAGNETIZATION DIRECTION AND FREE MAGNETIC LAYER FORMED ON PINNED MAGNETIC LAYER WITH NONMAGNETIC MATERIAL LAYER INTERPOSED BETWEEN WITH MAGNETIZATION DIRECTION CHANGING BY EXTERNAL MAGNET

Method of manufacturing magnetic recording medium, magnetic recording medium stamper, and magnetic recording medium preform

Imprinting apparatus and method

Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device

Charged particle beam irradiation method and charged particle beam apparatus

Charged beam drawing apparatus and charged beam drawing method

Charged particle beam writing method and apparatus and readable storage medium

Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam

Electron beam apparatus with aberration corrector

Method for manufacturing nano-carbon substances

Low resistance tunneling magnetoresistive sensor with natural oxidized double MgO barrier

Compositions and methods for liquid metering in microchannels

Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the same

Carbon nanotube growth method

Apparatus and method for synthesizing carbon nanotubes

Method for producing carbon nanotubes

Water-soluble single-wall carbon nanotubes as a platform technology for biomedical applications

System for manufacturing a fullerene derivative and method for manufacturing

System and method for positioning and synthesizing of nanostructures

Nanotube based multi-level memory structure

STAMPER, IMPRINTING METHOD, AND METHOD OF MANUFACTURING AN INFORMATION RECORDING MEDIUM

Stamp and fabricating method thereof, thin film transistor using the stamp, and liquid crystal display device having the thin film transistor

Therapeutic malonic acid/acetic acid Ctri-adducts of buckminsterfullerene and methods related thereto

High resolution structures defined by brush painting fluid onto surface energy patterned substrates

Method for fixing metal particles and method for manufacturing substrate containing metal particles, method for manufacturing substrate containing carbon nanotube, and method for manufacturing substrate containing semiconductor-crystalline rod, employing thereof

Imprint lithography

Writing method and writing apparatus of charged particle beam, positional deviation measuring method, and position measuring apparatus

Position measuring apparatus and positional deviation measuring method

Imprint lithography

Imprint lithography

Electron beam lithography system

Controlled nanotube fabrication and uses

Method for producing compositions of nanoparticles on solid surfaces

Carbon nanotube with ZnO asperities

Positive tone bi-layer imprint lithography method

Plasma etch process for defining catalyst pads on nanoemissive displays

Manufacturing method of display device and mold therefor

Fabricating inorganic-on-organic interfaces for molecular electronics employing a titanium coordination complex and thiophene self-assembled monolayers

Method of patterning molecules on a substrate using a micro-contact printing process

Method for preparing a pharmaceutical compound by way of magnetic carbon nanocapsules

Method for manufacturing carbon nanotubes

Catalyst for synthesizing carbon nanocoils, synthesizing method of the same, synthesizing method of carbon nanocoils, and carbon nanocoils

Sidewall derivatized carbon nanotubes

Method for functionalizing carbon nanotubes utilizing peroxides

Devices and methods for biochip multiplexing

Integrated circuits having interconnects and heat dissipators based on nanostructures

Substrate core polymer nanocomposite with nanoparticles and randomly oriented nanotubes and method

Formation of self-assembled monolayers

Imprinting method and imprinting apparatus

Microlithography method using a mask with curved surface

Process for applying organophosphorus-based layers on substrates

Method for manufacturing magnetoresistive element

Thermally exfoliated graphite oxide

Methods for growing and harvesting carbon nanotubes

Apparatus and method for manufacturing carbon nanotubes

Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask

Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask

MOLD AND IMPRINT APPARATUS

Thin film transistor and flat panel display including the same

Reclaim method for extreme ultraviolet lithography mask blank and associated products

Ion beam sputtering apparatus and film deposition method for a multilayer for a reflective-type mask blank for EUV lithography

Organic thin film transistor including a self-assembly monolayer between an insulating layer and an organic semiconductor layer and flat panel display comprising the same

Fullerene based proton conductive materials

Phase separation in patterned structures

Apparatus and method for synthesizing chiral carbon nanotubes

Microstamping activated polymer surfaces

Method for selective enrichment of carbon nanotubes

Electron beam column for writing shaped electron beams

Writing a circuit design pattern with shaped particle beam flashes

Placement effects correction in raster pattern generator

Critical dimension effects correction in raster pattern generator

Real-time compensation of mechanical position error in pattern generation or imaging applications

Purification of fluids with nanomaterials

Apparatus and method for manufacturing carbon nanotubes

Method of forming a recessed structure employing a reverse tone process

Masks, lithography device and semiconductor component

Magnetoresistance effect element, magnetic head, magnetic reproducing apparatus, and magnetic memory

Multilayer-film mirrors, lithography systems comprising same, and methods for manufacturing same

Hybrid multibeam electronic emission device with controlled divergence

Etching technique to planarize a multi-layer structure

Deposition technique to planarize a multi-layer structure

Stencil masks, method of manufacturing stencil masks, and method of using stencil masks

Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithography

Process for depositing an organic acid on the surface of a metal composition

Carbon nanotube structure and method of shaping the same

Finely particulate composite containing carbon compound encapsulated in a polymer micelle of a block copolymer

System for controlling nucleation in self-assembled films

Apparatus for hot embossing lithography

Electrostatic particle beam deflector

Beam exposure writing strategy system and method

Electrostatic deflection system with impedance matching for high positioning accuracy

System to couple a body and a docking plate

Covalent methods for immobilization of thiolated biomolecules on siliceous and metallic surfaces

Method of aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate

Magnetic thin film for high frequency, method of manufacturing the same, and magnetic device

Method for making carbon nanotube-based device

Nanotube forming methods

Thermal treatment of functionalized carbon nanotubes in solution to effect their functionalization

System to transfer a template transfer body between a motion stage and a docking plate

FCC-like trilayer AP2 structure for CPP GMR EM improvement

Exposure system, exposure method and semiconductor device manufacturing method

Forming closely spaced electrodes

Beam re-registration system and method

Beam exposure correction system and method

Production of nanostructures by curie point induction heating

Purification of carbon nanotubes based on the chemistry of fenton's reagent

Surface plasmon resonance biosensor system for detection of antigens and method for determining the presence of antigens

Photo-curable resin composition and a method for forming a pattern using the same

Photomask providing uniform critical dimension on semiconductor device and method of manufacturing the same

Information storage medium with laterally magnetised dot array, and process for producing said medium

System to control an atmosphere between a body and a substrate

Lithography system and projection method

Nano impression lithographic process which involves the use of a die having a region able to generate heat

Method to control an atmosphere between a body and a substrate

Storage and use of colloids

Directional self-assembly of biological electrical interconnects

Reversal imprint technique

MASK FORMING METHOD AND INFORMATION RECORDING MEDIUM MANUFACTURING METHOD

Artificial band gap

Carbon nanotube solution dispersant and composition including the same

Lithography system, sensor and measuring method

Electron beam apparatus and method of generating an electron beam irradiation pattern

Process for modifying at least one electrical property of a nanotube or a nanowire and a transistor incorporating it

Methods for electronic fluorescent perturbation for analysis and electronic perturbation catalysis for synthesis

Mask, method of producing mask, and method of producing semiconductor device

Mask, method of producing mask, and method of producing semiconductor device

Fabrication method of extreme ultraviolet radiation mask mirror using atomic force microscope lithography

Mold, imprint apparatus, and process for producing structure

Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam

TMR element having a tunnel barrier which includes crystalline portions and non-crystalline portions

Tunnel barriers based on rare earth element oxides

Tunnel barriers based on alkaline earth oxides

Processes and materials for step and flash imprint lithography

Apparatus and method for producing nano-powder

Hydrophilic silicone elastomers

Low temperature preparation of supported nanoparticle catalysts having increased dispersion

Nanoimprint lithography template techniques for use during the fabrication of a semiconductor device and systems including same

Microarrays on mirrored substrates for performing proteomic analyses

Biosensor

Printing plate, method of fabricating the same, and method of fabricating flat panel display using the same

Methods of forming capacitors

Lithographic template and method of formation and use

Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices

Patterning method using coatings containing ionic components

Apparatus and method for synthesizing a single-wall carbon nanotube array

System and method for controlling hydrogen elimination during carbon nanotube synthesis from hydrocarbons

CPP read sensors having constrained current paths made of lithographically-defined conductive vias and methods of making the same

Method of making a magnetic sensing device having an insulator structure