167986 ⎘
Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light; Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light Excitation by energised particles such as metastable molecules
ION BEAM TIME OF ARRIVAL (TOA) GAUGE
#2Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system
#3COLORIMETRIC PLASMONIC NANOSENSOR FOR DOSIMETRY OF THERAPEUTIC LEVELS OF IONIZING RADIATION
#4Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus