Method of processing of an object

Particle beam device with deflection system

Liquid metal ion gun

Apparatus and method for controlled particle beam manufacturing

Sample holder, method for use of the sample holder, and charged particle device

METHOD AND APPARATUS FOR GENERATING THREE-DIMENSIONAL IMAGE DATA

Charged particle beam system having multiple user-selectable operating modes

Environmental cell for a particle-optical apparatus

Method and apparatus for specimen fabrication

Multi-source plasma focused ion beam system

Gas field ion microscopes having multiple operation modes

METHOD AND APPARATUS FOR PRODUCING THREE DIMENSIONAL NANO AND MICRO SCALE STRUCTURES

Navigation and sample processing using an ion source containing both low-mass and high-mass species

High accuracy beam placement for local area navigation

Plasma igniter for an inductively coupled plasma ion source

Charged particle beam processing system with visual and infrared imaging

Charged particle beam apparatus and sample processing method

System and method for precision fabrication of micro- and nano-devices and structures

Dual beam system

Particle-Beam Induced Processing Using Liquid Reactants

Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation

Combination laser and charged particle beam system

Automated slice milling for viewing a feature

Sample processing and observing method

Composite charged particle beam apparatus and sample processing and observing method

Distributed ion source acceleration column

USE OF HIGH ENERGY HEAVY ION BEAM FOR DIRECT SPUTTERING

Methods for performing circuit edit operations with low landing energy electron beams

Focused ion beam apparatus

ION Beam System and Machining Method

Plasma igniter for an inductively coupled plasma ion source

Charged particle beam apparatus using an electrostatic lens gun

Apparatus and method for surface modification using charged particle beams

Method and apparatus for specimen fabrication

Charged corpuscular ray apparatus

Charged particle extraction device and method of design there for

Charged particle beam system having multiple user-selectable operating modes

Electrode unit and charged particle beam device

Reducing particle implantation

Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus

MANUFACTURING METHOD OF ELECTRON SOURCE

Image forming method and charged particle beam apparatus

VARIABLE-TILT TEM SPECIMEN HOLDER FOR CHARGED-PARTICLE BEAM INSTRUMENTS

Probe and method for obtaining three-dimensional compositional maps of a biological sample

Processing method for a workpiece

Method for S/TEM sample analysis

Beam quality in FIB systems

Method for creating S/TEM sample and sample structure

Method for creating S/tem sample and sample structure

System and method for backside circuit editing on full thickness silicon device

Method of depositing protective structures

Charged particle beam application apparatus

Enhanced focused ion beam etching of dielectrics and silicon

Method for forming microscopic 3D structures

Forming an image while milling a work piece

Liquid metal ion source, secondary ion mass spectrometer, secondary ion mass spectrometric analysis method and use thereof

Focused ion beam apparatus

Micro cross-section processing method

Dual beam apparatus with tilting sample stage

Method of processing objects by focused ion beam system and carrier used therewith

Focused ion beam apparatus, sample processing method using the same, and computer program for focused ion beam processing

Graphical automated machine control and metrology

Charged particle beam masking for laser ablation micromachining

High voltage isolation and cooling for an inductively coupled plasma ion source

Measurement and endpointing of sample thickness

Dual mode gas field ion source

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

High accuracy beam placement for local area navigation

Method and system for counting secondary particles

Method for the production of multiplayer electrostatic lens array

Device and method for analyzing a sample

Single-channel optical processing system for energetic-beam microscopes

Charged particle extraction device and method of design there for

Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner

Method to direct pattern metals on a substrate

GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT

Dual beam system

Multiple current charged particle methods

Section processing method and its apparatus

Integrated Circuit Cooling Apparatus for Focused Beam Processes

Multi-beam ion/electron spectra-microscope

Particle optical arrangement

Multi-source plasma focused ion beam system

CHARGED PARTICLE BEAM APPARATUS

Method to create three-dimensional images of semiconductor structures using a focused ion beam device and a scanning electron microscope

Method of forming TEM sample holder

Liquid metal wetting of micro-fabricated charge-emission structures

Environmental cell for a particle-optical apparatus

Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

Composite charged particle beam apparatus, method of processing a sample and method of preparing a sample for a transmission electron microscope using the same

CHARGED PARTICLE RADIATION APPARATUS

DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME

System and method for focused ion beam data analysis

Defect recognizing method, defect observing method, and charged particle beam apparatus

Charged particle source with automated tip formation

High Brightness Solid State Ion Beam Generator, its use, and Method for Making such a Generator

Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope

Sample preparing device and sample posture shifting method

Focused ion beam field source

Charged particle beam apparatus

Focused negative ion beam field source

CHARGED PARTICLE BEAM APPARATUS, AND SAMPLE PROCESSING AND OBSERVATION METHOD

Particle beam device and method for use in a particle beam device

Method and apparatus for specimen fabrication

Charged-particle beam apparatus

Composite charged-particle beam system

High resolution plasma etch

Charged particle beam application apparatus

Focused ion beam apparatus

Apparatus and method for surface modification using charged particle beams

Focused ion beam defining process enhancement

METHOD AND APPARATUS FOR SPECIMEN FABRICATION

Method and apparatus for specimen fabrication

Magneto-optical trap ion source

SOLID SAMPLE, SOLID SAMPLE FABRICATING METHOD, AND SOLID SAMPLE FABRICATING APPARATUS

In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques

Charged Particle Beam Device

Charged particle beam apparatus and method for operating a charged particle beam apparatus

Method and apparatus for in-situ sample preparation

Achromatic mass separator

Focused Ion Beam Apparatus

Gas field ION source for multiple applications

Ion beam system and machining method

Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method

Column simultaneously focusing a particle beam and an optical beam

Determining dopant information

Graphical automated machine control and metrology

Charged particle beam system and its specimen holder

Directed Multi-Deflected Ion Beam Milling of a Work Piece and Determining and Controlling Extent Thereof

Focused ion beam apparatus and method of preparing/observing sample

Ion beam processing apparatus

Method and system for identifying events in FIB

Focused ION beam apparatus

Electron lens and charged particle beam apparatus

Multi-part specimen holder with conductive patterns

High-resolution optical channel for non-destructive navigation and processing of integrated circuits

Focused ion beam apparatus and sample section forming and thin-piece sample preparing methods

Dual beam system

Focused ION beam apparatus

Apparatus and method for optical interference fringe based integrated circuit processing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Semiconductor mask correcting device and semiconductor mask correcting method

Adjusting device of an apparatus for generating a beam of charged particles

Charged particle beam device

Method, System and Device for Microscopic Examination Employing Fib-Prepared Sample Grasping Element

Method for retrieving signal from circuit

Image forming method and charged particle beam apparatus

Focused ion beam processing method

Charged particle beam system, semiconductor inspection system, and method of machining sample

Method and apparatus for specimen fabrication

Method and apparatus for specimen fabrication

Method and apparatus for specimen fabrication

Focused ion beam apparatus for specimen fabrication

Charged particle beam processing method and charged particle beam apparatus

Charged particle beam scan and irradiation method, charged particle beam apparatus, workpiece observation method and workpiece processing method

Charged-particle beam system

Charged particle beam apparatus

Strain detection for automated nano-manipulation

Charged particle beam apparatus

Charged particle beam apparatus

Apparatus and method for controlled particle beam manufacturing

Emitter for an ion source and method of producing same

Image forming method and charged particle beam apparatus

Apparatus and method for selected site backside unlayering of si, GaAs, GaAlAsof SOI technologies for scanning probe microscopy and atomic force probing characterization

Focused ion beam system

Particle detector for secondary ions and direct and or indirect secondary electrons

Method, apparatus and system for specimen fabrication by using an ion beam

Method and apparatus for specimen fabrication

TEM sample holder and method of forming same

Method and apparatus for specimen fabrication

Method and apparatus for the improvement of material/voltage contrast

Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method

Column simultaneously focusing a particle beam and an optical beam

Focused ion beam system

Ion beam processing method

Charged particle beam apparatus and sample manufacturing method

Apparatus and method of forming silicide in a localized manner

Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner

Charged particle beam apparatus

Method of processing semiconductor apparatus

Ion beam system and machining method

APPARATUS AND METHOD FOR MANIPULATING SAMPLE TEMPERATURE FOR FOCUSED ION BEAM PROCESSING

Apparatus and method for evaluating cross section of specimen

Enhanced scanning control of charged particle beam systems

Method of approaching probe and apparatus for realizing the same

Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same

Method and apparatus for the improvement of material/voltage contrast

Device for controlling an apparatus generating a charged particle beam

Focused ion beam apparatus and focused ion beam irradiation method

Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope

Method for the removal of a microscopic sample from a substrate

Method and apparatus for rapid sample preparation in a focused ion beam microscope

Method and apparatus for sample formation and microanalysis in a vacuum chamber

Apparatus for sample formation and microanalysis in a vacuum chamber

Method and apparatus for the improvement of material/voltage contrast

Method for the removal of a microscopic sample from a substrate

Focused ion beam apparatus

Ion beam device and ion beam processing method, and holder member

Graphical automated machine control and metrology

Composite system of scanning electron microscope and focused ion beam

Method, system and device for microscopic examination employing fib-prepared sample grasping element

Source of liquid metal ions and a method for controlling the source

Method and apparatus for specimen fabrication

Shaped sputter shields for improved ion column operation

Focused charged particle beam apparatus

Dual beam system

Holes tilt angle measurement using FIB diagonal cut

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

Systems and methods for interferometric end point detection for a focused ion beam fabrication tool

Gas injection system for ion beam device

Precision substrate material removal using miniature-column charged particle beam arrays