Aalen
Germany
109
2025-11-06
The entities that hold a legal rights for patent applications filed by inventor Epple Alexander:
Alexander Epple from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
CHROMATICALLY CORRECTED IMAGING ILLUMINATION OPTICAL UNIT FOR USE IN A LITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#2 | 2025-06-26MAGNIFYING IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING OBJECTS
#3 | 2025-01-02PROJECTION LENS, PROJECTION EXPOSURE APPARATUS AND PROJECTION EXPOSURE METHOD
#4 | 2023-12-14CATADIOPTRIC-OPTICAL ARRANGEMENT
#5 | 2023-12-14Optical arrangement with an overview function for a catadioptric microscope objective
#6 | 2023-10-19OPTICAL SYSTEM
#7 | 2021-01-28Immersion objective
#8 | 2020-01-23Projection lens, projection exposure apparatus and projection exposure method
#9 | 2018-12-27CATADIOPTRIC PROJECTION OBJECTIVE
#10 | 2018-04-05Catadioptric projection objective
#11 | 2018-02-01CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES
#12 | 2017-12-21Catadioptric Projection Objective With Intermediate Images
#13 | 2017-07-06Microlithography projection objective
#14 | 2016-09-22CATADIOPTRIC PROJECTION OBJECTIVE
#15 | 2016-08-11Catadioptric projection objective
#16 | 2015-10-15Imaging optical unit and projection exposure apparatus for projection lithography, having such imaging optical unit
#17 | 2015-08-13Catadioptric projection objective with parallel, offset optical axes
#18 | 2015-07-23Catadioptric projection objective with intermediate images
#19 | 2015-05-07Optical imaging device and imaging method for microscopy
#20 | 2015-03-12Projection exposure apparatus for projection lithography
#21 | 2015-02-26Catadioptric projection objective
#22 | 2014-12-25CATADIOPTRIC PROJECTION OBJECTIVE WITH TWO INTERMEDIATE IMAGES AND NO MORE THAN FOUR LENSES BETWEEN THE APERTURE STOP AND IMAGE PLANE
#23 | 2014-11-13Microlithography projection objective
#24 | 2014-10-02MICROLITHOGRAPHY PROJECTION OBJECTIVE
#25 | 2014-05-01Catadioptric projection objective with intermediate images
#26 | 2014-04-24Immersion catadioptric projection objective having two intermediate images
#27 | 2014-04-24Catadioptric Projection Objective With Intermediate Images
#28 | 2014-03-20Catadioptric projection objective with intermediate images
#29 | 2013-09-19Catadioptric projection objective
#30 | 2013-08-08Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same
#31 | 2013-05-16CATADIOPTRIC PROJECTION OBJECTIVE WITH MIRROR GROUP
#32 | 2013-04-11Imaging optical system and projection exposure installation for microlithography including same
#33 | 2013-03-21Projection lens system of a microlithographic projection exposure installation
#34 | 2012-11-01CATADIOPTRIC PROJECTION OBJECTIVE
#35 | 2012-11-01Catadioptric projection objective including an aspherized plate
#36 | 2012-10-04Catadioptric projection objective
#37 | 2012-06-28Catadioptric projection objective with intermediate images
#38 | 2012-05-31Method of manufacturing a projection objective and projection objective
#39 | 2012-03-29Optical arrangement in a projection objective of a microlithographic projection exposure apparatus
#40 | 2011-10-27Catadioptric projection objective with mirror group
#41 | 2011-09-29Catadioptric projection objective
#42 | 2011-09-22PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#43 | 2011-09-01Catadioptric projection objective
#44 | 2011-06-09MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#45 | 2011-05-12Microlithographic projection exposure apparatus
#46 | 2011-03-31Catadioptric projection objective
#47 | 2011-02-17Catadioptric projection objective
#48 | 2011-02-03Projection objective for lithography
#49 | 2011-01-13Chromatically corrected catadioptric objective and projection exposure apparatus including the same
#50 | 2010-10-21Catadioptric projection objective
#51 | 2010-10-21Projection lens system of a microlithographic projection exposure installation
#52 | 2010-10-07Catadioptric projection objective
#53 | 2010-07-29Optical imaging device and imaging method for microscopy
#54 | 2010-05-27Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same
#55 | 2010-04-22High transmission, high aperture catadioptric projection objective and projection exposure apparatus
#56 | 2010-01-21Catadioptric projection objective
#57 | 2009-12-24CHROMATICALLY CORRECTED OBJECTIVE AND PROJECTION EXPOSURE APPARATUS INCLUDING THE SAME
#58 | 2009-08-20Method of manufacturing a projection objective and projection objective
#59 | 2009-07-30Catadioptric projection objective
#60 | 2009-07-23Catadioptric projection objective with pupil mirror, projection exposure apparatus and projection exposure method
#61 | 2009-05-07Microlithography projection objective
#62 | 2009-04-09Compact High Aperture Folded Catadioptric Projection Objective
#63 | 2009-04-02High Aperture Folded Catadioptric Projection Objective
#64 | 2009-03-05Chromatically corrected catadioptric objective and projection exposure apparatus including the same
#65 | 2009-02-05Catadioptric projection objective with intermediate images
#66 | 2008-12-25CATADIOPTRIC PROJECTION OBJECTIVE WITH GEOMETRIC BEAM SPLITTING
#67 | 2008-12-18CATADIOPTRIC PROJECTION OBJECTIVE
#68 | 2008-12-11PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#69 | 2008-12-04Catadioptric projection objective
#70 | 2008-11-20CATADIOPTRIC PROJECTION OBJECTIVE
#71 | 2008-10-23PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
#72 | 2008-09-04Imaging system with mirror group
#73 | 2008-09-04Catadioptric projection objective
#74 | 2008-08-21Projection objective, projection exposure apparatus and reflective reticle for microlithography
#75 | 2008-08-14Microlithographic Projection Exposure Apparatus
#76 | 2008-08-07Catadioptric projection objective
#77 | 2008-07-24Projection objective for lithography
#78 | 2008-06-26CATADIOPTRIC PROJECTION OBJECTIVE
#79 | 2008-06-26CATADIOPTRIC PROJECTION OBJECTIVE
#80 | 2008-05-08Projection lens system of a microlithographic projection exposure installation
#81 | 2008-02-14Catadioptric projection objective
#82 | 2008-01-03Catadioptric projection objective
#83 | 2007-12-13Imaging system for a microlithographical projection light system
#84 | 2007-11-08Projection optical system
#85 | 2007-11-08Lithography lens system and projection exposure system provided with at least one lithography lens system of this type
#86 | 2007-10-11Catadioptric projection objective
#87 | 2007-08-23Projection exposure apparatus
#88 | 2007-08-16Projection objective, especially for microlithography, and method for adjusting a projection objective
#89 | 2007-07-19Projection objective for a microlithographic projection exposure apparatus
#90 | 2007-05-17Refractive projection objective for immersion lithography
#91 | 2007-04-24Projection objective, especially for microlithography, and method for adjusting a projection objective
#92 | 2007-01-18Reticle-masking objective with aspherical lenses
#93 | 2006-11-14Catadioptric reduction lens
#94 | 2006-10-31Reticle-masking objective with aspherical lenses
#95 | 2006-09-07Refractive optical imaging system, in particular projection objective for microlithography
#96 | 2006-08-10Lithographic objective having a first lens group including only lenses having a positive refractive power
#97 | 2006-08-03Projection objectives including a plurality of mirrors with lenses ahead of mirror M3
#98 | 2006-06-22Catadioptric projection objective
#99 | 2006-06-08Optical system for ultraviolet light
#100 | 2006-05-16Catadioptric reductions lens
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