ZUERICH
Switzerland
4
2019-02-21
The entities that hold a legal rights for patent applications filed by inventor EKINCI YASIN:
YASIN EKINCI from ZUERICH, CH has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and system for high-throughput defect inspection using the contrast in the reduced spatial frequency domain
#2 | 2018-08-30Compact light source for metrology applications in the EUV range
#3 | 2017-03-16Imaging system in reflection mode using coherent diffraction imaging methods and using micro-pinhole and aperture system
#4 | 2016-06-02SCANNING COHERENT DIFFRACTIVE IMAGING METHOD AND SYSTEM FOR ACTINIC MASK INSPECTION FOR EUV LITHOGRAPHY