Mountain View, California
United States
26
2025-12-11
The entities that hold a legal rights for patent applications filed by inventor Friedmann Michael:
Michael Friedmann from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
NOVEL ILLUMINATION AND BACKGROUND REJECTION FOR ENHANCED RESOLUTION IMAGING
#2 | 2022-06-23Methods and systems for compact, small spot size soft x-ray scatterometry
#3 | 2021-05-06Laser produced plasma illuminator with low atomic number cryogenic target
#4 | 2021-05-06Laser produced plasma illuminator with liquid sheet jet target
#5 | 2020-09-17Collecting and recycling rare gases in semiconductor processing equipment
#6 | 2020-08-27System and method for pumping laser sustained plasma with interlaced pulsed illumination sources
#7 | 2020-08-27Variable aperture mask
#8 | 2020-07-30Methods and systems for co-located metrology
#9 | 2019-03-28Systems and methods for metrology beam stabilization
#10 | 2019-02-14Variable aperture mask
#11 | 2019-01-17Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction
#12 | 2018-07-05X-ray zoom lens for small angle x-ray scatterometry
#13 | 2010-04-15Apparatus and methods for detecting overlay errors using scatterometry
#14 | 2009-11-19Apparatus and methods for detecting overlay errors using scatterometry
#15 | 2008-06-10Apparatus and methods for detecting overlay errors using scatterometry
#16 | 2008-05-27Apparatus and methods for detecting overlay errors using scatterometry
#17 | 2008-04-24Apparatus and methods for detecting overlay errors using scatterometry
#18 | 2008-02-28Apparatus and methods for detecting overlay errors using scatterometry
#19 | 2008-01-31Apparatus and methods for detecting overlay errors using scatterometry
#20 | 2008-01-08Apparatus and methods for detecting overlay errors using scatterometry
#21 | 2007-11-27Apparatus and methods for detecting overlay errors using scatterometry
#22 | 2007-11-20Apparatus and methods for detecting overlay errors using scatterometry
#23 | 2007-10-30Apparatus and methods for detecting overlay errors using scatterometry
#24 | 2007-10-09Apparatus and methods for detecting overlay errors using scatterometry
#25 | 2007-07-10Apparatus and methods for detecting overlay errors using scatterometry
#26 | 2006-12-07Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals
2234767 ⎘