Morgan Hill, California
United States
11
2022-06-30
The entities that hold a legal rights for patent applications filed by inventor Silvetti Mario D.:
Mario D. Silvetti from Morgan Hill, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma induced modification of silicon carbide surface
#2 | 2022-06-23Apparatus and methods for improving chemical utilization rate in deposition process
#3 | 2022-03-24Susceptor wafer chucks for bowed wafers
#4 | 2021-03-25PBN Heaters For ALD Temperature Uniformity
#5 | 2020-08-13Vacuum Pumps For Single And Multi-Process Chamber Flow Stream Sharing
#6 | 2019-12-19Paired dynamic parallel plate capacitively coupled plasmas
#7 | 2019-12-19Gas distribution assembly for improved pump-purge and precursor delivery
#8 | 2019-06-20Geometrically selective deposition of dielectric films utilizing low frequency bias
#9 | 2011-11-03Disk-brush cleaner module with fluid jet
#10 | 2006-09-12Nitrogen-free dielectric anti-reflective coating and hardmask
#11 | 2005-08-09Nitrogen-free dielectric anti-reflective coating and hardmask
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