San Jose, California
United States
30
2026-03-26
The entities that hold a legal rights for patent applications filed by inventor Ehrlich Darrell:
Darrell Ehrlich from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
EDGE RINGS WITH INSTEPS AND OVERSIZED HOLES FOR PREVENTING LIFT PIN CONTACT THEREWITH IN SUBSTRATE PROCESSING SYSTEMS
#2 | 2026-01-01MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS
#3 | 2025-11-27COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS
#4 | 2025-10-09ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING
#5 | 2024-12-05HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIGHT-UP/ARCING
#6 | 2024-02-01REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
#7 | 2023-11-16MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS
#8 | 2023-10-26ANODIZATION FOR METAL MATRIX COMPOSITE SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS
#9 | 2023-08-31SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEATER ZONES WITH LOCAL THERMAL CONTROL
#10 | 2023-03-23COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS
#11 | 2023-03-16COMPONENT WITH PROTECTIVE SURFACE FOR PROCESSING CHAMBER
#12 | 2023-03-09ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING
#13 | 2023-02-09MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH THERMAL OXIDE SPRAYCOAT
#14 | 2022-08-25MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRATE PROCESSING SYSTEMS
#15 | 2022-08-11MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRATE PROCESSING SYSTEMS
#16 | 2022-08-04SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
#17 | 2022-07-14HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIGHT-UP/ARCING
#18 | 2022-05-12Electrostatic chuck with ceramic monolithic body
#19 | 2022-05-05Chuck for plasma processing chamber
#20 | 2020-12-17Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
#21 | 2020-07-30Multi zone gas injection upper electrode system
#22 | 2019-06-20Corrosion-Resistant Temperature Sensor Probe
#23 | 2019-05-16Substrate holder having integrated temperature measurement electrical devices
#24 | 2018-06-21Compression member for use in showerhead electrode assembly
#25 | 2017-11-16Connections between laminated heater and heater voltage inputs
#26 | 2017-11-16Laminated heater with different heater trace materials
#27 | 2017-04-06Substrate holder having integrated temperature measurement electrical devices
#28 | 2015-08-27Compression member for use in showerhead electrode assembly
#29 | 2013-11-14Compression member for use in showerhead electrode assembly
#30 | 2013-05-23Multi zone gas injection upper electrode system
255460 ⎘