Munchen
Germany
4
2012-12-27
The entities that hold a legal rights for patent applications filed by inventor MATHUNI Josef:
Josef MATHUNI from Munchen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus and method for producing microcomponents and use of
#2 | 2009-08-27Apparatus and method for producing microcomponents and use of
#3 | 2006-12-28Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles
#4 | 2006-07-04Process for the plasma etching of materials not containing silicon
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