Berkeley, California
United States
5
2010-08-03
The entities that hold a legal rights for patent applications filed by inventor Singh Harmeet:
Harmeet Singh from Berkeley, US has applied for patents for these inventions. The list has both pending applications and granted patents:
In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control
#2 | 2010-02-18Tunable multi-zone gas injection system
#3 | 2007-04-17In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control
#4 | 2007-03-08Methods of removing metal contaminants from a component for a plasma processing apparatus
#5 | 2006-02-07In-situ cleaning of a polymer coated plasma processing chamber
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