Michael G. Chafin

City:

Country:

United States

Published Applications:

Last publication date:

2009-04-16

Top Assignees for applications by Michael G. Chafin

The entities that hold a legal rights for patent applications filed by inventor Chafin Michael G.:

Michael G. Chafin from , US has applied for patents for these inventions. The list has both pending applications and granted patents:

Time-based wafer de-chucking from an electrostatic chuck having separate RF BIAS and DC chucking electrodes

InventorID:

3923875 ⎘