United States
4
2009-06-25
The entities that hold a legal rights for patent applications filed by inventor Bera Kallol:
Kallol Bera from , US has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma reactor gas distribution plate having path splitting manifold side-by-side with showerhead
#2 | 2009-06-25Plasma reactor gas distribution plate with radially distributed path splitting manifold
#3 | 2009-06-25Plasma reactor gas distribution plate having a path splitting manifold immersed within a showerhead
#4 | 2009-06-25Gas distribution plate with annular plenum having a sloped ceiling for uniform distribution
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