Mountain View, California
United States
5
2011-10-25
The entities that hold a legal rights for patent applications filed by inventor Belyaev Alexander:
Alexander Belyaev from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for improving edge handling chuck aerodynamics
#2 | 2008-09-25Stabilizing a substrate using a vacuum preload air bearing chuck
#3 | 2008-01-24Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool
#4 | 2007-10-04Computer-implemented methods and systems for determining a configuration for a light scattering inspection system
#5 | 2007-04-12Methods and systems for inspection of a wafer
4100575 ⎘