Andreas Kirchner

City:

Lorch

Country:

Germany

Published Applications:

Last publication date:

2008-11-13

Top Assignees for applications by Andreas Kirchner

The entities that hold a legal rights for patent applications filed by inventor Kirchner Andreas:

Andreas Kirchner from Lorch, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Method for distortion correction in a microlithographic projection exposure apparatus

Method for distortion correction in a microlithographic projection exposure apparatus

InventorID:

4291234 ⎘