Mountain View, California
United States
60
2024-08-01
The entities that hold a legal rights for patent applications filed by inventor MERRY NIR:
NIR MERRY from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED FOOTPRINT
#2 | 2022-12-08SUBSTRATE PROCESSING SYSTEMS, APPARATUS, AND METHODS WITH FACTORY INTERFACE ENVIRONMENTAL CONTROLS
#3 | 2022-09-15FRONT-DUCTED EQUIPMENT FRONT END MODULES, SIDE STORAGE PODS, AND METHODS OF OPERATING THE SAME
#4 | 2022-06-23Semiconductor processing tool platform configuration with reduced footprint
#5 | 2022-03-17Side storage pods, equipment front end modules, and methods for operating EFEMs
#6 | 2022-03-17Mass flow control based on micro-electromechanical devices
#7 | 2022-03-17Micro-electromechanical device for use in a flow control apparatus
#8 | 2022-02-24Dual actuating tilting slit valve
#9 | 2021-12-23BATCH WAFER DEGAS CHAMBER AND INTEGRATION INTO FACTORY INTERFACE AND VACUUM-BASED MAINFRAME
#10 | 2021-05-20MULTI-FINGER ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND METHODS ADAPTED TO TRANSPORT MULTIPLE SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING
#11 | 2021-01-28Integrated system and method
#12 | 2020-04-30Side storage pods, equipment front end modules, and methods for operating EFEMs
#13 | 2020-04-30Front-ducted equipment front end modules, side storage pods, and methods of operating the same
#14 | 2020-04-30High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
#15 | 2020-04-30Side storage pods, equipment front end modules, and methods for operating the same
#16 | 2020-04-30Side storage pods, equipment front end modules, and methods for operating equipment front end modules
#17 | 2019-11-28Substrate processing systems, apparatus, and methods with factory interface environmental controls
#18 | 2019-11-28SUBSTRATE MANUFACTURING APPARATUS AND METHODS WITH FACTORY INTERFACE CHAMBER HEATING
#19 | 2019-11-21Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
#20 | 2019-11-21Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
#21 | 2019-07-11Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods
#22 | 2019-01-10SEMICONDUCTOR DEVICE MANUFACTURING PLATFORM WITH SINGLE AND TWINNED PROCESSING CHAMBERS
#23 | 2018-12-20Substrate processing systems, apparatus, and methods with factory interface environmental controls
#24 | 2016-11-24Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal
#25 | 2015-10-29Load lock door assembly, load lock apparatus, electronic device processing systems, and methods
#26 | 2015-08-06Damage isolation by shaped beam delivery in laser scribing process
#27 | 2015-05-28Process chamber apparatus, systems, and methods for controlling a gas flow pattern
#28 | 2015-03-19Heated substrate support with temperature profile control
#29 | 2015-02-19Rapid thermal processing chamber with micro-positioning system
#30 | 2015-02-12Substrate processing systems, apparatus, and methods with factory interface environmental controls
#31 | 2014-12-18Fast and continuous eddy-current metrology of a conductive film
#32 | 2014-09-18Semiconductor device manufacturing platform with single and twinned processing chambers
#33 | 2014-06-05Vibration-controlled substrate handling robots, systems, and methods
#34 | 2014-06-05Process chamber gas flow apparatus, systems, and methods
#35 | 2014-02-13Linked vacuum processing tools and methods of using the same
#36 | 2013-02-21Rapid thermal processing chamber with micro-positioning system
#37 | 2013-02-21Rapid thermal processing chamber with micro-positioning system
#38 | 2013-01-17Methods and apparatus for processing substrates using model-based control
#39 | 2012-12-20Damage isolation by shaped beam delivery in laser scribing process
#40 | 2012-11-22ROTATING SUBSTRATE SUPPORT AND METHODS OF USE
#41 | 2012-09-20Process equipment architecture
#42 | 2012-08-23SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER
#43 | 2012-07-19Use of infrared camera for real-time temperature monitoring and control
#44 | 2011-11-17Substrate processing chamber with off-center gas delivery funnel
#45 | 2011-02-24BATCH PROCESSING PLATFORM FOR ALD AND CVD
#46 | 2010-10-21SUBSTRATE COOL DOWN CONTROL
#47 | 2010-10-14Modification of magnetic properties of films using ion and neutral beam implantation
#48 | 2010-09-09ROTATING SUBSTRATE SUPPORT AND METHODS OF USE
#49 | 2010-06-03Rapid thermal processing chamber with micro-positioning system
#50 | 2010-05-13PROCESS EQUIPMENT ARCHITECTURE
#51 | 2010-05-06Use of infrared camera for real-time temperature monitoring and control
#52 | 2010-04-01Substrate processing chamber with off-center gas delivery funnel
#53 | 2010-02-25Vertical wafer buffering system
#54 | 2009-01-01Thermal Batch Reactor with Removable Susceptors
#55 | 2008-09-11MICROBATCH DEPOSITION CHAMBER WITH RADIANT HEATING
#56 | 2008-09-11Multiple substrate transfer robot
#57 | 2008-01-31Temperature uniformity measurements during rapid thermal processing
#58 | 2007-12-27Batch processing platform for ALD and CVD
#59 | 2007-03-15Batch deposition tool and compressed boat
#60 | 2006-12-14Rotating substrate support and methods of use
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