Eindhoven
Netherlands
3
2007-03-15
The entities that hold a legal rights for patent applications filed by inventor Koolen Armand Eugene Albert:
Armand Eugene Albert Koolen from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of determining an illumination profile and device manufacturing method
#2 | 2006-04-11Method for determining parameters for lithographic projection, a computer system and computer program therefor, a method of manufacturing a device and a device manufactured thereby
#3 | 2005-10-25Lithographic apparatus and device manufacturing method
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