Newark, California
United States
4
2007-06-26
The entities that hold a legal rights for patent applications filed by inventor Daugherty John:
John Daugherty from Newark, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods and apparatus for optimizing the delivery of a set of gases in a plasma processing system
#2 | 2006-03-30Corrosion resistant apparatus for control of a multi-zone nozzle in a plasma processing system
#3 | 2005-07-28Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing system
#4 | 2005-06-09Pump baffle and screen to improve etch uniformity
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