Eindhoven
Netherlands
3
2025-05-15
The entities that hold a legal rights for patent applications filed by inventor MARQUART Herman:
Herman MARQUART from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE HOLDER FOR USE IN LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
#2 | 2022-04-14Substrate holder for use in a lithographic apparatus and a device manufacturing method
#3 | 2022-04-14Method, substrate and system for estimating stress in a substrate
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