Aachen
Germany
10
2014-01-30
The entities that hold a legal rights for patent applications filed by inventor Baumann Peter:
Peter Baumann from Aachen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus and method for high-throughput chemical vapor deposition
#2 | 2009-03-26Process for depositing layers containing silicon and germanium
#3 | 2009-01-29Gas inlet element for a CVD reactor
#4 | 2009-01-15Gas distributor with pre-chambers arranged in planes
#5 | 2008-11-06Method for Depositing in Particular Metal Oxides by Means of Discontinuous Precursor Injection
#6 | 2008-04-24Apparatus and method for high-throughput chemical vapor deposition
#7 | 2007-12-20Method for self-limiting deposition of one or more monolayers
#8 | 2007-01-11Process for the self-limiting deposition of one or more monolayers
#9 | 2006-11-09Process and apparatus for depositing single-component or multi-component layers and layer sequences using discontinuous injection of liquid and dissolved starting substances via a multi-channel injection unit
#10 | 2005-05-05Device for depositing thin layers with a wireless detection of process parameters
631180 ⎘