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Patent application title:

Electrostatic doping-based all GNR tunnel field-effect transistor

Publication number:

-

Publication date:
Application number:

16/413,049

Filed date:

2019-05-15

✅ Patent granted

Patent number:

US 10,593,778 B1

Grant date:

2020-03-17

PCT filing:

-

PCT publication:

-

Examiner:

Eduardo A Rodela

Adjusted expiration:

2039-05-15

Smart Summary: An electrostatic doping-based graphene nanoribbon (GNR) tunneling field-effect transistor (TFET) has been developed with a tri-gate design. This device uses GNR as a pathway for electrical carriers, allowing it to switch on and off very quickly, with a speed of about 0.3 picoseconds. It achieves an impressive on/off current ratio of 10^14, making it much more efficient than traditional silicon-based transistors. The design includes two electrodes, extensions, metallic gate regions, and dielectric regions, all contributing to its compact size of less than 10 nanometers. This GNR-based transistor is also stable and easier to manufacture compared to other types, helping to meet the demands of advancing technology. 🚀 TL;DR

Abstract:

The present invention disclose an Electrostatic doping (ED)-based graphene nanoribbon (GNR) tunneling field-effect transistor (TFET) with tri-gate design. This device uses hydrogen-passivated GNR heterojunction as a carrier path way and functions as a power switch providing a switching speed of ˜0.3 ps−1 an ION/IOFF ratio as high as 1014 with the on-state current in the order of 103 μA/μm. This disclosed invention consists of two electrode, two electrode extensions, six metallic gate regions, and six dielectric regions.

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Classification:

  1. Electricity
  2. Basic electric elements

H01L29/66015 »  CPC main

Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; Multistep manufacturing processes therefor; Types of semiconductor device ; Multistep manufacturing processes therefor; Multistep manufacturing processes of devices having a semiconductor body comprising semiconducting carbon, e.g. diamond, diamond-like carbon, graphene

H01L29/66977 »  CPC further

Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; Multistep manufacturing processes therefor; Types of semiconductor device ; Multistep manufacturing processes therefor Quantum effect devices, e.g. using quantum reflection, diffraction or interference effects, i.e. Bragg- or Aharonov-Bohm effects

H01L29/66 IPC

Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; Multistep manufacturing processes therefor Types of semiconductor device ; Multistep manufacturing processes therefor

Description

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefits of U.S. Provisional Application No. 62/811,099, filed Feb. 27, 2019.

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT

This invention was made with government support under a grant No. N00014-151-2216 awarded by Office of Naval Research. The government has certain rights in the invention.

TECHNICAL FIELD

Field-Effect Transistors, applicable for power electronics and computer chips.

BACKGROUND OF THE INVENTION

The Moore's law suggests that the size of transistors would scale down exponentially so that we can benefit from the ever better performance of computers. However, the physical limit of Si-based transistors is approaching at which point the quantum tunneling occurs and the transistor would fail to switch between on and off states.

BRIEF SUMMARY OF THE INVENTION

The graphene nanoribbon (GNR) is a promising candidate to solve this challenge. We propose the Electrostatic Doping Based All GNR Tunnel Field Effect Transistor (TFET) which provides fast switching speed (˜0.3 ps−1) and very high on/off state current ratio (˜1014) with short channel length (<10 nm) and much smaller device size compared to the widely used Si-based FinFET and MOSFET. With the proposed device structure, the requirement of Moore's law can be met and the transistor size can be scaled down continuously.

Compared with other candidates, the use of GNR ensures that our device is much chemically and mechanically stable and does not require an additional encapsulation outside the materials. Therefore it has a simpler structure and can be more easily fabricated.

BRIEF DESCRIPTION OF THE DRAWING

Schematic view of electrostatic doping based GNR TFET. FIG. 1 top view. FIG. 2 side view.

1. Electrode made of 11-dimmer Armchair GNR.

2. Electrode extension made of 11-dimmer Armchair GNR.

3. Metallic gate region (white) made of copper, thickness 0.5 nm.

4. Dielectric region (pink) made of diamond, thickness 0.8 nm.

5. 9-dimmer Armchair GNR.

The whole GNR TFET device is divided into three regions by two vertical dotted lines, into S, the source region, C, the channel region, and D, the Drain region. The GNR TFET device has a width W=4.7 nm, electrode & electrode extension length L equals 2.575 nm, and metallic and dielectric region thickness T equals 1.3 nm. The gate-to-gate distance d equals 0.6 nm.

DETAILED DESCRIPTION OF THE INVENTION

The ED-based GNR-TFET consists of five regions: a finite intrinsic channel where carriers are transported through, n-type doped source and p-type doped drain, two semi-infinite electrodes and their extensions, metallic gates and dielectric insulator between the gates and the GNR. A tri-gate design is employed in which the source/drain side gates are provided with independent built-in voltages to electrostatically dope the source/drain, while the mid-gate is provided with varying voltages which controls the opening and closing of the channel conduction. In order to strengthen the gate electrostatic control over the channel, we adopted double-side gates to sandwich the GNR. The thickness of the dielectric region is of ˜1 nm with the dielectric constant of 5.7. The channel and electrodes are all made of GNR, avoiding possible formation of Schottky barrier at the channel and electrode interface, which would increase the parasitic contact resistance and deteriorate the device performance. Instead of having AGNR of uniform width throughout the whole regions, we employed a semimetal-semiconductor-semimetal sandwiched structure, which is required for designing transistor devices. Concretely, the source, channel, and drain regions are made of semi-conductive 3p family AGNR, while the electrodes and electrode extensions are made of nearly metallic 3p+2 family AGNR. The sub-2 nm wide edge roughness free Armchair GNR (AGNR) is used in our simulations. In order to minimize the geometric difference at the (3p+2)−(3p)−(3p+2) AGNR hetero-junction interface so that ribbon-width-mismatch effect on device performance is negligible, the same value of p was used for all three regions. Moreover, Hydrogen passivation is provided for end atoms on both sides of the GNR which is the most stable thermal configuration for the carbon atoms on the edge.

Claims

The invention claimed is:

1. An energy-efficient transistor model for power switch application comprising the following:

a carrier path made of hydrogen-passivated armchair Graphene Nano-ribbon (GNR) heterojunction, which can be divided into three sections:

a channel made of 3p dimmer armchair GNR (p is integer number greater than 3), a source and a drain made of same type 3p+2 dimmer armchair GNR, the value of p takes same value for channel, source and drain,

two electrodes, made of the same material with the source and drain, connected to source and drain at the two ends, respectively,

two doping gate at left/right sides of the device, sandwiching the source and drain part of the GNR path,

one control gate in the middle of the device, sandwiching the channel part of the GNR path,

the gates are made of two layers:

copper in the top layer and diamond in the bottom layer,

the doping gates at source and drain are applied with opposite voltages and the control gate is applied with a voltage range between −1.5V to +1.5V, where the device is functioning, the transistor can function as a power switch with a large on/off current ratio of 10{circumflex over ( )}15.

Resources

Images & Drawings included:

Fig. 01 - Electrostatic doping-based all GNR tunnel field-effect transistor
Fig. 01
Fig. 02 - Electrostatic doping-based all GNR tunnel field-effect transistor
Fig. 02

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