MACHINING DEVICE, BLADE, ARTICLE MANUFACTURING METHOD, CONTROL METHOD, AND RECORDING MEDIUM

Description

BACKGROUND

Field of the Technology

The present disclosure relates to a machining device that performs machining of, for example, a resin substrate, a glass substrate, or a silicon (Si) wafer.

Description of the Related Art

For example, there is known a machining device that performs machining such as cutting, dicing, and groove formation by bringing a blade, which is an edged tool, into contact with a workpiece such as a resin substrate, a glass substrate, and a silicon (Si) wafer while rotating. As a machining position is moved (scanned) by moving one or both of the blade and the workpiece while rotating the blade, the workpiece can be cut into a desired shape, or a groove having a desired shape can be formed in the workpiece.

JP 2008-126369 A describes that a recessed portion that does not penetrate through an abrasive grain layer is provided on an outer peripheral side of the abrasive grain layer of a blade so as to be inclined with respect to a radial direction in order to prevent formation of burrs in a metal material that is a workpiece.

JP 2016-43470 A describes that grinding water is supplied to a ground portion to cool the ground portion, thereby preventing formation of chippings and burrs. In JP 2016-43470 A, a slit penetrating through front and back surfaces of a grindstone is provided in a grinding blade, and grinding water is supplied to a ground portion through the slit.

It is desirable to be able to shorten a machining time while suppressing formation of chippings and burrs and wear and breakage of the blade. For this purpose, it is effective to supply a sufficient amount of fluid to a portion where the blade is grinding the workpiece.

However, JP 2008-126369 A describes a shape of the abrasive grain layer for suppressing the formation of burrs, and does not describe a device capable of supplying a fluid to a portion where the blade is grinding the workpiece.

The device described in JP 2016-43470 A supplies the grinding water to the ground portion through the slit penetrating through the front and back surfaces of the grindstone. However, in this configuration, in a case where the blade is rotated at a high speed, an airflow accompanying the blade is generated around the blade. Most of the grinding water to be injected into the slit from a fluid supply path via a blade surface is blown off by the airflow on the blade surface before being injected into the slit. For this reason, a sufficient amount of grinding water cannot be injected into the slit, and only a small amount of grinding water reaches the ground portion through the slit.

SUMMARY

Therefore, there has been a demand for a technology capable of supplying a sufficient amount of fluid to a place where a blade is machining a workpiece.

According to a first aspect of the present disclosure, a machining device includes a blade configured to grind a workpiece, a rotation mechanism configured to be rotatable about a rotation axis, and a holding member. The blade is mounted on the rotation mechanism in a state in which a part of the blade is partially sandwiched by the holding member. The blade is provided with a plurality of recessed portions having a depth smaller than a thickness of the blade. Each of the plurality of recessed portions extends from a rotation axis side to an outer peripheral side across the part sandwiched by the holding member. A fluid is supplied from an outside to a space at least partially surrounded by the holding member on a side closer to the rotation axis than a position where the part of the blade is sandwiched. The fluid supplied to the space is injected into each of the plurality of recessed portions on a side closer to the rotation axis than the part of the blade and is supplied to the outer peripheral side of the blade via the plurality of recessed portions.

According to a second aspect of the present disclosure, a machining device includes a blade configured to grind a workpiece, a rotation mechanism configured to be rotatable about a rotation axis, and a holding member, and the blade is mounted on the rotation mechanism in a state in which a part of the blade is partially sandwiched by the holding member. The blade is provided with a plurality of recessed portions having a depth smaller than a thickness of the blade. Each of the plurality of recessed portions extends from a rotation axis side to an outer peripheral side across the part sandwiched by the holding member. A control method of the machining device includes supplying, controlled by a processing unit, a fluid from an outside to a space at least partially surrounded by the holding member on a side closer to the rotation axis than a position where the part of the blade is sandwiched, and injecting, controlled by the processing unit, the fluid supplied to the space into each of the plurality of recessed portions on a side closer to the rotation axis than the part of the blade and supplying the fluid to the outer peripheral side of the blade via the plurality of recessed portions.

Features of the present disclosure will become apparent from the following description of embodiments with reference to the attached drawings. The following description of embodiments is described by way of example.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic perspective view illustrating an overall configuration of a machining device according to an embodiment.

FIG. 2 is a schematic perspective view illustrating a situation in which a rotating blade cuts a workpiece in an X direction.

FIG. 3 is a schematic exploded view illustrating an assembly mechanism for assembling a plate-shaped blade to a device in an exploded manner.

FIG. 4 is a schematic cross-sectional view illustrating a cross section of the blade and a peripheral portion thereof taken along a rotation axis C of the blade.

FIG. 5A is a plan view of the blade when viewed in a direction of the rotation axis C.

FIG. 5B is a partial cross-sectional view of the blade taken along line A-A′ of FIG. 5A.

FIG. 6 is an enlarged partial cross-sectional view of the vicinity of a place where the blade is machining the workpiece.

FIG. 7 is an enlarged partial cross-sectional view of the vicinity of the place where the blade is machining the workpiece.

FIG. 8 is an enlarged partial cross-sectional view of the vicinity of a place where a workpiece is machined using a blade according to a first modified example.

FIG. 9 is a view illustrating an example in which a blade has a shape satisfying a relationship of R1<R2 and R5=R6 in a second modified example.

FIG. 10 is a view illustrating an example in which the blade has a shape satisfying a relationship of R1=R2 and R5<R6 in the second modified example.

FIG. 11 is a view illustrating an example in which the blade has a shape satisfying a relationship of R1=R2 and R5=R6 in the second modified example.

FIG. 12A is a plan view of a blade according to a third modified example when viewed in a direction of a rotation axis C.

FIG. 12B is a partial cross-sectional view of the blade taken along line B-B′ of FIG. 12A.

FIG. 13 is a plan view of a blade according to a fourth modified example when viewed in a direction of a rotation axis C.

DESCRIPTION OF THE EMBODIMENTS

A machining device and the like according to an embodiment of the present disclosure will be described with reference to the drawings. The embodiments described below are merely examples, and for example, detailed configurations can be appropriately changed and implemented by those skilled in the art without departing from the gist of the present disclosure.

In the drawings referred to in the following embodiments and description, elements denoted by the same reference signs have similar functions unless otherwise specified. In the drawings, in a case where a plurality of the same elements are arranged, reference signs and a description thereof may be omitted.

In addition, the drawings may be schematic for convenience of illustration and description, and thus, the shape, size, arrangement, and the like of elements in the drawings may not strictly match those of actual ones. In addition, “XX or more and YY or less” or “XX to YY” representing a numerical range means a numerical range including end points XX (lower limit) and YY (upper limit) unless otherwise specified. When numerical ranges are described in stages, the upper limit and the lower limit of each numerical range can be arbitrarily combined.

In the following description, for example, a +X direction indicates the same direction as that indicated by an X-axis arrow in the illustrated orthogonal coordinate system, and a −X direction indicates a direction 180 degrees opposite to that indicated by the X-axis arrow in the illustrated orthogonal coordinate system. In addition, a direction simply referred to as an X direction is a direction parallel to an X axis regardless of a difference from the direction indicated by the illustrated X-axis arrow. The same applies to directions other than the X direction. Further, unless otherwise specified, in an XYZ coordinate system which is an orthogonal coordinate system, an XY plane is a horizontal plane, and a-Z-axis direction is a vertical direction (gravity direction).

Embodiment

Overall Configuration

FIG. 1 is a schematic perspective view illustrating an overall configuration of a machining device (cutting device) according to an embodiment. The machining device includes a blade 1 that cuts or grinds a workpiece 17 set on a chuck table 10, and the blade 1 is rotationally driven about a spindle 15. The spindle 15 is a rotation mechanism rotatable about a rotation axis, is supported by, for example, an air bearing or a hydrostatic oil bearing, and is driven by a direct drive motor or the like. The chuck table 10 is a rotation shaft with an indexing function, and includes a holding mechanism (for example, a suction mechanism) for holding the workpiece 17.

By changing relative positions of the chuck table 10 holding the workpiece 17 and the blade 1 in three directions of XYZ, cutting or grinding of the workpiece into an arbitrary shape can be performed. When changing the relative positions, for example, the position of the blade 1 may be fixed and the chuck table 10 may be movable in three directions of XYZ, or conversely, the position of the chuck table 10 may be fixed and the blade 1 may be movable in three directions of XYZ. Alternatively, the chuck table 10 may be movable in at least one direction among XYZ, and the blade 1 may be movable in the remaining directions.

In the illustrated machining device, the chuck table 10 is movable in the X direction, and the blade 1 is movable in the Y direction and the Z direction. That is, an X-axis stage 8 and a Y-axis stage 11 are disposed on a base 28 so as to be orthogonal to each other. The X-axis stage 8 supports an X-axis table 9 movable in the X direction, and the chuck table 10 is mounted on the X-axis table 9. The Y-axis stage 11 supports a Y-axis table 12 movable in the Y direction, and a Z-axis stage 13 is disposed on the Y-axis table 12. A Z-axis table 14 movable in the Z direction is disposed on the Z-axis stage 13. The spindle 15 for rotationally driving the blade 1 is disposed on the Z-axis table 14. Each of the X-axis table 9, the Y-axis table 12, and the Z-axis table 14 is guided on the stage by an air bearing or a linear guide, and is driven by a linear motor or a ball screw.

In the present embodiment, in order to obtain effects such as reducing a friction between the blade and the workpiece and cooling the blade and the workpiece, a fluid is supplied from a blade side to a place where the workpiece is being ground. In the following description, this fluid is referred to as a machining fluid for convenience. For example, water is used as the machining fluid. However, another fluid such as a flame-retardant oil may also be used as the machining fluid.

As for a machining fluid supply mechanism described below, a fluid supply nozzle 7 for supplying the machining fluid to the blade 1 is disposed on a distal end side of the spindle 15 as illustrated in FIG. 1. In addition, a blade cover 16 for preventing the machining fluid from scattering from the blade 1 to the surrounding area is disposed around the blade 1. The blade cover 16 can function not only to prevent scattering of the machining fluid but also to prevent contact of an operator and to function as a safety cover in a case where the blade is broken.

Machining Fluid Supply Mechanism

FIG. 2 is a schematic perspective view illustrating a situation in which the rotating blade 1 cuts the workpiece 17 in the X direction. FIG. 3 is a schematic exploded view illustrating an assembly mechanism disassembled into components in order to describe a mechanism for assembling the plate-shaped blade 1 to the machining device. FIG. 4 is a schematic cross-sectional view illustrating a cross section of the blade 1 assembled to the machining device and a peripheral portion thereof, taken in parallel with a ZY plane along a rotation axis C of the blade 1.

A first holder fixing jig 4, which is a component of the assembly mechanism, is installed at a distal end of a rotor portion of the spindle 15 (FIG. 1). As illustrated in FIG. 3, the first holder fixing jig 4 includes a protruding portion 30, an inner surface of a first holder 2 is guided by the protruding portion 30, and an end surface of the first holder 2 on a spindle side comes into contact with the first holder fixing jig 4. The first holder 2 is fixed to the first holder fixing jig 4 by tightening a first holder fixing screw 5.

The first holder 2 includes a blade guide protruding portion 31, and an inner surface of the blade 1 having a donut shape (annular shape) is guided by the blade guide protruding portion 31, so that the blade 1 is attached to the first holder 2.

The first holder 2 further includes a second holder guide protruding portion 32, an inner surface of the second holder 3 is guided by the second holder guide protruding portion 32, and the second holder 3 is assembled to the first holder 2.

A male screw is provided on an outer surface of the second holder guide protruding portion 32 on a distal end side, and a female screw that can be screwed with the male screw is provided on an inner surface of a second holder fixing member 6. The second holder 3 and the first holder 2 are fastened together while clamping the blade 1 therebetween by screwing and tightening the male screw of the second holder guide protruding portion 32 and the female screw of the second holder fixing member 6. In FIG. 4, a portion of the first holder 2 that comes into contact with the blade 1 is illustrated as a contact portion 33, and a portion of the second holder 3 that comes into contact with the blade 1 is illustrated as a contact portion 34.

An opening penetrating through front and back sides of the second holder fixing member 6 is provided at a position where the rotation axis C (FIG. 4) of the blade 1 passes in the second holder fixing member 6, and the fluid supply nozzle 7, which is an external fluid supply unit, is connected to the opening. The fluid is supplied to the fluid supply nozzle 7 from a fluid tank (not illustrated).

In FIG. 4, a flow F of the machining fluid supplied from the fluid supply nozzle 7 is schematically indicated by an arrow. The machining fluid is injected from the fluid supply nozzle 7 into the assembly mechanism through the opening of the second holder fixing member 6. That is, the machining fluid is injected into a flow path defined by the second holder fixing member 6, the first holder fixing screw 5, the first holder 2, and the second holder 3. In other words, the fluid is supplied from the fluid supply nozzle 7 to a space at least partially surrounded by the first holder 2 (first holding member) and the second holder 3 (second holding member). In the present embodiment, an example in which a holding member for holding the blade 1 is divided into two members is described, but one member may be used or two or more members may be used as long as the holding member can hold the blade 1.

Since the assembly mechanism rotates at the time of machining, a centrifugal force acts on the machining fluid, and the machining fluid flows in a direction away from the rotation axis C in the space, that is, toward the blade 1. As described below, the blade 1 is formed with a recessed portion serving as the flow path of the machining fluid, and the machining fluid is supplied to a place (position) where the blade 1 is machining the workpiece 17 via the recessed portion.

Here, the blade 1 will be described. FIG. 5A is a plan view of the blade 1 when viewed in a direction of the rotation axis C. FIG. 5B is a partial cross-sectional view of the blade 1 taken along line A-A′ of FIG. 5A.

Hereinafter, when describing each member, a side close to the rotation axis C (rotation axis side) may be referred to as an inner side or a center side, and a side far from the rotation axis C may be referred to as an outer side or an outer peripheral side. In addition, the direction of the rotation axis C may be referred to as an axial direction, and a direction of the radius of a circle centered on the rotation axis C may be referred to as a radial direction. A distance from the rotation axis C to each portion in the radial direction may be referred to as a radial distance.

First, a shape of the plate-shaped blade 1 in plan view is a donut shape (annular shape) as illustrated in FIG. 5A, in which an inner side surface is along a circle whose radial distance is R1, and an outer side surface is along a circle whose radial distance is R6. For the blade 1, a material such as a resin or Ni formed by electroforming can be used, and for example, a plate thickness can be 0.1 mm, and an outer radius can be R6=30 mm.

A plurality of recessed portions 29 are provided on each of a front surface and a back surface of the blade 1. In FIG. 5A, the recessed portions 29 provided on a front surface side are indicated by solid lines, and the recessed portions 29 provided on a back surface side are indicated by dotted lines.

Each recessed portion 29 is a groove having a depth smaller than the plate thickness of the blade 1 and linearly extending in the radial direction. The plurality of recessed portions 29 are radially arranged at equal angular intervals around the rotation axis C. In the illustrated example, eight groove-shaped recessed portions 29 are disposed on each of the front surface side and the back surface side, and the recessed portions 29 on the front surface side and the recessed portions 29 on the back surface side are alternately arranged at an angular interval of 22.5 degrees when viewed in projection in the axial direction.

As illustrated in FIG. 5B, a width of the recessed portion 29 (a width in a direction orthogonal to the radial direction) is indicated by GW, and the depth of the recessed portion 29 is indicated by GD. For example, GW is preferably set within a range of 0.5 mm to 1.0 mm, and GD is preferably set within a range of 5 μm to 50 μm.

The number and positions of the recessed portions 29 and GD and GW of each of the recessed portions 29 can be appropriately set in view of securing an amount of the machining fluid supplied to a machined portion, ensuring conductance when the machining fluid flows in the recessed portion 29, machining accuracy in forming the recessed portion 29, securing a mechanical strength of the blade 1, and the like.

FIGS. 6 and 7 are enlarged partial cross-sectional views of a portion surrounded by a dotted circle in FIG. 4, that is, the vicinity of the place where the blade 1 is machining the workpiece 17. FIG. 6 illustrates a timing at which the recessed portion 29 disposed on the front surface side of the blade 1 is positioned at the place where the blade 1 is machining the workpiece 17. FIG. 7 illustrates a timing at which the recessed portion 29 disposed on the back surface side of the blade 1 is positioned at the place where the blade 1 is machining the workpiece 17.

As illustrated in FIG. 4, the machining fluid flows toward the blade 1 through the flow path defined by the second holder fixing member 6, the first holder fixing screw 5, the first holder 2, and the second holder 3.

Here, as illustrated in FIGS. 4, 6, and 7, the recessed portion 29 of the blade 1 is a groove formed in the radial direction within a radial distance range from R2 to R5. The blade 1 is sandwiched by the contact portion 33 of the first holder 2 and the contact portion 34 of the second holder 3 within a radial distance range from R3 to R4, and R2<R3 and R4<R5. That is, each of the plurality of recessed portions 29 extends from a rotation axis C side to the outer peripheral side across a part sandwiched between the first holder 2 (first holding member) and the second holder 3 (second holding member). Therefore, as illustrated in FIGS. 6 and 7, the flow F of the machining fluid reaching the place where the blade 1 is machining the workpiece 17 from the space surrounded by the first holder 2, the second holder 3, and the like via the recessed portion 29 is formed. For example, R3−R2=1.0 mm.

At the time of machining, an airflow accompanying the rotating blade 1 or the like can be generated in a space AFS in the vicinity of the blade 1. However, in the present embodiment, since the injection of the machining fluid into the recessed portion 29 is performed at a position within a radial distance range from R2 to R3, that is, in the space surrounded by the first holder 2, the second holder 3, and the like, the injection is not affected by the airflow. Therefore, the machining fluid can be extremely efficiently injected into the recessed portion 29. In addition, since the injected machining fluid flows not along a main surface of the blade 1 but in the recessed portion 29, the machining fluid is hardly affected by the airflow even at a position facing the space AFS, and an amount by which the machining fluid is blown off is small. Therefore, a sufficient amount of machining fluid can be supplied to the place (position) where the blade 1 is machining the workpiece 17.

In the illustrated example, since the recessed portion 29 formed within the radial distance range from R2 to R5 extends in a wider range than a thickness of the workpiece 17, the machining fluid can be supplied to the entire region of the workpiece in a thickness direction at the time of cutting. In addition, since an edge at a distal end of the recessed portion 29 in the radial direction is positioned below a lower surface of the workpiece 17, the edge does not collide with the workpiece 17, and thus, it is possible to prevent chippings from being formed in the workpiece 17 due to an impact of a collision and to prevent the distal end of the recessed portion 29 from being easily worn. For example, R5 is preferably set to be larger than a radial distance of the lower surface of the workpiece 17 by 100 μm, and R6 is preferably set to be larger than the radial distance of the lower surface of the workpiece 17 by 150 μm or more.

As described above, according to the present embodiment, it is possible to supply a sufficient amount of fluid to the place (position) where the blade is machining the workpiece, and it is possible to shorten a machining time while suppressing wear and breakage of the blade.

The embodiment of the present disclosure is not limited to the examples described above. Hereinafter, modified examples of the embodiment will be described. A description of matters common to the above-described embodiment will be simplified or omitted.

First Modified Example

In the above-described embodiment, as illustrated in FIG. 5A, the recessed portions 29 are arranged on the front surface and the back surface of the blade 1 so as not to overlap each other in plan view. However, the embodiment of the present disclosure is not limited thereto, and recessed portions 29 may be arranged on both of a front surface and a back surface of a blade 1 so as to overlap each other in plan view when viewed in projection.

FIG. 8 is an enlarged partial cross-sectional view of the vicinity of a place where a workpiece 17 is being machined using the blade 1 configured as described above. In a case where the blade having such a configuration is used within an allowable range of mechanical strength, a fluid can be supplied from both of the front surface and the back surface to a place where machining is being performed. Therefore, there is a possibility that a machining time can be shortened by further increasing a rotational speed and a scanning speed.

Second Modified Example

In the above-described embodiment, as illustrated in FIG. 5A, in a case where a radial distance of the inner side surface of the donut shape of the blade 1 is R1, a radial distance of the outer side surface is R6, and the recessed portion 29 extends in the radial direction within the radial direction range from R2 to R5, R1<R2 and R5<R6. However, the embodiment of the present disclosure is not limited thereto, and a recessed portion 29 may be formed such that R1=R2 and/or R5=R6.

In a case where R1=R2, there is a possibility that a machining fluid can be efficiently injected into the recessed portion 29 in a space surrounded by a first holder 2, a second holder 3, and the like. In a case where R5=R6, there is a possibility that the machining fluid injected into the recessed portion 29 can be efficiently distributed to the vicinity of a place where the blade is machining a workpiece. In addition, since an edge does not exist at an end portion of the recessed portion 29, the edge does not collide with the workpiece 17. Therefore, it is possible to prevent chippings from being formed in the workpiece 17 due to an impact of a collision and to prevent a distal end of the recessed portion 29 from being easily worn.

FIGS. 9 to 11 are plan views of the blade 1 according to such a modified example when viewed in the direction of the rotation axis C. FIG. 9 illustrates an example in which the blade 1 has a shape satisfying a relationship of R1<R2 and R5=R6. FIG. 10 illustrates an example in which the blade 1 has a shape satisfying a relationship of R1=R2 and R5<R6. FIG. 11 illustrates an example in which a relationship of R1=R2 and R5=R6 is satisfied, and the recessed portion 29 extends from an inner periphery to an outer periphery of the annular blade 1.

Third Modified Example

In the above-described embodiment, as illustrated in FIGS. 5A and 5B, the width GW of the recessed portion 29 in the direction orthogonal to the radial direction is uniform in the radial direction. As illustrated in FIGS. 5B and 6, the depth GD of the recessed portion 29 is uniform in the radial direction. However, the embodiment of the present disclosure is not limited thereto.

FIG. 12A is a plan view of a blade 1 according to a third modified example when viewed in a direction of a rotation axis C. FIG. 12B is a partial cross-sectional view of the blade 1 taken along line B-B′ of FIG. 12A.

As illustrated in FIG. 12A, in the blade 1 according to the third modified example, a width of a recessed portion 29 in the direction orthogonal to the radial direction increases outward in the radial direction. As illustrated in FIG. 12B, a depth of the recessed portion 29 increases inward in the radial direction.

In a case where the depth of the recessed portion 29 is increased inward in the radial direction, there is a possibility that a machining fluid can be efficiently injected into the recessed portion 29 in a space surrounded by a first holder 2, a second holder 3, and the like. In addition, in a case where the width of the recessed portion 29 is increased outward in the radial direction, there is a possibility that the machining fluid can be more uniformly supplied along an outer periphery of the blade 1.

Fourth Modified Example

In the above-described embodiment, as illustrated in FIG. 5B, each of the plurality of recessed portions 29 is a groove linearly extending in the radial direction, and an extension line of the recessed portion 29 intersects with the rotation axis C. However, the embodiment of the present disclosure is not limited to this.

FIG. 13 is a plan view of a blade 1 according to a fourth modified example when viewed in a direction of a rotation axis C. In the fourth modified example, each of a plurality of recessed portions 29 is formed as a groove extending along a straight line having an inclination angle θ (0°<θ<90°) with respect to the radial direction. In the example illustrated in FIG. 13, each of the recessed portions 29 is a linear groove. However, each of the recessed portions 29 may also be a curved groove in which θ varies in a range of 0°<θ<90° depending on a position.

As described with reference to FIG. 6, there is a space AFS in which an airflow accompanying the rotating blade 1 can be generated in a radial distance range larger than R4. In order to prevent the airflow from disturbing a flow of a machining fluid toward an outer peripheral side of the blade 1 in the recessed portion 29, a portion of the recessed portion 29, which is positioned farther outward in the radial direction (farther from the rotation axis C), is positioned further on a side opposite to a rotation direction RD. As described above, the extension lines of at least some of the plurality of recessed portions 29 do not have to intersect with the rotation axis C.

Modified Embodiment

The present disclosure is not limited to the embodiment and modified examples described above, and many modifications can be made within the technical idea of the present disclosure. For example, all or some of the embodiment and modified examples described above may be combined and implemented.

Although a plate-like member having a donut shape (annular shape) in plan view along a rotation axis has been exemplified as an example of the blade, the blade may be, for example, a disk as long as the blade has a recessed portion (groove) recessed from a main surface and serving as a flow path through which the machining fluid flows to an outer peripheral side.

The blade is a plate-shaped member having two main surfaces, but the plurality of recessed portions only need to be provided in at least one of the two main surfaces.

The recessed portions having different shapes described in the embodiment or modified examples may be arbitrarily combined and provided in one blade.

The blade itself that has the plurality of recessed portions and can be mounted on the machining device described as the embodiment is also included in the embodiment of the present disclosure.

An article manufacturing method of manufacturing an article by machining a workpiece using the machining device described as the embodiment is also included in the embodiment of the present disclosure.

According to the present disclosure, it is possible to provide a technology capable of supplying a sufficient amount of fluid to a place where a blade is machining a workpiece.

Other Embodiments

Embodiment(s) of the present disclosure can also be realized by a computer of a system or apparatus that reads out and executes computer executable instructions (e.g., one or more programs) recorded on a storage medium (which may also be referred to more fully as a ‘non-transitory computer-readable storage medium’) to perform the functions of one or more of the above-described embodiment(s) and/or that includes one or more circuits (e.g., application specific integrated circuit (ASIC)) for performing the functions of one or more of the above-described embodiment(s), and by a method performed by the computer of the system or apparatus by, for example, reading out and executing the computer executable instructions from the storage medium to perform the functions of one or more of the above-described embodiment(s) and/or controlling the one or more circuits to perform the functions of one or more of the above-described embodiment(s). The computer may comprise one or more processors (e.g., central processing unit (CPU), micro processing unit (MPU)) and may include a network of separate computers or separate processors to read out and execute the computer executable instructions. The computer executable instructions may be provided to the computer, for example, from a network or the storage medium. The storage medium may include, for example, one or more of a hard disk, a random-access memory (RAM), a read only memory (ROM), a storage of distributed computing systems, an optical disk (such as a compact disc (CD), digital versatile disc (DVD), or Blu-ray Disc (BD)™), a flash memory device, a memory card, and the like.

While the present disclosure has been described with reference to embodiments, it is to be understood that the present disclosure is not limited to the disclosed embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.

This application claims the benefit of Japanese Patent Application No. 2024-198296, filed Nov. 13, 2024, which is hereby incorporated by reference herein in its entirety.