SEALING ELEMENT PACKAGING STRUCTURE

Description

FIELD OF THE INVENTION

The present invention relates to the packaging of a sealing element, and more particularly, to a sealing element packaging structure with good cushioning effect and better structural strength.

BACKGROUND OF THE INVENTION

In order to cooperate with the wafer manufacturing process, semiconductor equipment is designed to be resistant to strong corrosion and to be operated in an environment that maintains a certain level of temperature, humidity, and air cleanliness to meet the requirements of wafer production. The sealing elements used for the parts of the semiconductor equipment are made of rubber with high chemical stability and good mechanical properties, such as fluoroelastomer (FKM) or perfluoroelastomer (FFKM). This rubber material is unaffected by all fluids, including aliphatics, aromatics, esters, ethers, ketones, oils, lubricants, and most acids. Although this rubber material has high performance, its high price makes it necessary to protect it from contamination or wear during transportation and replacement. In general, the sealing element is sealed in an inner packaging bag having a buffer layer and then packed in an outer carton for transportation. In use, the maintenance personnel removes the outer carton before entering the clean room and takes the sealing element in the inner packaging bag to the clean room. For maintenance, the maintenance personnel uses scissors to cut and open the inner packaging bag to take out the sealing element.

However, the sealing element cannot be held in place and supported by the outer carton and the inner packaging having the buffer layer. Although the inner packaging bag has the buffer layer, it cannot withstand the impact of external force or dropping from a height, resulting in damage to the sealing element. Besides, the sealing element cannot be positioned in the inner packaging bag, and the sealing element is easily displaced and deformed during transportation. When the sealing element is to be taken out for use, it is necessary to use scissors to cut and open the inner packaging bag. The operation is inconvenient. When the sealing element is to be taken out, slight carelessness may cause the sealing element to rub against the inner packaging bag, resulting in scratches or even deformation, which will affect the airtightness upon installation. The sealing element is made according to the shape of the sealing part of the semiconductor equipment. In addition to a circular shape, the sealing element may be in an irregular ring shape. The inner packaging bag does not fit the irregular ring-shaped sealing element, which may cause partial bending and deformation of the sealing element. If the sealing element is large in size, it will be placed in the inner packaging bag in a coiled manner. Due to the lack of a retaining structure in the inner packaging bag, the sealing element cannot be held in place, making it prone to deformation under external force. As a result, the sealing element cannot fit the mounting part of the semiconductor equipment to affect the airtightness upon installation.

SUMMARY OF THE INVENTION

The primary object of the present invention is to provide a sealing element packaging structure, comprising a lower housing and an upper housing. The upper housing can be nested on the lower housing. The flanges of the upper housing and the lower housing have notches that are offset, so that the upper housing and the lower housing can be separated from each other through the notches without the use of tools. The depth of an upper annular groove of the upper housing is less than the depth of a lower annular groove of the lower housing, so that the upper housing can be nested on the lower housing to form an accommodating space for accommodating and confining a sealing element, and an upper support portion of the upper housing overlaps a lower support portion of the lower housing to improve the strength and tightness of the packaging structure, achieving a certain degree of structural strength and protection for the sealing element. An upper buffer area of the upper housing overlaps a lower buffer area of the lower housing, having a good cushioning effect and effectively protecting the sealing element from deformation due to impact. The notches of the flanges of the upper housing and the lower housing are offset so that the upper housing and the lower housing can be easily separated from each other for the sealing element to be taken out.

In order to achieve the foregoing object, the present invention provides a sealing element packaging structure, comprising a lower housing and an upper housing.

The lower housing is integrally formed from a first plate. A periphery of the first plate is bent downward to form a lower annular wall and then transversely extends outward to form a lower flange. The first plate is recessed downward within an area enclosed by the lower annular wall to form a lower annular groove. The lower annular groove has a side wall. An area connected between the side wall of the lower annular groove and the lower annular wall is defined as a lower buffer area. An area enclosed by the lower annular groove is defined as a lower support area. At least one lower support portion is formed in the lower support area.

The upper housing is integrally formed from a second plate. A periphery of the second plate is bent downward to form an upper annular wall and then transversely extends outward to form an upper flange. The second plate is recessed downward within an area enclosed by the upper annular wall to form an upper annular groove. The upper annular groove has a side wall. An area connected between the side wall of the upper annular groove and the upper annular wall is defined as an upper buffer area. An area enclosed by the upper annular groove is defined as an upper support area. At least one upper support portion is formed in the upper support area.

When the upper housing is nested on the lower housing, the upper flange overlaps the lower flange, the upper annular groove has a depth less than that of the lower annular groove, an accommodating space for accommodating a sealing element is formed between a bottom surface of the upper annular groove and a bottom surface of the lower annular groove, and the upper support portion is nested on and attached to the lower support portion, thereby enhancing structural strength of the upper support area and the lower support area.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an exploded view according to a first embodiment of the present invention;

FIG. 2 is a perspective view according to the first embodiment of the present invention;

FIG. 3 is a partial sectional schematic view according to the first embodiment of the present invention;

FIG. 4 is an exploded view according to a second embodiment of the present invention;

FIG. 5 is a perspective view according to the second embodiment of the present invention;

FIG. 6 is an exploded view according to a third embodiment of the present invention; and

FIG. 7 is a perspective view according to the third embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

As shown in FIGS. 1 to 3, a sealing element packaging structure provided by a first embodiment of the present invention is used for packaging an annular sealing element. The sealing element packaging structure comprises a lower housing 100 and an upper housing 200 that can be nested on the lower housing 100.

The lower housing 100 is integrally formed from a first plate 1. Preferably, the first plate 1 is made of polyethylene terephthalate (PET). The periphery of the first plate 1 is bent downward to form a lower annular wall 11 and then transversely extends outward to form a lower flange 12. The first plate 1 is recessed downward within the area enclosed by the lower annular wall 11 to form a lower annular groove 13. The lower annular groove 13 is in the shape of a circular ring and is configured for holding a circular sealing element 300. In this embodiment, the sealing element 300 has a circular metal body. A rubber ring is disposed around the bottom surface of the metal body and forms a sealing ring extending toward the center of the metal body, so that the bottom surface of the metal body is stepped for sealing a circular mounting position of a semiconductor device. The lower annular groove 13 has a bottom surface 131. The bottom surface 131 is stepped and has a placement surface 132. The placement surface 132 is configured for supporting the metal body of the sealing element 300. Through the stepped bottom surface 131 corresponding in shape to the bottom surface of the sealing element 300, the pressure on the rubber ring disposed on the bottom surface of the sealing element 300 is reduced, avoiding deformation of the rubber ring when being pressed for a long period of time.

The lower annular groove 13 has a side wall 133. The area connected between the side wall 133 of the lower annular groove 13 and the lower annular wall 11 is defined as a lower buffer area 14. The area enclosed by the lower annular groove 13 is defined as a lower support area 15. The lower annular groove 13 is symmetrically formed with two indentations 16. Each indentation 16 is recessed from the lower buffer area 14 and communicates with the lower annular groove 13. The indentation 16 forms a space that facilitates removal of the sealing element 300 from the lower ring groove 13. A lower support portion 151 is formed in the lower support area 15. The top surface of the lower support portion 151 is flush with the top surface of the lower buffer area 14. The lower support portion 151 includes a lower central support portion 152 and three lower auxiliary support portions 153. The lower central support portion 152 has a cylindrical shape and is formed in the center of the lower support area 15. The lower auxiliary support portions 153 are each in the formed of an arc-shaped block. The lower auxiliary support portions 153 are arranged around the lower central support portion 152 at equal intervals.

The upper housing 200 is integrally formed from a second plate 2. Preferably, the second plate 2 is made of polyethylene terephthalate (PET). The periphery of the second plate 2 is bent downward to form an upper annular wall 21 and then transversely extends outward to form an upper flange 22. The second plate 2 is recessed downward within the area enclosed by the upper annular wall 21 to form an upper annular groove 23. The upper annular groove 23 corresponds in outline to the lower annular groove 13. The depth of the upper annular groove 23 is less than the depth of the lower annular groove 13.

Furthermore, the upper annular groove 23 has a side wall 231. The area connected between the side wall 231 of the upper annular groove 23 and the upper annular wall 21 is defined as an upper buffer area 24. The area enclosed by the upper annular groove 23 is defined as an upper support area 25. An upper support portion 251 is formed in the upper support area 25. The top surface of the upper support portion 251 is flush with the top surface of the upper buffer area 24. The upper support portion 251 corresponds to the lower support portion 151, and includes an upper central support portion 252 and three upper auxiliary support portions 253. The upper central support portion 252 corresponds in outline to the lower central support portion 152. The upper auxiliary support portions 253 correspond in outline to the lower auxiliary support portions 153.

Further, an upper notch 221 is formed at the junction of the upper flanges 22 of two adjacent sides of the upper housing 200, and a lower notch 121 is formed at the junction of the lower flanges 12 of two adjacent sides of the lower housing 100. A plurality of spaced locking protrusions 211 are disposed the inner side of the upper annular wall 21. A plurality of spaced locking grooves 111 are disposed the outer side of the lower annular wall 11. The locking grooves 111 correspond in position to the locking protrusions 211. When in use, the sealing element 300 is placed in the lower annular groove 13, and then the upper housing 200 is nested on the lower housing 100, so that the upper central support portion 252 and the upper auxiliary support portion 253 are correspondingly nested on the lower central support portion 152 and the lower auxiliary support portion 153, respectively. Then, the upper housing 200 is pressed down until the locking protrusions 211 are locked in the corresponding locking grooves 111, so that the upper housing 200 and the lower housing 100 are connected to each other. At this time, the upper flange 22 overlaps the lower flange 12, and the upper notch 221 and the lower notch 121 are offset from each other.

As shown in the first embodiment, the upper annular groove 23 is nested on the lower annular groove 13. The upper annular groove 23 closes the upper opening of the lower annular groove 13 to form an accommodating space 3 for accommodating and confining the sealing element 300. The upper support area 25 is nested on the lower support area 15 to form a double-layer structure, which improves the structural strength of the overall packaging structure and is less likely to be deformed under external force. In this way, the contact area between the upper housing 200 and the lower housing 100 is increased, so that the tightness of the fit between the upper housing 200 and the lower housing 100 is better, and the upper housing 200 and the lower housing 100 are not easily separated by external force. The overlap between the upper buffer area 24 and the lower buffer area 14 enhances the structural rigidity of the periphery of the accommodating space 3, thereby providing better cushioning even if the sealing element packaging structure falls to the ground with the flange facing down. When the sealing element packaging structure is to be opened, the lower flange 12 is pressed downward through the upper notch 221 and the upper flange 22 is pulled upward through the lower notch 121 to separate the upper housing 200 from the lower housing 100. There is no need for additional tools. The disassembly is quick and easy.

FIG. 4 and FIG. 5 show a second embodiment of the present invention. The second embodiment is substantially similar to the first embodiment with the exceptions described below.

The lower annular groove 13 includes three rectangular grooves 134 arranged at equal intervals and three arc-shaped grooves 135 each connected between adjacent two of the rectangular grooves 134. The lower support area 15 is formed with a lower support platform 154 corresponding in outline to the lower annular groove 13. The height of the lower support platform 154 is less than the height of the lower annular wall 11. A lower support portion 151 is formed on the lower support platform 154. The lower support portion 151 has an annular lower central portion 155 and lower rib portions 156 extending from the lower central portion 155 toward the respective rectangular grooves 134. The lower buffer area 14 is recessed with two indentations 16 communicating with the lower annular groove 13 and facing the lower central portion 155. The upper housing 200 has an upper annular groove 23 corresponding in outline to the lower annular groove 13. An upper support platform 254 corresponding in outline to the upper annular groove 23 is formed in the upper support area 25 surrounded by the upper annular groove 23. An upper support portion 251 is formed on the upper support platform 254. The upper support portion 251 corresponds in outline to the lower support portion 151. The upper support portion 251 has an annular upper central portion 255 and three upper rib portions 256.

The sealing element used in the second embodiment has an annular main body and three rectangular protruding portions spaced at equal intervals along the outer periphery of the main body, which is an irregularly-shaped sealing element. When in use, the sealing element is placed in the lower annular groove 13 of the lower housing 100. The main body of the sealing element is placed in the arc-shaped grooves 135, and the rectangular protruding portions of the sealing element is placed in the rectangular grooves 134. Then, the upper housing 200 is nested on the lower housing 100. At this time, the upper support portion 251 is nested on the lower support portion 151 and is in contact with the outer peripheral wall of the lower support portion 151. The irregularly-shaped upper and lower support portions 251, 151 increase the contact area between the upper housing 200 and the lower housing 100, improve the tightness of the fit between the upper housing 200 and the lower housing 100, and strengthen the structural strength of the middle portions of the upper and lower annular grooves 23, 13, so as to resist external force effectively and to prevent the sealing element from being deformed.

As shown in the second embodiment, in actual application of the present invention, according to the outline of the irregular-shaped sealing element, the lower annular groove 13 and the upper annular groove 23 are formed corresponding in outline to the sealing element, and the upper and lower support areas 25, 15 surrounded by the upper and lower annular grooves 23, 13 have the support portions that can overlap each other, meeting the packaging needs of sealing elements in different irregular shapes.

FIG. 6 and FIG. 7 show a third embodiment of the present invention. The third embodiment is substantially similar to the first embodiment with the exceptions described below.

The lower annular groove 13 is in the form of a long curved groove and consists of two curved sections 136 connected together. Either end of the lower annular groove 13 has an enlarged arc portion 137 for the sealing element be placed in a curved manner. The side wall 133 connecting the lower annular groove 13 and the lower buffer area 14 is stepped. A lower step surface 138 extends transversely toward the interior of the lower annular groove 13. Three spaced lower support portions 151 are formed in the lower support area 15 and extend along the curvature of the lower annular groove 13. The lower buffer zone 14 is formed with two pairs of indentations 16 at two of the curved sections 136. The indentations 16 communicate with the lower support area 15 to facilitate the removal of the sealing element placed in the lower annular groove 13. The upper annular groove 23 corresponds in outline to the lower annular groove 13. The side wall 231 connecting the upper annular groove 23 and the upper buffer area 24 is stepped. An upper step surface 232 extends transversely toward the interior of the upper annular groove 23. Three spaced upper support portions 251 are formed in the upper support area 25. The upper support portions 252 correspond to the lower support portions 151.

The sealing element packaging structure provided in the third embodiment can be used for placement of long thin sealing rings with large diameters. When in use, the long thin sealing ring is placed in the lower annular groove 13 and is confined by the lower annular groove 13 to form a long strip-shaped curved ring. The enlarged arc portions 137 at both ends provide elastic deformation space for the bending of both ends of the long thin sealing ring, thereby preventing the long thin sealing ring from being deformed. Then, the upper housing 200 is nested on the lower housing 100. The bottom of the upper step surface 232 of the upper housing 200 is in contact with the top of the lower step surface 138 of the lower housing 100, and the outer periphery of the upper support portion is attached to the outer periphery of the lower support portion, thereby increasing the contact area between the upper housing and the lower housing, improving the entire tightness of the packaging structure, ensuring that the upper housing 200 and the lower housing 100 are not easily separated during transportation or falling to the ground, and protecting the sealing element from deformation effectively.

The sealing element packaging structure provided by the present invention has the following technical advancements and advantages:

Firstly, the protective effect is good. The upper housing has the upper flange and the upper buffer area, and the lower housing has the lower flange and the lower buffer area. After the upper housing is nested on the lower housing, the upper and lower flanges and the upper and lower buffer areas increase the distance between the accommodating space used for accommodating the sealing element and the edges of the upper and lower housing. When the sealing element packaging structure falls, the upper and lower flanges and the upper and lower buffer areas cushion the impact, protecting the sealing element effectively. The accommodating space formed between the upper and lower annular grooves confines the sealing element, preventing it from shifting and being damaged in the packaging structure due to transportation or impact from dropping.

Secondly, the overall structure has high strength. The upper support portion of the upper housing is nested on the lower support portion of the lower housing to form a double-layer structure, so that the central area of the accommodating space has better structural strength to resist external force and is not easily deformed, thereby protecting the sealing element effectively.

Thirdly, the upper housing and the lower housing can be locked stably. The locking protrusions of the upper housing can be locked in the locking grooves of the lower housing, so that the upper housing and the lower housing can be locked to each other. Besides, the upper support portion is nested on the lower support portion to increase the contact area between the upper housing and the lower housing, and the upper flange is nested on the lower flange to improve the tightness of the fit between the upper and lower housings, ensuring that the upper and lower housings of the sealing element packaging structure are not easy to separate from each other when the sealing element packaging structure drops or is pressed, so as to protect the sealing element effectively.

Fourthly, it is easy to take out the sealing element from the sealing element packaging structure for use. The upper notch of the upper flange of the upper housing and the lower notch of the lower flange of the lower housing are offset from each other. When the packaging structure is to be opened, the lower flange corresponding to the upper notch and the upper flange corresponding to the lower notch are pulled in opposite directions to separate the upper housing from the lower housing without the need for tools. The lower buffer area is formed with the indentations communicating with the lower annular groove. When it is necessary to take out the sealing element, the sealing element can be taken out via the indentations. The sealing element is easy to access and will not damage its surface.