Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials

In one aspect, the invention is formulations comprising both organoaminohafnium and organoaminosilane precursors that allows anchoring both silicon-containing fragments and hafnium-containing fragments onto a given surface having hydroxyl groups to deposit silicon doped hafnium oxide having a silicon doping level ranging from 0.5 to 8 mol %, preferably 2 to 6 mol %, most preferably 3 to 5 mol %, suitable as ferroelectric material. In another aspect, the invention is methods and systems for depositing the silicon doped hafnium oxide films using the formulations.

Substrate processing apparatus, substrate container transport system and operation mechanism

A substrate processing apparatus includes a plurality of placement parts on which a substrate container is placed, a driving part configured to move the plurality of placement parts, a transport mechanism configured to load the substrate container into one of the plurality of placement parts and to unload the substrate container from one of the plurality of placement parts, and a controller configured to control the driving pan and the transport mechanism so that by raising or lowering the transport mechanism while keeping a support of the transport mechanism unmoved in an initial position, the substrate container is delivered from one of the plurality of placement parts to the support of the transport mechanism, and the substrate container is delivered from the support of the transport mechanism to one of the plurality of placement parts.

Smart device

An Internet of Thing (IoT) device includes a camera coupled to a processor; and a wireless transceiver coupled to the processor. Blockchain smart contracts can be used with the device to facilitate secure operation.

Plasma resistant coating of porous body by atomic layer deposition

Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a porous chamber component and onto pore walls within the porous chamber component using an atomic layer deposition (ALD) process. The porous chamber component may include a porous body comprising a plurality of pores within the porous body, the plurality of pores each comprising pore walls. The porous body is permeable to a gas. The plasma resistant coating may comprise a solid solution of Y2O3—ZrO2 and may have a thickness of about 5 nm to about 3 μm, and may protect the pore walls from erosion. The porous body with the plasma resistant coating remains permeable to the gas.

Plasma resistant coating of porous body by atomic layer deposition

Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a porous chamber component and onto pore walls within the porous chamber component using an atomic layer deposition (ALD) process. The porous chamber component may include a porous body comprising a plurality of pores within the porous body, the plurality of pores each comprising pore walls. The porous body is permeable to a gas. The plasma resistant coating may have a thickness of about 5 nm to about 3 μm, and may protect the pore walls from erosion. The porous body with the plasma resistant coating remains permeable to the gas.

Robotic surgical assemblies and electromechanical instruments thereof

An actuation mechanism for actuating an electromechanical end effector includes a housing, and a shaft assembly extending distally from the housing. The shaft assembly includes a shaft, a longitudinal knife bar, a first hub, and a second hub. The shaft is axially movable relative to the housing and configured to be coupled to the electromechanical end effector. Rotation of a first screw of the housing moves the first hub to effect longitudinal movement of the shaft. The longitudinal knife bar is axially movable relative to the shaft and configured to be coupled to a knife blade of the electromechanical end effector. Rotation of a second screw of the housing moves the second hub to effect axial movement of the longitudinal knife bar.

MEDICAL IMAGING APPARATUS AND SURGICAL NAVIGATION SYSTEM

A surgical information processing apparatus, including circuitry that obtains position information of a surgical imaging device, the position information indicating displacement of the surgical imaging device from a predetermined position, in a registration mode, obtain first image information from the surgical imaging device regarding a position of a surgical component, determines the position of the surgical component based on the first image information and the position information, and in an imaging mode, obtains second image information from the surgical imaging device of the surgical component based on the determined position.

Hardware isolated secure processing system within a secure element

Systems and methods are provided that allow a secure processing system (SPS) to be implemented as a hard macro, thereby isolating the SPS from a peripheral processing system (PPS). The SPS and the PPS, combination, may form a secure element that can be used in conjunction with a host device and a connectivity device to allow the host device to engage in secure transactions, such as mobile payment over a near field communications (NFC) connection. As a result of the SPS being implemented as a hard macro isolated from the PPS, the SPS may be certified once, and re-used in other host devices without necessitating re-certification.

Machine learning models in location based episode prediction

The disclosed embodiments include a method performed by server computer(s). The method includes obtaining private healthcare insurance claims data and public healthcare procedure code data from one or more data source(s), generating a model based the training data, and determining a multiplier for each of the many facilities based on the model. The model provides predictive results for variability between healthcare facilities thereby enabling consumer research in light of considerations in facility variability. The multiplier is indicative of a value used to scale the public healthcare procedure code data for a facility such that a healthcare service associated with the facility can be estimated based on the multiplier.

PLANT FOR CONTROLLING DELIVERY OF PRESSURIZED FLUID IN A CONDUIT, AND A METHOD OF CONTROLLING A PRIME MOVER

A plant for delivering a fluid in a conduit (10) comprises a prime mover (2), for example a gas turbine, which is configured to drive one or more fluid delivery systems (34a-c, 35a1-c1, 35a2-c2) for delivering a fluid in the conduit (10). A first sensor (16) is configured for sensing pressure variations in the pipe (10) and is connected to a first controller (7). The first controller (7) is configured to provide control signals to control valves (36a-c, 37a-c) for at least one fluid delivery system and to a control system (4, 3) for the prime mover (2). One or more hydraulic pumps (9a-c) are configured to operate the fluid delivery systems and are driven by the prime mover, whereby interaction between the hydraulic pumps and the prime mover is controlled based on sensed pressure in the pipe (10).