Belmont, California
United States
18
2017-12-21
15
2019-03-19
These are the the leading inventors for applications assigned to NIKON PRECISION INC.:
NIKON PRECISION INC. based in Belmont, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Scanner based optical proximity correction system and method of use
#2 | 2016-06-09 ✅ Patent 9,753,363 granted on 2017-09-05Scanner based optical proximity correction system and method of use
#3 | 2013-12-19 ✅ Patent 9,529,253 granted on 2016-12-27Predicting pattern critical dimensions in a lithographic exposure process
#4 | 2013-07-25 ✅ Patent 9,286,416 granted on 2016-03-15Scanner based optical proximity correction system and method of use
#5 | 2013-02-21SYSTEM AND METHOD FOR AN ADJUSTING OPTICAL PROXIMITY EFFECT FOR AN EXPOSURE APPARATUS
#6 | 2012-12-27 ✅ Patent 8,572,518 granted on 2013-10-29Predicting pattern critical dimensions in a lithographic exposure process
#7 | 2010-05-20 ✅ Patent 8,438,507 granted on 2013-05-07Systems and methods for adjusting a lithographic scanner
#8 | 2010-03-04 ✅ Patent 8,365,107 granted on 2013-01-29Scanner based optical proximity correction system and method of use
#9 | 2009-08-27 ✅ Patent 8,300,214 granted on 2012-10-30System and method for an adjusting optical proximity effect for an exposure apparatus
#10 | 2008-04-10 ✅ Patent 8,322,616 granted on 2012-12-04Automated signature detection system and method of use
#11 | 2007-11-22NON-CONTACT CHEMICAL MECHANICAL POLISHING WAFER EDGE CONTROL APPARATUS AND METHOD
#12 | 2007-06-21Changeable Slit to Control Uniformity of Illumination
#13 | 2006-11-16 ✅ Patent 7,169,016 granted on 2007-01-30Chemical mechanical polishing end point detection apparatus and method
#14 | 2006-03-30 ✅ Patent 8,027,813 granted on 2011-09-27Method and system for reconstructing aberrated image profiles through simulation
#15 | 2005-12-13 ✅ Patent 6,974,653 granted on 2005-12-13Methods for critical dimension and focus mapping using critical dimension test marks
#16 | 2005-10-18 ✅ Patent 6,956,659 granted on 2005-10-18Measurement of critical dimensions of etched features
#17 | 2005-09-13 ✅ Patent 6,943,882 granted on 2005-09-13Method to diagnose imperfections in illuminator of a lithographic tool
#18 | 2005-01-11 ✅ Patent 6,842,223 granted on 2005-01-11Enhanced illuminator for use in photolithographic systems
Also check out NIKON PRECISION INC.'s (Belmont, United States) applicant profile with 4 patent applications submitted.
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