Yongin-si
South Korea
24
2023-12-21
12
2025-07-08
These are the the leading inventors for applications assigned to EUGENE TECHNOLOGY CO., LTD.:
EUGENE TECHNOLOGY CO., LTD. based in Yongin-si, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
APPARATUS FOR PROCESSING SUBSTRATE
#2 | 2023-08-03 ✅ Patent 12,354,850 granted on 2025-07-08APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
#3 | 2023-03-30SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
#4 | 2023-03-16 ✅ Patent 12,392,554 granted on 2025-08-19APPARATUS FOR PROCESSING A SUBSTRATE AND METHOD OF OPERATING THE SAME
#5 | 2023-01-05 ✅ Patent 12,488,963 granted on 2025-12-02SUBSTRATE PROCESSING APPARATUS
#6 | 2022-10-20 ✅ Patent 12,243,767 granted on 2025-03-04Substrate support assembly and substrate processing apparatus
#7 | 2022-03-10SUBSTRATE PROCESSING APPARATUS AND OPERATION METHOD FOR SUBSTRATE PROCESSING APPARATUS
#8 | 2022-01-27PLASMA PROCESSING APPARATUS
#9 | 2020-08-20 ✅ Patent 11,242,601 granted on 2022-02-08Showerhead and substrate processing apparatus including the same
#10 | 2019-12-19 ✅ Patent 10,892,139 granted on 2021-01-12ICP antenna and substrate processing device including the same
#11 | 2018-04-19EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR
#12 | 2017-09-07METHOD AND APPARATUS FOR DEPOSITING AMORPHOUS SILICON FILM
#13 | 2017-05-25 ✅ Patent 10,593,545 granted on 2020-03-17Method for substrate processing using exhaust ports
#14 | 2017-04-20 ✅ Patent 10,622,228 granted on 2020-04-14Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
#15 | 2016-10-06 ✅ Patent 10,287,687 granted on 2019-05-14Substrate processing device
#16 | 2015-07-02 ✅ Patent 9,312,125 granted on 2016-04-12Cyclic deposition method for thin film formation, semiconductor manufacturing method, and semiconductor device
#17 | 2011-02-03 ✅ Patent 8,528,499 granted on 2013-09-10Substrate processing apparatus and method
#18 | 2011-01-27 ✅ Patent 8,312,840 granted on 2012-11-20Substrate processing apparatus and method
#19 | 2011-01-20APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
#20 | 2011-01-06APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
#21 | 2010-12-30APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
#22 | 2010-12-23SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SUBSTRATE SUPPORTING UNIT
#23 | 2010-12-23PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
#24 | 2010-11-04PLASMA PROCESSING APPARATUS AND METHOD
Also check out EUGENE TECHNOLOGY CO., LTD.'s (Yongin-si, South Korea) applicant profile with 23 patent applications submitted.
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