Austin, Texas
United States
21
2015-10-22
18
2017-10-10
These are the the leading inventors for applications assigned to Samsung Austin Semiconductor, L.P.:
Samsung Austin Semiconductor, L.P. based in Austin, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber
#2 | 2014-07-10 ✅ Patent 9,287,162 granted on 2016-03-15Forming vias and trenches for self-aligned contacts in a semiconductor structure
#3 | 2014-07-10 ✅ Patent 9,385,018 granted on 2016-07-05Semiconductor manufacturing equipment with trace elements for improved defect tracing and methods of manufacture
#4 | 2013-10-10 ✅ Patent 9,111,998 granted on 2015-08-18Multi-level stack having multi-level contact and method
#5 | 2013-03-28 ✅ Patent 8,887,663 granted on 2014-11-18Method and apparatus for fabrication of carbon nanotubes using an electrostatically charged substrate and liner
#6 | 2013-03-14 ✅ Patent 8,586,267 granted on 2013-11-19Removable transparent membrane for a pellicle
#7 | 2012-07-26PARALLEL MULTI WAFER AXIAL SPIN CLEAN PROCESSING USING SPIN CASSETTE INSIDE MOVABLE PROCESS CHAMBER
#8 | 2012-02-16 ✅ Patent 8,580,044 granted on 2013-11-12Apparatus for agitating and evacuating byproduct dust from a semiconductor processing chamber
#9 | 2008-11-27Hot edge ring apparatus and method for increased etch rate uniformity and reduced polymer buildup
#10 | 2008-03-27 ✅ Patent 8,383,323 granted on 2013-02-26Selective imaging through dual photoresist layers
#11 | 2008-03-13 ✅ Patent 7,486,391 granted on 2009-02-03System and method for haze control in semiconductor processes
#12 | 2007-09-20 ✅ Patent 7,759,600 granted on 2010-07-20Rupture resistant plasma tube
#13 | 2007-05-03 ✅ Patent 7,636,611 granted on 2009-12-22Fuzzy logic system for process control in chemical mechanical polishing
#14 | 2007-03-22 ✅ Patent 7,371,156 granted on 2008-05-13Off-line tool for breaking in multiple pad conditioning disks used in a chemical mechanical polishing system
#15 | 2006-05-25Plasma reaction chamber and captive silicon electrode plate for processing semiconductor wafers
#16 | 2005-12-22 ✅ Patent 7,094,134 granted on 2006-08-22Off-line tool for breaking in multiple pad conditioning disks used in a chemical mechanical polishing system
#17 | 2005-12-22 ✅ Patent 7,404,757 granted on 2008-07-29Apparatus and method for breaking in multiple pad conditioning disks for use in a chemical mechanical polishing system
#18 | 2005-11-10 ✅ Patent 8,951,095 granted on 2015-02-10High selectivity slurry delivery system
#19 | 2005-10-20 ✅ Patent 8,323,411 granted on 2012-12-04Semiconductor workpiece apparatus
#20 | 2005-09-06 ✅ Patent 6,939,132 granted on 2005-09-06Semiconductor workpiece apparatus
#21 | 2005-04-26 ✅ Patent 6,884,145 granted on 2005-04-26High selectivity slurry delivery system
Also check out Samsung Austin Semiconductor, L.P.'s (Austin, United States) applicant profile with 1 patent applications submitted.
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