Cheongju-si
South Korea
3
2026-03-12
2
2024-12-31
These are the the leading inventors for applications assigned to Wonik Materials:
Wonik Materials based in Cheongju-si, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
METHOD FOR PRODUCING HALOTRISILANE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES USING THE SAME
#2 | 2022-09-29 ✅ Patent 12,183,591 granted on 2024-12-31Etching gas compositions, methods of forming micropatterns, and methods of manufacturing semiconductor device
#3 | 2019-05-16 ✅ Patent 10,872,784 granted on 2020-12-22Etching gas mixture, method of forming pattern by using the same, and method of manufacturing integrated circuit device by using the etching gas mixture
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