Kanagawa
Japan
2
2023-05-25
2
2024-06-25
These are the the leading inventors for applications assigned to ULVAC TECHNO, LTD.:
ULVAC TECHNO, LTD. based in Kanagawa, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Substrate lifting apparatus and substrate transferring method
#2 | 2020-12-31 ✅ Patent 11,257,702 granted on 2022-02-22Power supply apparatus for electrostatic chuck and substrate control method
Also check out ULVAC TECHNO, LTD.'s (Kanagawa, Japan) applicant profile with 2 patent applications submitted.
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