San Jose, California
United States
15
2018-07-19
11
2020-02-04
These are the the leading inventors for applications assigned to TANGO SYSTEMS, INC.:
TANGO SYSTEMS, INC. based in San Jose, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Physical vapor deposition method using backside gas cooling of workpieces
#2 | 2017-04-27 ✅ Patent 9,957,606 granted on 2018-05-01Physical vapor deposition system using rotating pallet with X and Y positioning
#3 | 2017-04-27 ✅ Patent 9,932,668 granted on 2018-04-03Physical vapor deposition system using backside gas cooling of workpieces
#4 | 2017-04-27 ✅ Patent 10,053,771 granted on 2018-08-21Physical vapor deposition system with target magnets controlled to only be above workpiece
#5 | 2012-04-12Multi-Station Sputtering and Cleaning System
#6 | 2012-02-02Triangular Scanning Magnet in Sputtering Tool Moving Over Larger Triangular Target
#7 | 2010-04-01Confining Magnets In Sputtering Chamber
#8 | 2010-04-01Sputtering Chamber Having ICP Coil and Targets on Top Wall
#9 | 2009-05-21 ✅ Patent 8,092,659 granted on 2012-01-10Multi-station sputtering and cleaning system
#10 | 2006-10-19 ✅ Patent 7,799,190 granted on 2010-09-21Target backing plate for sputtering system
#11 | 2006-10-19 ✅ Patent 7,785,455 granted on 2010-08-31Cross-contaminant shield in sputtering system
#12 | 2006-10-19 ✅ Patent 7,794,574 granted on 2010-09-14Top shield for sputtering system
#13 | 2006-10-19 ✅ Patent 7,479,210 granted on 2009-01-20Temperature control of pallet in sputtering system
#14 | 2006-10-19 ✅ Patent 7,682,495 granted on 2010-03-23Oscillating magnet in sputtering system
#15 | 2006-10-19 ✅ Patent 7,744,730 granted on 2010-06-29Rotating pallet in sputtering system
Also check out Tango Systems, Inc.'s (San Jose, United States) applicant profile with 4 patent applications submitted.
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