Entegris, Inc.

Liquid flow controller and precision dispense apparatus and system

#2 | 2013-04-18

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Fluid Filter With Polymeric Membrane And Metal Supports

#3 | 2012-04-19 ✅ Patent 8,430,120 granted on 2013-04-30

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Liquid flow controller and precision dispense apparatus and system

#4 | 2010-12-09 ✅ Patent 8,528,738 granted on 2013-09-10

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Reusable resilient cushion for wafer container

#5 | 2010-11-25 ✅ Patent 8,776,841 granted on 2014-07-15

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System for purging reticle storage

#6 | 2010-02-18 ✅ Patent 7,857,683 granted on 2010-12-28

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CMP retaining ring

#7 | 2010-01-07 ✅ Patent 7,997,420 granted on 2011-08-16

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Filter apparatus capable of releasing air

#8 | 2009-12-31 ✅ Patent 7,922,791 granted on 2011-04-12

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Filtering system for a semiconductor processing tool

#9 | 2009-12-10 ✅ Patent 8,231,005 granted on 2012-07-31

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Reticle pod

#10 | 2009-11-19 ✅ Patent 9,543,187 granted on 2017-01-10

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Electrostatic chuck

#11 | 2009-11-19 ✅ Patent 7,806,949 granted on 2010-10-05

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Low-profile surface mount filter

#12 | 2009-10-15 ✅ Patent 8,726,935 granted on 2014-05-20

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Valve manifold assembly

#13 | 2009-10-01 ✅ Patent 8,689,817 granted on 2014-04-08

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Welded diaphragm valve

#14 | 2009-09-17 ✅ Patent 8,082,946 granted on 2011-12-27

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Liquid flow controller and precision dispense apparatus and system

#15 | 2009-09-03 ✅ Patent 8,292,077 granted on 2012-10-23

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Shock absorbing substrate container

#16 | 2009-09-03 ✅ Patent 8,028,722 granted on 2011-10-04

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Fluid handling device with directionally-biased wetting surface

#17 | 2009-08-06 ✅ Patent 8,069,991 granted on 2011-12-06

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System and method for liquid filtration with reduced hold-up volume

#18 | 2009-08-06

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WAFER CASSETTE

#19 | 2009-07-23 ✅ Patent 8,172,923 granted on 2012-05-08

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Apparatus and method for reducing particle contamination in a vacuum chamber

#20 | 2009-05-21 ✅ Patent 7,942,069 granted on 2011-05-17

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Fluid handling device with isolating chamber

#21 | 2009-05-07 ✅ Patent 7,946,751 granted on 2011-05-24

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Method for controlled mixing of fluids via temperature

#22 | 2009-05-07 ✅ Patent 7,885,773 granted on 2011-02-08

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Fluid flow measuring and proportional fluid flow control device

#23 | 2009-03-05 ✅ Patent 8,844,774 granted on 2014-09-30

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Pressurized system for dispensing fluids

#24 | 2009-02-19 ✅ Patent 8,753,097 granted on 2014-06-17

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Method and system for high viscosity pump

#25 | 2009-02-12

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POROUS MEMBRANES CONTAINING EXCHANGE RESINS

#26 | 2008-12-11 ✅ Patent 7,572,367 granted on 2009-08-11

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Liquid filtration device

#27 | 2008-11-06 ✅ Patent 7,941,565 granted on 2011-05-10

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Network interface device

#28 | 2008-09-18 ✅ Patent 7,726,876 granted on 2010-06-01

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System and method for non-intrusive thermal monitor

#29 | 2008-08-28 ✅ Patent 8,146,623 granted on 2012-04-03

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Purge system for a substrate container

#30 | 2008-08-07

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SYSTEM AND METHOD OF CHEMICAL DILUTION AND DISPENSE

#31 | 2008-08-05 ✅ Patent 7,407,708 granted on 2008-08-05

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High-strength, chemically resistant laminar film with limited extractables

#32 | 2008-06-26 ✅ Patent 7,534,287 granted on 2009-05-19

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Porous sintered composite materials

#33 | 2008-05-29 ✅ Patent 8,727,125 granted on 2014-05-20

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Substrate container with fluid-sealing flow passageway

#34 | 2008-05-20 ✅ Patent 7,376,489 granted on 2008-05-20

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Method of identifying fluid purification equipment which is optimized for individual fluid purification systems

#35 | 2008-04-24

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PHOTOMASK CONTAINER

#36 | 2008-04-01 ✅ Patent 7,350,821 granted on 2008-04-01

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Method and system for purging a dispensed fluid within a fluid dispensing system including a filter-free connector apparatus

#37 | 2008-03-25 ✅ Patent 7,347,937 granted on 2008-03-25

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Perfluorinated thermoplastic filter cartridge

#38 | 2008-03-20 ✅ Patent 8,082,066 granted on 2011-12-20

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System for controlling valve fluid flow based on rate of change of close rate acceleration

#39 | 2008-02-14 ✅ Patent 7,443,483 granted on 2008-10-28

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Systems and methods for fluid flow control in an immersion lithography system

#40 | 2008-02-07 ✅ Patent 7,447,600 granted on 2008-11-04

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Fluid flow measuring and proportional fluid flow control device

#41 | 2008-01-10

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SUBSTRATE CARRIER AND HANDLE

#42 | 2007-12-18 ✅ Patent 7,308,932 granted on 2007-12-18

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Exchange apparatus

#43 | 2007-10-30 ✅ Patent 7,288,600 granted on 2007-10-30

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Fluorocarbon polymeric compositions having hydrophilic functional groups and process

#44 | 2007-10-30 ✅ Patent 7,288,201 granted on 2007-10-30

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Methods for removing moisture from hydrogen halides

#45 | 2007-10-11 ✅ Patent 7,343,817 granted on 2008-03-18

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Magnetic flow meter with unibody construction and conductive polymer electrodes

#46 | 2007-09-13

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Chemistry; metallurgy

Method And Apparatus For Purifying Inorganic Halides And Oxyhalides Using Zeolites

#47 | 2007-09-06 ✅ Patent 7,494,265 granted on 2009-02-24

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System and method for controlled mixing of fluids via temperature

#48 | 2007-08-16 ✅ Patent 7,389,689 granted on 2008-06-24

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Non-porous adherent inert coatings and methods of making

#49 | 2007-08-16 ✅ Patent 7,575,616 granted on 2009-08-18

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Low-profile surface mount filter

#50 | 2007-07-31 ✅ Patent 7,249,628 granted on 2007-07-31

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Apparatus for conditioning the temperature of a fluid

#51 | 2007-07-26 ✅ Patent 7,422,107 granted on 2008-09-09

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Kinematic coupling with textured contact surfaces

#52 | 2007-07-24 ✅ Patent 7,247,245 granted on 2007-07-24

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Filtration cartridge and process for filtering a slurry

#53 | 2007-06-07 ✅ Patent 7,547,049 granted on 2009-06-16

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O-ring-less low profile fittings and fitting assemblies

#54 | 2007-05-22 ✅ Patent 7,219,802 granted on 2007-05-22

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Thin wafer insert

#55 | 2007-05-17 ✅ Patent 7,407,594 granted on 2008-08-05

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Liquid filtration device

#56 | 2007-05-15 ✅ Patent 7,216,655 granted on 2007-05-15

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Wafer container washing apparatus

#57 | 2007-05-10 ✅ Patent 7,469,932 granted on 2008-12-30

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Receptor for a separation module

#58 | 2007-04-10 ✅ Patent 7,201,287 granted on 2007-04-10

US10718033

Drum vent

#59 | 2007-03-13 ✅ Patent 7,189,291 granted on 2007-03-13

US10683903

Method for the removal of airborne molecular contaminants using oxygen gas mixtures

#60 | 2007-01-25 ✅ Patent 7,387,661 granted on 2008-06-17

US20070017366A1

Pleated construction for effecting gas transfer membrane

#61 | 2007-01-16 ✅ Patent 7,163,237 granted on 2007-01-16

US10489587

Separation module

#62 | 2007-01-09 ✅ Patent 7,160,497 granted on 2007-01-09

US10706847

Process and apparatus for molding polymer fittings

#63 | 2006-12-26 ✅ Patent 7,152,478 granted on 2006-12-26

US10440433

Sensor usable in ultra pure and highly corrosive environments

#64 | 2006-12-14 ✅ Patent 7,520,984 granted on 2009-04-21

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Filter cartridge construction

#65 | 2006-12-07 ✅ Patent 7,317,971 granted on 2008-01-08

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System for controlling fluid flow based on a valve break point

#66 | 2006-11-30 ✅ Patent 7,400,383 granted on 2008-07-15

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Environmental control in a reticle SMIF pod

#67 | 2006-11-23 ✅ Patent 7,607,543 granted on 2009-10-27

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Reticle pod with isolation system

#68 | 2006-11-02 ✅ Patent 7,528,936 granted on 2009-05-05

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Substrate container with pressure equalization

#69 | 2006-10-31 ✅ Patent 7,128,212 granted on 2006-10-31

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Sealing system for ports of vessels used for corrosive fluids

#70 | 2006-10-05 ✅ Patent 7,316,728 granted on 2008-01-08

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Method and apparatus for treating fluids

#71 | 2006-09-28 ✅ Patent 7,404,493 granted on 2008-07-29

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Filter device including pleated filter incorporated in a housing

#72 | 2006-09-28 ✅ Patent 7,219,803 granted on 2007-05-22

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Carrier tape for disk components

#73 | 2006-09-26 ✅ Patent 7,112,237 granted on 2006-09-26

US10733218

Porous sintered composite materials

#74 | 2006-09-26 ✅ Patent 7,112,363 granted on 2006-09-26

US10203269

Porous or non-porous substrate coated with a polymeric composition having hydrophilic functional groups and process

#75 | 2006-09-19 ✅ Patent 7,108,899 granted on 2006-09-19

US10241805

Chip tray with tacky surface

#76 | 2006-09-14 ✅ Patent 7,378,017 granted on 2008-05-27

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Disposable fluid separation device and manifold assembly design with easy change-out feature

#77 | 2006-08-24 ✅ Patent 7,510,692 granted on 2009-03-31

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Hydride gas purification for the semiconductor industry

#78 | 2006-08-15 ✅ Patent 7,092,077 granted on 2006-08-15

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System and method for monitoring contamination

#79 | 2006-08-10 ✅ Patent 7,155,983 granted on 2007-01-02

US20060174715A1

Magnetic flow meter with unibody construction and conductive polymer electrodes

#80 | 2006-08-08 ✅ Patent 7,087,166 granted on 2006-08-08

US9968225

Filter element and filter device having replaceable filter

#81 | 2006-08-03 ✅ Patent 7,540,901 granted on 2009-06-02

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Filters employing both acidic polymers and physical-adsorption media

#82 | 2006-07-27 ✅ Patent 7,292,945 granted on 2007-11-06

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Fluid flow measuring and proportional fluid flow control device

#83 | 2006-07-06 ✅ Patent 7,462,283 granted on 2008-12-09

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System and method for liquid filtration based on a neutral filter material

#84 | 2006-06-13 ✅ Patent 7,059,475 granted on 2006-06-13

US9971352

System for cushioning wafer in wafer carrier

#85 | 2006-05-25 ✅ Patent 7,523,830 granted on 2009-04-28

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Wafer container with secondary wafer restraint system

#86 | 2006-05-25 ✅ Patent 7,309,460 granted on 2007-12-18

US20060108250A1

Photomask container

#87 | 2006-05-09 ✅ Patent 7,040,487 granted on 2006-05-09

US10194438

Protective shipper

#88 | 2006-05-02 ✅ Patent 7,036,204 granted on 2006-05-02

US10723313

Component to component sealing method

#89 | 2006-04-06 ✅ Patent 7,383,967 granted on 2008-06-10

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Apparatus and methods for pumping high viscosity fluids

#90 | 2006-03-09 ✅ Patent 7,610,117 granted on 2009-10-27

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System and method for flow monitoring and control

#91 | 2006-03-07 ✅ Patent 7,008,310 granted on 2006-03-07

US10210789

Wafer carrier wear indicator

#92 | 2006-03-07 ✅ Patent 7,007,391 granted on 2006-03-07

US10001708

Dual containment tubing cutter

#93 | 2006-01-19 ✅ Patent 7,132,048 granted on 2006-11-07

US20060011534A1

Filter element-removing jig

#94 | 2006-01-05 ✅ Patent 7,168,587 granted on 2007-01-30

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Wafer carrier door and spring biased latching mechanism

#95 | 2006-01-03 ✅ Patent 6,981,595 granted on 2006-01-03

US10428328

Carrier tape for electronic components

#96 | 2005-12-29 ✅ Patent 7,156,129 granted on 2007-01-02

US20050284535A1

Transportable container including an internal environment monitor

#97 | 2005-12-20 ✅ Patent 6,976,585 granted on 2005-12-20

US10454743

Wafer carrier with ultraphobic surfaces

#98 | 2005-12-01 ✅ Patent 7,381,243 granted on 2008-06-03

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Method for purifying carbon dioxide

#99 | 2005-12-01 ✅ Patent 7,252,199 granted on 2007-08-07

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Disk cassette system

#100 | 2005-11-24 ✅ Patent 7,325,698 granted on 2008-02-05

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