SÜSS MICROTEC LITHOGRAPHY GMBH

City:

Garching

Country:

Germany

Published Applications:

Last publication date:

2012-06-07

Patent Grants:

Last grant date:

2014-02-11

Top Inventors for applications by SÜSS MICROTEC LITHOGRAPHY GMBH

These are the the leading inventors for applications assigned to SÜSS MICROTEC LITHOGRAPHY GMBH:

Takaaki Ishii 1 Yokohama, Japan
Tomas Hülsmann 1 Garching, Germany
Tobias Hickmann 1 Munchen, Germany

Recent patent applications by SÜSS MICROTEC LITHOGRAPHY GMBH

SÜSS MICROTEC LITHOGRAPHY GMBH based in Garching, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2012-06-07 ✅ Patent 8,647,797 granted on 2014-02-11

US20120141928A1

Physics

Methos and device for keeping mask dimensions constant

AssigneeID:

184097 ⎘