Gyeonggi-do
South Korea
34
2015-12-31
17
2017-05-09
These are the the leading inventors for applications assigned to EUGENE TECHNOLOGY CO., LTD.:
EUGENE TECHNOLOGY CO., LTD. based in Gyeonggi-do, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
APPARATUS FOR PROCESSING SUBSTRATE
#2 | 2015-12-24APPARATUS FOR PROCESSING SUBSTRATE
#3 | 2015-11-26SUBSTRATE-PROCESSING DEVICE
#4 | 2015-09-24PURGE CHAMBER, AND SUBSTRATE-PROCESSING APPARATUS INCLUDING SAME
#5 | 2015-08-13FUME REMOVAL DEVICE AND SUBSTRATE TREATMENT DEVICE
#6 | 2015-07-30SUBSTRATE PROCESSING DEVICE
#7 | 2015-07-09SUBSTRATE PROCESSING DEVICE
#8 | 2015-05-07APPARATUS FOR PROCESSING SUBSTRATE
#9 | 2015-02-12 ✅ Patent 9,644,895 granted on 2017-05-09Heater moving type substrate processing apparatus
#10 | 2015-01-15 ✅ Patent 9,593,415 granted on 2017-03-14Substrate processing apparatus including auxiliary gas supply port
#11 | 2014-11-27 ✅ Patent 9,953,850 granted on 2018-04-24Substrate processing apparatus including heat-shield plate
#12 | 2014-11-27 ✅ Patent 9,620,395 granted on 2017-04-11Apparatus for processing substrate for supplying reaction gas having phase difference
#13 | 2014-11-27 ✅ Patent 9,869,019 granted on 2018-01-16Substrate processing apparatus including processing unit
#14 | 2014-11-20SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
#15 | 2014-11-13APPARATUS FOR PROCESSING APPARATUS HAVING SIDE PUMPING TYPE
#16 | 2014-10-23 ✅ Patent 9,875,895 granted on 2018-01-23Substrate processing apparatus including exhaust ports and substrate processing method
#17 | 2014-10-23 ✅ Patent 9,593,418 granted on 2017-03-14Showerhead having cooling system and substrate processing apparatus including the showerhead
#18 | 2014-09-18 ✅ Patent 10,006,121 granted on 2018-06-26Method and apparatus for manufacturing three-dimensional-structure memory device
#19 | 2014-07-31EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR
#20 | 2014-07-24 ✅ Patent 9,493,875 granted on 2016-11-15Shower head unit and chemical vapor deposition apparatus
#21 | 2014-07-10EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR
#22 | 2014-06-26EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR
#23 | 2014-06-26 ✅ Patent 9,761,473 granted on 2017-09-12Substrate supporting unit and substrate processing apparatus manufacturing method of the substrate supporting unit
#24 | 2014-05-29EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR
#25 | 2013-07-18 ✅ Patent 9,416,451 granted on 2016-08-16Substrate processing device equipped with semicircle shaped antenna
#26 | 2013-07-11 ✅ Patent 9,396,954 granted on 2016-07-19Method and apparatus for manufacturing three-dimensional-structure memory device
#27 | 2013-07-04 ✅ Patent 9,425,057 granted on 2016-08-23Method and apparatus for manufacturing three-dimensional-structure memory device
#28 | 2013-06-13SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-TRANSFERRING METHOD
#29 | 2013-05-23 ✅ Patent 8,937,012 granted on 2015-01-20Production method for semiconductor device
#30 | 2013-05-23METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
#31 | 2013-05-09 ✅ Patent 8,828,890 granted on 2014-09-09Method for depositing cyclic thin film
#32 | 2013-04-25METHOD FOR DEPOSITING CYCLIC THIN FILM
#33 | 2012-05-31 ✅ Patent 8,771,418 granted on 2014-07-08Substrate-processing apparatus and substrate-processing method for selectively inserting diffusion plates
#34 | 2010-02-25 ✅ Patent 8,876,976 granted on 2014-11-04Chemical vapor deposition apparatus for equalizing heating temperature
Also check out EUGENE TECHNOLOGY CO., LTD.'s (Gyeonggi-do, South Korea) applicant profile with 11 patent applications submitted.
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