Gyeonggi-do
South Korea
2
2011-03-03
1
2014-10-21
These are the the leading inventors for applications assigned to CHARM ENGINEERING CO., LTD.:
CHARM ENGINEERING CO., LTD. based in Gyeonggi-do, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
SUBSTRATE HOLDER, SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD USING THE SAME
#2 | 2010-11-18 ✅ Patent 8,864,936 granted on 2014-10-21Apparatus and method for processing substrate
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