Sudbury, Massachusetts
United States
7
2011-08-04
4
2014-02-25
These are the the leading inventors for applications assigned to UVTech Systems, Inc.:
UVTech Systems, Inc. based in Sudbury, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Laser doping
#2 | 2011-07-14 ✅ Patent 8,658,937 granted on 2014-02-25Method and apparatus for processing substrate edges
#3 | 2011-06-23 ✅ Patent 8,183,500 granted on 2012-05-22Orthogonal beam delivery system for wafer edge processing
#4 | 2011-06-23MODULAR APPARATUS FOR WAFER EDGE PROCESSING
#5 | 2011-06-16 ✅ Patent 8,415,587 granted on 2013-04-09Fiber-optic beam delivery system for wafer edge processing
#6 | 2011-06-16 ✅ Patent 8,410,394 granted on 2013-04-02Method and apparatus for processing substrate edges
#7 | 2011-03-17Photoreactive Removal of Ion Implanted Resist
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