Miradia Inc.

Method and apparatus for MEMS oscillator

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Micromechanical device with microfluidic lubricant channel

#3 | 2011-08-04 ✅ Patent 8,288,851 granted on 2012-10-16

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Method and system for hermetically sealing packages for optics

#4 | 2009-12-17 ✅ Patent 7,764,535 granted on 2010-07-27

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Low power, small size SRAM architecture

#5 | 2009-11-05 ✅ Patent 7,833,879 granted on 2010-11-16

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Low temperature hermetic bonding at water level and method of bonding for micro display application

#6 | 2009-09-17 ✅ Patent 8,105,736 granted on 2012-01-31

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Method and system for overlay correction during photolithography

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Method and system for optical MEMS with flexible landing structures

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Low temperature hermetic bonding at water level and method of bonding for micro display application

#9 | 2009-08-20 ✅ Patent 8,424,343 granted on 2013-04-23

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Laser processing of glass frit for sealing applications

#10 | 2009-08-06 ✅ Patent 7,911,678 granted on 2011-03-22

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Reflective spatial light modulator having dual layer electrodes and method of fabricating same

#11 | 2009-01-13 ✅ Patent 7,477,440 granted on 2009-01-13

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Reflective spatial light modulator having dual layer electrodes and method of fabricating same

#12 | 2009-01-01

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PROJECTION DISPLAY SYSTEM INCLUDING A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR

#13 | 2008-11-13

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DOCKING STATION FOR PROJECTION DISPLAY APPLICATIONS

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Method and system for flip chip packaging of micro-mirror devices

#15 | 2008-08-21 ✅ Patent 7,468,831 granted on 2008-12-23

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Contrast with fast response light source

#16 | 2008-08-21 ✅ Patent 8,066,890 granted on 2011-11-29

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Spatial light modulator with multi-layer landing structures

#17 | 2008-08-14 ✅ Patent 7,923,789 granted on 2011-04-12

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Method of fabricating reflective spatial light modulator having high contrast ratio

#18 | 2008-08-14 ✅ Patent 7,825,519 granted on 2010-11-02

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Method and device for wafer scale packaging of optical devices using a scribe and break process

#19 | 2008-07-31 ✅ Patent 7,898,561 granted on 2011-03-01

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MEMS mirror system for laser printing applications

#20 | 2008-07-10

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METHODS AND SYSTEMS FOR WAFER LEVEL PACKAGING OF MEMS STRUCTURES

#21 | 2008-06-26 ✅ Patent 7,863,697 granted on 2011-01-04

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Method and apparatus for MEMS oscillator

#22 | 2008-06-12 ✅ Patent 7,542,195 granted on 2009-06-02

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Triple alignment substrate method and structure for packaging devices

#23 | 2008-04-03 ✅ Patent 7,430,359 granted on 2008-09-30

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Micromechanical system containing a microfluidic lubricant channel

#24 | 2008-03-13 ✅ Patent 7,428,094 granted on 2008-09-23

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Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge

#25 | 2008-03-06 ✅ Patent 7,570,416 granted on 2009-08-04

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Method and apparatus for a reflective spatial light modulator with a flexible pedestal

#26 | 2008-01-17

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METHOD AND SYSTEM FOR SEALING PACKAGES FOR OPTICS

#27 | 2007-12-13 ✅ Patent 7,374,962 granted on 2008-05-20

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Method of fabricating reflective spatial light modulator having high contrast ratio

#28 | 2007-11-08 ✅ Patent 7,505,195 granted on 2009-03-17

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Reflective spatial light modulator with high stiffness torsion spring hinge

#29 | 2007-11-08 ✅ Patent 7,443,568 granted on 2008-10-28

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Method and system for resonant operation of a reflective spatial light modulator

#30 | 2007-10-11

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METHOD AND SYSTEM FOR SEALING PACKAGES FOR OPTICS

#31 | 2007-07-26

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Reflective spatial light modulator

#32 | 2007-07-12 ✅ Patent 7,382,519 granted on 2008-06-03

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Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate

#33 | 2007-06-07 ✅ Patent 7,948,000 granted on 2011-05-24

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Method and system for hermetically sealing packages for optics

#34 | 2007-06-07 ✅ Patent 7,670,880 granted on 2010-03-02

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Method and structure for forming an integrated spatial light modulator

#35 | 2007-06-07 ✅ Patent 7,884,839 granted on 2011-02-08

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Method and system for image processing for spatial light modulators

#36 | 2007-05-24 ✅ Patent 7,463,404 granted on 2008-12-09

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Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems

#37 | 2007-05-24 ✅ Patent 7,372,615 granted on 2008-05-13

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Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant

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Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant

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Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems

#40 | 2007-05-24 ✅ Patent 7,580,174 granted on 2009-08-25

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Anti-stiction gas-phase lubricant for micromechanical systems

#41 | 2007-05-17 ✅ Patent 7,443,716 granted on 2008-10-28

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Spatial light modulator with four transistor electrode driver

#42 | 2007-05-03 ✅ Patent 7,522,330 granted on 2009-04-21

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High fill ratio silicon spatial light modulator

#43 | 2007-05-03 ✅ Patent 7,453,624 granted on 2008-11-18

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Projection display system including a high fill ratio silicon spatial light modulator

#44 | 2007-05-03 ✅ Patent 7,675,670 granted on 2010-03-09

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Fabrication of a high fill ratio silicon spatial light modulator

#45 | 2007-04-26 ✅ Patent 7,382,513 granted on 2008-06-03

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Spatial light modulator with multi-layer landing structures

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Method and structure for high fill factor spatial light modulator with integrated spacer layer

#47 | 2007-03-29 ✅ Patent 7,671,461 granted on 2010-03-02

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Method and system for hermetically sealing packages for optics

#48 | 2007-03-29 ✅ Patent 7,285,478 granted on 2007-10-23

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Method for micro-electromechanical system package

#49 | 2006-12-21 ✅ Patent 7,190,508 granted on 2007-03-13

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Method and structure of patterning landing pad structures for spatial light modulators

#50 | 2006-12-21 ✅ Patent 7,184,195 granted on 2007-02-27

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Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator

#51 | 2006-12-21 ✅ Patent 8,022,520 granted on 2011-09-20

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System for hermetically sealing packages for optics

#52 | 2006-12-14 ✅ Patent 7,265,027 granted on 2007-09-04

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Bond method and structure using selective application of spin on glass

#53 | 2006-12-07 ✅ Patent 7,202,989 granted on 2007-04-10

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Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate

#54 | 2006-12-07 ✅ Patent 7,298,539 granted on 2007-11-20

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Co-planar surface and torsion device mirror structure and method of manufacture for optical displays

#55 | 2006-11-30 ✅ Patent 7,349,140 granted on 2008-03-25

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Triple alignment substrate method and structure for packaging devices

#56 | 2006-10-10 ✅ Patent 7,118,234 granted on 2006-10-10

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Reflective spatial light modulator

#57 | 2006-09-21 ✅ Patent 7,245,416 granted on 2007-07-17

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Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge

#58 | 2006-08-24 ✅ Patent 7,233,428 granted on 2007-06-19

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Method and apparatus for a reflective spatial light modulator with a flexible pedestal

#59 | 2006-08-15 ✅ Patent 7,092,140 granted on 2006-08-15

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Architecture of a reflective spatial light modulator

#60 | 2006-07-27 ✅ Patent 7,109,120 granted on 2006-09-19

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Profiled standoff structure and method for optical display package

#61 | 2006-07-13 ✅ Patent 7,199,918 granted on 2007-04-03

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Electrical contact method and structure for deflection devices formed in an array configuration

#62 | 2006-07-13 ✅ Patent 7,142,349 granted on 2006-11-28

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Method and structure for reducing parasitic influences of deflection devices on spatial light modulators

#63 | 2006-07-06 ✅ Patent 7,172,921 granted on 2007-02-06

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Method and structure for forming an integrated spatial light modulator

#64 | 2006-06-29 ✅ Patent 7,473,616 granted on 2009-01-06

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Method and system for wafer bonding of structured substrates for electro-mechanical devices

#65 | 2006-06-22

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Fabrication of a reflective spatial light modulator

#66 | 2006-06-08 ✅ Patent 7,344,956 granted on 2008-03-18

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Method and device for wafer scale packaging of optical devices using a scribe and break process

#67 | 2006-05-09 ✅ Patent 7,042,619 granted on 2006-05-09

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Mirror structure with single crystal silicon cross-member

#68 | 2006-04-27 ✅ Patent 7,369,297 granted on 2008-05-06

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Mirror structure with single crystal silicon cross-member

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Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge

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High fill ratio reflective spatial light modulator with hidden hinge

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Fabrication of a reflective spatial light modulator

#72 | 2006-03-23 ✅ Patent 7,109,066 granted on 2006-09-19

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Method and device for forming spacer structures for packaging optical reflection devices

#73 | 2006-03-02 ✅ Patent 7,160,791 granted on 2007-01-09

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Batch process and device for forming spacer structures for packaging optical reflection devices

#74 | 2006-03-02 ✅ Patent 7,064,045 granted on 2006-06-20

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Laser based method and device for forming spacer structures for packaging optical reflection devices

#75 | 2006-02-02 ✅ Patent 7,141,870 granted on 2006-11-28

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Apparatus for micro-electro mechanical system package

#76 | 2006-02-02 ✅ Patent 7,280,263 granted on 2007-10-09

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Reflective spatial light modulator

#77 | 2006-02-02 ✅ Patent 7,068,417 granted on 2006-06-27

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Method and apparatus for a reflective spatial light modulator with a flexible pedestal

#78 | 2006-01-31 ✅ Patent 6,992,810 granted on 2006-01-31

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High fill ratio reflective spatial light modulator with hidden hinge

#79 | 2005-11-17 ✅ Patent 7,449,284 granted on 2008-11-11

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Method and structure for fabricating mechanical mirror structures using backside alignment techniques

#80 | 2005-05-19 ✅ Patent 7,026,695 granted on 2006-04-11

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Method and apparatus to reduce parasitic forces in electro-mechanical systems

#81 | 2005-05-12 ✅ Patent 7,303,645 granted on 2007-12-04

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