Herzogenrath
Germany
4
2011-12-01
2
2014-04-01
These are the the leading inventors for applications assigned to AIXTRON AG:
AIXTRON AG based in Herzogenrath, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Method and apparatus for depositing thin layers of polymeric para-xylylene or substituted para-xylylene
#2 | 2011-04-07 ✅ Patent 8,685,500 granted on 2014-04-01Method for depositing a thin-film polymer in a low-pressure gas phase
#3 | 2011-03-24THERMAL GRADIENT ENHANCED CHEMICAL VAPOUR DEPOSITION (TGE-CVD)
#4 | 2007-07-26 ✅ Patent 7,842,135 granted on 2010-11-30Equipment innovations for nano-technology aquipment, especially for plasma growth chambers of carbon nanotube and nanowire
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