Chungcheongnam-do
South Korea
4
2011-12-22
4
2012-07-10
These are the the leading inventors for applications assigned to ASM GENITECH KOREA LTD.:
ASM GENITECH KOREA LTD. based in Chungcheongnam-do, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Atomic layer deposition apparatus
#2 | 2009-09-03 ✅ Patent 8,273,178 granted on 2012-09-25Thin film deposition apparatus and method of maintaining the same
#3 | 2009-05-28 ✅ Patent 8,282,735 granted on 2012-10-09Atomic layer deposition apparatus
#4 | 2008-03-20 ✅ Patent 7,976,898 granted on 2011-07-12Atomic layer deposition apparatus
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