Chaska, Minnesota
United States
36
2018-10-25
35
2020-08-18
These are the the leading inventors for applications assigned to TEL FSI, Inc.:
TEL FSI, Inc. based in Chaska, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Systems and methods for treating substrates with cryogenic fluid mixtures
#2 | 2018-09-20 ✅ Patent 10,748,788 granted on 2020-08-18System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays
#3 | 2018-06-07 ✅ Patent 10,418,270 granted on 2019-09-17Wafer edge lift pin design for manufacturing a semiconductor device
#4 | 2017-11-30 ✅ Patent 10,625,280 granted on 2020-04-21Apparatus for spraying cryogenic fluids
#5 | 2017-02-02 ✅ Patent 9,982,664 granted on 2018-05-29Systems and methods for metering a dose volume of fluid used to treat microelectronic substrates
#6 | 2016-10-20 ✅ Patent 10,014,191 granted on 2018-07-03Systems and methods for treating substrates with cryogenic fluid mixtures
#7 | 2016-09-22 ✅ Patent 10,020,207 granted on 2018-07-10Apparatus and method for scanning an object through a fluid stream
#8 | 2016-06-16 ✅ Patent 9,564,378 granted on 2017-02-07Detection of lost wafer from spinning chuck
#9 | 2016-06-09 ✅ Patent 9,887,107 granted on 2018-02-06Methodologies for rinsing tool surfaces in tools used to process microelectronic workpieces
#10 | 2016-04-07 ✅ Patent 10,020,217 granted on 2018-07-10Systems and methods for treating substrates with cryogenic fluid mixtures
#11 | 2016-04-07 ✅ Patent 10,062,596 granted on 2018-08-28Systems and methods for treating substrates with cryogenic fluid mixtures
#12 | 2016-01-14 ✅ Patent 9,691,628 granted on 2017-06-27Process for silicon nitride removal selective to SiGe
#13 | 2015-06-18 ✅ Patent 9,666,456 granted on 2017-05-30Method and apparatus for treating a workpiece with arrays of nozzles
#14 | 2015-06-11 ✅ Patent 9,490,138 granted on 2016-11-08Method of substrate temperature control during high temperature wet processing
#15 | 2015-06-11 ✅ Patent 9,412,639 granted on 2016-08-09Method of using separate wafer contacts during wafer processing
#16 | 2015-03-12 ✅ Patent 9,321,087 granted on 2016-04-26Apparatus and method for scanning an object through a fluid spray
#17 | 2014-11-13PROCESS COMPRISING WATER VAPOR FOR HAZE ELIMINATION AND RESIDUE REMOVAL
#18 | 2014-09-18 ✅ Patent 9,831,107 granted on 2017-11-28Processing system and method for providing a heated etching solution
#19 | 2014-09-18 ✅ Patent 9,911,631 granted on 2018-03-06Processing system and method for providing a heated etching solution
#20 | 2014-07-24 ✅ Patent 9,017,568 granted on 2015-04-28Process for increasing the hydrophilicity of silicon surfaces following HF treatment
#21 | 2014-07-24 ✅ Patent 8,871,108 granted on 2014-10-28Process for removing carbon material from substrates
#22 | 2013-08-22 ✅ Patent 9,039,840 granted on 2015-05-26Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
#23 | 2013-08-08 ✅ Patent 9,299,570 granted on 2016-03-29Process for silicon nitride removal selective to SiGe
#24 | 2013-05-09 ✅ Patent 8,859,435 granted on 2014-10-14Process for removing material from substrates
#25 | 2013-02-14 ✅ Patent 8,978,675 granted on 2015-03-17Method and apparatus for treating a workpiece with arrays of nozzles
#26 | 2013-02-07 ✅ Patent 8,967,167 granted on 2015-03-03Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
#27 | 2013-02-07 ✅ Patent 8,668,778 granted on 2014-03-11Method of removing liquid from a barrier structure
#28 | 2013-01-03 ✅ Patent 9,412,628 granted on 2016-08-09Acid treatment strategies useful to fabricate microelectronic devices and precursors thereof
#29 | 2012-11-01 ✅ Patent 8,684,015 granted on 2014-04-01Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
#30 | 2012-06-14 ✅ Patent 9,059,104 granted on 2015-06-16Process for selectively removing nitride from substrates
#31 | 2011-12-15 ✅ Patent 9,263,303 granted on 2016-02-16Methodologies for rinsing tool surfaces in tools used to process microelectronic workpieces
#32 | 2010-12-30 ✅ Patent 8,920,577 granted on 2014-12-30Process for treatment of substrates with water vapor or steam
#33 | 2010-01-28 ✅ Patent 8,394,228 granted on 2013-03-12Apparatus for removing material from one or more substrates
#34 | 2008-11-06 ✅ Patent 8,656,936 granted on 2014-02-25Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
#35 | 2008-01-10 ✅ Patent 8,387,635 granted on 2013-03-05Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
#36 | 2007-10-25 ✅ Patent 8,544,483 granted on 2013-10-01Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
Also check out TEL FSI, Inc.'s (Chaska, United States) applicant profile with 29 patent applications submitted.
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