Kyonggi-do
South Korea
3
2010-08-19
1
2014-07-08
These are the the leading inventors for applications assigned to EUGENE TECHNOLOGY CO., LTD.:
EUGENE TECHNOLOGY CO., LTD. based in Kyonggi-do, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Exhaust unit, exhaust method using the exhaust unit, and substrate processing apparatus including the exhaust unit
#2 | 2010-08-05SHOWERHEAD, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SHOWERHEAD, AND PLASMA SUPPLYING METHOD USING THE SHOWERHEAD
#3 | 2010-07-15SUBSTRATE PROCESSING APPARATUS
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