SÜSS MICRO TEC LITHOGRAPHY GMBH

City:

Garching

Country:

Germany

Published Applications:

Last publication date:

2009-01-01

Patent Grants:

Last grant date:

2011-05-31

Top Inventors for applications by SÜSS MICRO TEC LITHOGRAPHY GMBH

These are the the leading inventors for applications assigned to SÜSS MICRO TEC LITHOGRAPHY GMBH:

Katrin Weilermann 1 Garching, Germany
Karl-Josef Kramer 1 Garching, Germany

Recent patent applications by SÜSS MICRO TEC LITHOGRAPHY GMBH

SÜSS MICRO TEC LITHOGRAPHY GMBH based in Garching, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2009-01-01 ✅ Patent 7,950,347 granted on 2011-05-31

US20090000544A1

Electricity

Rotatable device for holding a substrate

AssigneeID:

239596 ⎘