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Assignee profile:

Multibeam Systems Inc.

City:

Santa Clara, California

Country:

United States

Published Applications:

Last publication date:

2009-03-05

Patent Grants:

Last grant date:

2010-08-31

Top Inventors for applications by Multibeam Systems Inc.

These are the the leading inventors for applications assigned to Multibeam Systems Inc.:

N. William Parker 8 Pleasanton, CA United States
N. William Parker 4 Fairfield, CA United States
S. Daniel Miller 3 Gilroy, CA United States
Alan D. BRODIE 2 Palo Alto, CA United States

Frank Ching-Feng Tsai 2 Saratoga, CA United States
Edward M. Yin 2 Cupertino, CA United States
Gerry B. Andeen 1 Menlo Park, CA United States
Tadashi KOTSUGI 1 Kanagawa, Japan

Martin E. Lee 1 Saratoga, CA United States
Victor A. Galande 1 Pittsburg, CA United States
Koji TAKEYA 1 Kanagawa, Japan
Takashi FUSE 1 Kanagawa, Japan

Recent patent applications by Multibeam Systems Inc.

Multibeam Systems Inc. based in Santa Clara, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2009-03-05 ✅ Patent 7,786,454 granted on 2010-08-31

US20090057577A1

Electricity

Optics for generation of high current density patterned charged particle beams

#2 | 2009-01-08

US20090008579A1

Electricity

ELECTRON BEAM LITHOGRAPHY APPARATUS AND DESIGN METHOD OF PATTERNED BEAM-DEFINING APERTURE

#3 | 2006-08-03 ✅ Patent 7,456,402 granted on 2008-11-25

US20060169899A1

Electricity

Detector optics for multiple electron beam test system

#4 | 2006-07-06 ✅ Patent 7,462,848 granted on 2008-12-09

US20060145097A1

Electricity

Optics for generation of high current density patterned charged particle beams

#5 | 2006-07-06 ✅ Patent 7,435,956 granted on 2008-10-14

US20060145087A1

Electricity

Apparatus and method for inspection and testing of flat panel display substrates

#6 | 2006-03-16 ✅ Patent 7,227,142 granted on 2007-06-05

US20060054817A1

Electricity

Dual detector optics for simultaneous collection of secondary and backscattered electrons

#7 | 2005-12-20 ✅ Patent 6,977,375 granted on 2005-12-20

US9789180

Multi-beam multi-column electron beam inspection system

#8 | 2005-03-29 ✅ Patent 6,872,958 granted on 2005-03-29

US10059048

Platform positioning system

#9 | 2005-01-18 ✅ Patent 6,844,550 granted on 2005-01-18

US10630619

Multi-beam multi-column electron beam inspection system

#10 | 2005-01-06 ✅ Patent 6,943,351 granted on 2005-09-13

US20050001178A1

Electricity

Multi-column charged particle optics assembly

#11 | 2005-01-06 ✅ Patent 7,122,795 granted on 2006-10-17

US20050001165A1

Electricity

Detector optics for charged particle beam inspection system

AssigneeID:

240140 ⎘