T.P.S. SYSTEM CO., LTD.

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2008-02-21

Patent Grants:

Last grant date:

Top Inventors for applications by T.P.S. SYSTEM CO., LTD.

These are the the leading inventors for applications assigned to T.P.S. SYSTEM CO., LTD.:

Kazu Asano 1 Tokyo, Japan
Ryuji Okamoto 1 Kyoto, Japan
Yukihiro Murakami 1 Tokyo, Japan

Recent patent applications by T.P.S. SYSTEM CO., LTD.

T.P.S. SYSTEM CO., LTD. based in Tokyo, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2008-02-21

US20080043806A1

Physics

Stage for Holding Silicon Wafer Substrate and Method for Measuring Temperature of Silicon Wafer Substrate

AssigneeID:

260970 ⎘