Santa Clara, California
United States
13
2008-09-18
13
2010-10-26
These are the the leading inventors for applications assigned to SensArray Corporation:
SensArray Corporation based in Santa Clara, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Process condition sensing wafer and data analysis system
#2 | 2008-09-18 ✅ Patent 8,046,193 granted on 2011-10-25Determining process condition in substrate processing module
#3 | 2008-04-22 ✅ Patent 7,360,463 granted on 2008-04-22Process condition sensing wafer and data analysis system
#4 | 2008-04-17 ✅ Patent 7,497,134 granted on 2009-03-03Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process
#5 | 2008-04-17 ✅ Patent 7,698,952 granted on 2010-04-20Pressure sensing device
#6 | 2007-11-01 ✅ Patent 7,555,948 granted on 2009-07-07Process condition measuring device with shielding
#7 | 2007-11-01 ✅ Patent 7,540,188 granted on 2009-06-02Process condition measuring device with shielding
#8 | 2007-03-01 ✅ Patent 7,855,549 granted on 2010-12-21Integrated process condition sensing wafer and data analysis system
#9 | 2007-01-02 ✅ Patent 7,156,924 granted on 2007-01-02System and method for heating and cooling wafer at accelerated rates
#10 | 2006-11-14 ✅ Patent 7,135,852 granted on 2006-11-14Integrated process condition sensing wafer and data analysis system
#11 | 2006-08-10 ✅ Patent 7,757,574 granted on 2010-07-20Process condition sensing wafer and data analysis system
#12 | 2006-01-19 ✅ Patent 7,363,195 granted on 2008-04-22Methods of configuring a sensor network
#13 | 2005-11-03 ✅ Patent 7,149,643 granted on 2006-12-12Integrated process condition sensing wafer and data analysis system
263025 ⎘