Kyungki-do
South Korea
3
2008-10-23
0
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These are the the leading inventors for applications assigned to ATTO CO., LTD.:
ATTO CO., LTD. based in Kyungki-do, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
METHOD OF FORMING AMORPHOUS CARBON LAYER USING CROSS TYPE HYDROCARBON COMPOUND AND METHOD OF FORMING LOW-K DIELECTRIC LAYER USING THE SAME
#2 | 2007-09-27APPARATUS FOR DEPOSITING ATOMIC LAYER USING GAS SEPARATION TYPE SHOWERHEAD
#3 | 2007-09-13APPARATUS FOR CLEANING CHAMBER USING GAS SEPARATION TYPE SHOWERHEAD
272000 ⎘